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公开(公告)号：US20090269490A1
公开(公告)日：2009-10-29
申请号：US12425148
申请日：2009-04-16
申请人： Yoshikazu MORIYAMA , Hideaki NISHIKAWA , Masayoshi YAJIMA , Hiroshi FURUTANI , Shinichi MITANI , Michio NISHIBAYASHI
发明人： Yoshikazu MORIYAMA , Hideaki NISHIKAWA , Masayoshi YAJIMA , Hiroshi FURUTANI , Shinichi MITANI , Michio NISHIBAYASHI
CPC分类号： H01L21/68785 , C23C16/4412 , C23C16/4584 , C23C16/4586 , H01L21/67109 , H01L21/6838 , H01L21/68735
摘要： An object of the present invention is to provide a coating apparatus in which the substrate can be reliably rotated at high speed. Another object of the invention is to provide a coating method of forming a coating on a substrate while reliably rotating it at high speed. A coating apparatus includes a susceptor for supporting a silicon wafer, and a rotating portion for rotating the susceptor. The rotating portion is covered on top with the susceptor to form a P2 region. The contact surface of the susceptor with the silicon wafer has a plurality of holes therein. The silicon wafer is attached to the susceptor by evacuating gas from the P2 region.
摘要翻译： 本发明的目的在于提供一种能够高速可靠地旋转基板的涂布装置。 本发明的另一个目的是提供一种在可靠地高速旋转基板的同时在基板上形成涂层的涂布方法。 涂覆装置包括用于支撑硅晶片的基座和用于旋转基座的旋转部分。 旋转部分在顶部被基座覆盖以形成P2区域。 具有硅晶片的基座的接触面在其中具有多个孔。 通过从P2区域排出气体将硅晶片附接到基座。
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公开(公告)号：US06486995B2
公开(公告)日：2002-11-26
申请号：US09842732
申请日：2001-04-27
IPC分类号： G02B2608
CPC分类号： G02B26/105 , G02B7/1821 , G02B27/646
摘要： An optical scanner and a two-dimensional scanning device using the same are provided. The optical scanner includes a scanning mechanism and a swing support. The swing support is designed to support the scanning mechanism on a housing so as to allow the scanning mechanism to swing and made up of a plurality of springs. The springs are so constructed so as resist unwanted vibrations acting on the optical scanner in directions different from a scan direction, thereby ensuring a stable scan of a light beam at all the time.
摘要翻译： 提供了一种光学扫描器和使用其的二维扫描装置。 光学扫描仪包括扫描机构和摆动支架。 摆动支撑件被设计成支撑壳体上的扫描机构，以便允许扫描机构摆动并由多个弹簧构成。 弹簧被构造成抵抗与扫描方向不同的方向作用在光学扫描器上的不需要的振动，从而确保始终稳定地扫描光束。
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公开(公告)号：US20120294404A1
公开(公告)日：2012-11-22
申请号：US13454573
申请日：2012-04-24
申请人： Yoichi WADA , Masaya OHTSUKA , Hideaki NISHIKAWA
发明人： Yoichi WADA , Masaya OHTSUKA , Hideaki NISHIKAWA
CPC分类号： G21C19/317 , G21C9/06 , Y02E30/40
摘要： A hydrogen treatment facility for treating hydrogen without using a power source is disposed outside a reactor containment vessel and in an upper portion of a reactor building. A hydrogen detector detecting hydrogen in the reactor building is connected to a control apparatus operated by an independent power source activated at the time of a station black-out. A circulation passage for air circulation generated in the reactor building is disposed in the reactor building and outside the reactor containment vessel. A hydrogen treatment duct connects to the circulation passage and a gangway and a room with equipment. During a severe accident and station black-out and when hydrogen concentration detected by the hydrogen detection apparatus exceeds a set concentration, the hydrogen treatment duct is put in use by the control apparatus. Air containing the hydrogen is introduced into the hydrogen treatment facilities through the hydrogen treatment duct and the circulation passage.
摘要翻译： 用于在不使用电源的情况下处理氢的氢处理设备设置在反应堆容纳容器的外部和反应堆建筑物的上部。 在反应堆建筑物中检测氢的氢检测器连接到由在站点熄灭时激活的独立电源操作的控制装置。 用于在反应堆建筑物中产生的用于空气循环的循环通道设置在反应堆建筑物中并在反应堆容纳容器外部。 氢气处理管道连接到循环通道和通道和设备的房间。 在严重事故和车站熄火期间，当氢检测装置检测到的氢浓度超过设定浓度时，控制装置使用氢处理管道。 通过氢处理管道和循环通道将含有氢的空气引入氢处理设备。
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公开(公告)号：US07494594B2
公开(公告)日：2009-02-24
申请号：US11633452
申请日：2006-12-05
IPC分类号： C23F1/00
摘要： An electrostatic actuator for increasing a swing (deflection angle) of a movable structure includes a laminate substrate in which a thin film silicon layer is formed on a silicon substrate through a buried insulating film and a torsion beam movable structure constructed with the thin film silicon layer. A potential difference is generated between a movable side comb-tooth electrode of the movable structure and a fixed side comb-tooth electrode disposed to face the movable side comb-tooth electrode to swing the movable structure. The fixed side comb-tooth electrode is formed in the inside of a through hole bored through the laminate substrate.
