公开(公告)号：US20060003482A1

公开(公告)日：2006-01-05

申请号：US10710286

申请日：2004-06-30

申请人： Anil Chinthakindi ,  Henri Schnurmann

发明人： Anil Chinthakindi ,  Henri Schnurmann

IPC分类号： H01L21/00

CPC分类号： H01G5/18 ,  H01G5/38

摘要： A micro electro-mechanical system (MEMS) variable capacitor is described, wherein movable comb electrodes of opposing polarity are fabricated simultaneously on the same substrate and are independently actuated. The electrodes are formed in an interdigitated fashion to maximize capacitance. The MEMS variable capacitor includes CMOS manufacturing steps in combination with elastomeric material selectively used in areas under greatest stress to ensure that the varactor will not fail as a result of stresses that may result in the separation of dielectric material from the conductive elements. The combination of a CMOS process with the conducting elastomeric material between vias increases the overall sidewall area, which provides increased capacitance density.

摘要翻译： 描述了微机电系统（MEMS）可变电容器，其中相同极性的可移动梳状电极同时制造在相同的衬底上并且被独立地致动。 电极以交叉形式形成以最大化电容。 MEMS可变电容器包括与在最大应力区域选择性地使用的弹性体材料组合的CMOS制造步骤，以确保变容二极管不会由于可能导致介电材料与导电元件分离的应力而失效。 CMOS工艺与通孔之间的导电弹性体材料的组合增加了整个侧壁面积，这提供了增加的电容密度。