公开(公告)号：US20110144471A1

公开(公告)日：2011-06-16

申请号：US12639605

申请日：2009-12-16

Applicant: Hui-Lin HSU ,  Tri-Rung Yew ,  Hsin Chen ,  Yung-Chan Chen

Inventor： Hui-Lin HSU ,  Tri-Rung Yew ,  Hsin Chen ,  Yung-Chan Chen

IPC: A61B5/0478 ,  H05K3/10

CPC classification number: A61B5/0478 ,  A61B5/4058 ,  A61B5/4824 ,  A61B5/6846 ,  A61B2562/125 ,  B82Y15/00 ,  B82Y30/00 ,  H05K1/0393 ,  H05K3/24 ,  H05K2201/026 ,  H05K2201/0323 ,  Y10T29/49155

Abstract: The present invention discloses a flexible probe structure comprises at least one electrode using a CNT layer as the electrode interface. The CNT layer disposed on the electrode surface is processed with an UV-ozone treatment to form a great number of carbon-oxygen functional groups on the surface of CNT. The carbon-oxygen functional groups can greatly reduce the interface impedance of the electrode and the biological tissue fluid. Thereby, the measurement can achieve better quality. The present invention also discloses a method for fabricating a flexible probe structure, which comprises steps: preparing a flexible substrate; forming a conductive layer on the flexible substrate, and defining an electrode, a wire and a metal pad on the conductive layer; forming a CNT layer on the electrode; forming an insulating layer on the conductive layer to insulate the wire from the environment; and processing the CNT layer with an UV-ozone treatment.

Abstract translation: 本发明公开了一种柔性探针结构，其包括使用CNT层作为电极界面的至少一个电极。 通过UV-臭氧处理处理设置在电极表面上的CNT层，以在CNT的表面上形成大量的碳 - 氧官能团。 碳氧官能团可以大大降低电极和生物组织液的界面阻抗。 因此，测量可以实现更好的质量。 本发明还公开了一种用于制造柔性探针结构的方法，其包括步骤：制备柔性基底; 在所述柔性基板上形成导电层，并且在所述导电层上限定电极，导线和金属焊盘; 在所述电极上形成CNT层; 在导电层上形成绝缘层以使电线与环境绝缘; 并用UV-臭氧处理处理CNT层。

公开(公告)号：US20070238318A1

公开(公告)日：2007-10-11

申请号：US11510294

申请日：2006-08-25

Applicant: Hui-Lin Hsu ,  Tri-Rung Yew ,  Po-Yuan Lo ,  Zing-Way Pei

Inventor： Hui-Lin Hsu ,  Tri-Rung Yew ,  Po-Yuan Lo ,  Zing-Way Pei

IPC: H01L21/31 ,  H01L21/469

CPC classification number: H01L51/052 ,  C08L65/00 ,  C08L79/02 ,  H01L51/0036

Abstract: A method of fabricating a semiconductor device is provided. The method of fabricating the semiconductor device comprises a substrate. A polyacrylonitrile (PAN) powder is dissolved in a solvent and the solvent is heated to form a PAN solution. The PAN solution is cooled down and the PAN solution is then formed on the substrate. The PAN solution is allowed to stand and the solvent in the PAN solution is then removed to form a PAN dielectric layer on the substrate. A patterned conductive layer is formed on the PAN dielectric layer.

Abstract translation: 提供一种制造半导体器件的方法。 制造半导体器件的方法包括衬底。 将聚丙烯腈（PAN）粉末溶解在溶剂中，加热溶剂形成PAN溶液。 将PAN溶液冷却，然后在基板上形成PAN溶液。 使PAN溶液静置，然后除去PAN溶液中的溶剂，以在基材上形成PAN介电层。 在PAN介电层上形成有图案的导电层。