摘要翻译： 用于增加可移动结构的摆动（偏转角）的静电致动器包括其中通过掩埋绝缘膜在硅衬底上形成薄膜硅层的层叠衬底和由薄膜硅层构成的扭力梁可移动结构 。 在可移动结构的可动侧梳齿电极和设置成面对可动侧梳齿电极的摆动可移动结构的固定侧梳齿电极之间产生电位差。 固定侧梳齿电极形成在穿过层叠基板的通孔的内侧。
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公开(公告)号：US5579148A
公开(公告)日：1996-11-26
申请号：US354015
申请日：1994-11-28
申请人： Hideaki Nishikawa , Tsukasa Koumura
发明人： Hideaki Nishikawa , Tsukasa Koumura
CPC分类号： G02B26/101 , G02B26/085
摘要： A two-dimensional optical scanner not affected by acceleration disturbances. The two-dimensional optical scanner includes a mirror section having at least one mirror surface formed thereon. A first frame is provided outside the mirror section with a first clearance therebetween. First springs connect the mirror section and the first frame and torsionally vibrating about an axis passing through the center of gravity of the mirror section. A second frame is provided outside the first frame with a second clearance therebetween, and second springs connect the first frame and the second frame. The second springs torsionally vibrate about an axis passing through the center of gravity of mirror section. Piezoelectric bimorphs 21, 22, 23, and 24 drive the optical scanner to impart a torsional oscillation to the first springs and the second springs.
摘要翻译： 不受加速度扰动影响的二维光学扫描仪。 二维光学扫描器包括其上形成有至少一个镜面的镜部分。 第一框架设置在镜部分之外，其间具有第一间隙。 第一弹簧连接镜部分和第一框架，并围绕穿过镜部分重心的轴线扭转振动。 第二框架设置在第一框架外部，第二框架之间具有第二间隙，第二弹簧连接第一框架和第二框架。 第二弹簧围绕穿过镜部分的重心的轴线扭转振动。 压电双晶片21,22,23和24驱动光学扫描器以向第一弹簧和第二弹簧施加扭转振荡。
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公开(公告)号：US20070075033A1
公开(公告)日：2007-04-05
申请号：US11633452
申请日：2006-12-05
IPC分类号： C23F1/00
摘要： An electrostatic actuator for increasing a swing (deflection angle) of a movable structure includes a laminate substrate in which a thin film silicon layer is formed on a silicon substrate through a buried insulating film and a torsion beam movable structure constructed with the thin film silicon layer. A potential difference is generated between a movable side comb-tooth electrode of the movable structure and a fixed side comb-tooth electrode disposed to face the movable side comb-tooth electrode to swing the movable structure. The fixed side comb-tooth electrode is formed in the inside of a through hole bored through the laminate substrate.
摘要翻译： 用于增加可移动结构的摆动（偏转角）的静电致动器包括其中通过掩埋绝缘膜在硅衬底上形成薄膜硅层的层叠衬底和由薄膜硅层构成的扭力梁可移动结构 。 在可移动结构的可动侧梳齿电极和设置成面对可动侧梳齿电极的摆动可移动结构的固定侧梳齿电极之间产生电位差。 固定侧梳齿电极形成在通过层压基板钻孔的通孔的内部。
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7.发明授权Optical data reader capable of quickly changing a condensing position of a light beam 失效能够快速改变光束聚光位置的光学数据读取器
公开(公告)号：US5498868A
公开(公告)日：1996-03-12
申请号：US299365
申请日：1994-09-01
CPC分类号： G02B3/14 , G02B26/105 , G06K7/10702 , G06K7/10811
摘要： An optical data reader including a device for producing a light beam, and a device for changing a condensing position of the light beams before the light beam is reflected from a target such as a bar code. The device for changing the condensing position is either a variable focus lens or mirror, each adapted to change the curvature of the surface of the lens or mirror in order to move the condensing position cyclically and continuously. The variable focus mirror changes the shape of its reflecting surface in response to electrical signals from a driving circuit. Excess pressure within the mirror caused by the mirror surface being attracted inwards is expelled through intake/outlet ports formed in the drive electrode. The variable focus lens alters the focal length of the lens each time the curvature of the surface thereof is changed. Preferably, the curvature of the lens surface is changed by increasing fluid pressure within the lens, while the curvature of the variable focus mirror is electrically driven. Either the variable focus lens or mirror is disposed in the optical path between the light source and the target. The light source is usually a laser or laser diode.
摘要翻译： 一种光学数据读取器，包括用于产生光束的装置，以及用于在光束从诸如条形码的目标反射之前改变光束的聚光位置的装置。 用于改变冷凝位置的装置是可变焦距透镜或反射镜，每一个适于改变透镜或反射镜表面的曲率，以循环地和连续地移动聚光位置。 可变焦距反射镜响应于来自驱动电路的电信号改变其反射表面的形状。 由镜面被向内吸引的反射镜内的过大的压力通过形成在驱动电极中的进/出口被排出。 可变焦距透镜每当其表面的曲率改变时改变透镜的焦距。 优选地，通过增加透镜内的流体压力来改变透镜表面的曲率，同时可变焦距反射镜的曲率被电驱动。 可变焦距透镜或镜子都设置在光源和目标之间的光路中。 光源通常是激光或激光二极管。
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