公开(公告)号：US20120188625A1

公开(公告)日：2012-07-26

申请号：US13408151

申请日：2012-02-29

申请人： Thilo Sandner ,  Harald Schenk ,  Joerg Heber ,  Thomas Klose ,  Andreas Bergmann ,  Christian Gerwig ,  Thomas Knieling

发明人： Thilo Sandner ,  Harald Schenk ,  Joerg Heber ,  Thomas Klose ,  Andreas Bergmann ,  Christian Gerwig ,  Thomas Knieling

IPC分类号： G02B26/10 ,  H05B6/80 ,  B23K26/00 ,  H05B6/00 ,  H05B1/00

CPC分类号： G01J5/061 ,  G01J5/026 ,  G01J5/0809 ,  G02B7/008 ,  G02B26/0816

摘要： A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.

摘要翻译： 微机械装置包括微机械功能结构和与微机械功能结构相关联的电磁辐射加热，其形成为在微机械功能结构中引起空间和时间上限定的温度或空间和时间上限定的温度过程。

公开(公告)号：US20120033214A1

公开(公告)日：2012-02-09

申请号：US13207540

申请日：2011-08-11

申请人： Fabian Zimmer ,  Alexander Wolter ,  Harald Schenk

发明人： Fabian Zimmer ,  Alexander Wolter ,  Harald Schenk

IPC分类号： G01J3/45 ,  C23F1/02 ,  B05D3/02 ,  B05D3/06 ,  G02B5/18 ,  B05D5/06

CPC分类号： G02B5/1847 ,  G02B5/1861 ,  G02B26/0808

摘要： The invention relates to electromagnetic radiation microoptical diffraction gratings and to a method suitable for the manufacture thereof. The diffraction gratings in accordance with the invention can be used as microspectrometers in the form of scanning microgratings. The microgratings are provided with a surface structure and are able to be manufactured cost effectively and in high volumes. The surface structure is formed at a surface of a substrate and is formed from linear structural elements arranged substantially equidistantly and aligned substantially parallel to one another. At least part of the surface of the substrate and of the structural elements is coated with at least one further layer which forms a uniform sinusoidal surface contoured in a wave-shape (sinusoidal) manner and having alternating arranged wave peaks and wave troughs. A reflective layer can additionally be applied to increase the intensity of reflected radiation.

摘要翻译： 本发明涉及电磁辐射微光衍射光栅及其制造方法。 根据本发明的衍射光栅可以用作扫描微光学形式的微光谱仪。 微型研磨机具有表面结构，并且能够以高成本且高成本地制造。 表面结构形成在基板的表面，并且由基本上等距地布置并基本上彼此平行排列的线性结构元件形成。 衬底表面和结构元件的至少一部分涂覆有至少一个另外的层，其形成具有波形（正弦）方式并且具有交替布置的波峰和波谷的均匀正弦曲面。 另外可以应用反射层以增加反射辐射的强度。

公开(公告)号：US07977897B2

公开(公告)日：2011-07-12

申请号：US12243308

申请日：2008-10-01

申请人： Harald Schenk

发明人： Harald Schenk

IPC分类号： H02K33/00

CPC分类号： G02B26/0841

摘要： The invention relates to an apparatus and to a method for controlling or regulating the deflection of micromechanically manufactured deflectable elements which, driven electrostatically, are deflected in an oscillating manner. It is the object of the invention to provide a possibility with which a much larger deflection range can be utilized and in so doing the required voltage potential difference for the electrostatic drive of a deflection can be kept small and the occurrence of the pull-in effect can be avoided. In accordance with the invention, a deflectable element is present which is held at a frame element by at least one spring element and which can be deflected using an electrostatic drive. The deflection can be achieved by means of at least one counter-electrode and the deflectable element usable as an electrode. In addition, at least one detector is present which is suitable for the contactless detection of at least one deflection position and which is connected to an electronic evaluation and control unit to influence the electrical voltage potential difference between the deflectable element and the counter-electrode(s) in dependence of a specific deflection position.

摘要翻译： 本发明涉及一种用于控制或调节微机械制造的可偏转元件的偏转的装置和方法，其静电驱动以振荡方式偏转。 本发明的目的是提供一种可以利用更大的偏转范围的可能性，并且在这样做时，用于偏转的静电驱动的所需电压电位差可以保持较小，并且引入效应的发生 可以避免。 根据本发明，存在可偏转元件，其通过至少一个弹簧元件保持在框架元件处，并且可以使用静电驱动来偏转。 可以通过至少一个对电极和可用作电极的可偏转元件来实现偏转。 另外，存在至少一个适用于至少一个偏转位置的非接触式检测并且连接到电子评估和控制单元以影响可偏转元件和对电极之间的电压电位差的检测器（ s）根据特定的偏转位置。

公开(公告)号：US07573634B2

公开(公告)日：2009-08-11

申请号：US11630175

申请日：2005-06-27

申请人： Uwe Jan Schmidt ,  Thilo Sandner ,  Harald Schenk ,  Alexandre Gatto ,  Minghong Yang ,  Jörg Heber ,  Norbert Kaiser

发明人： Uwe Jan Schmidt ,  Thilo Sandner ,  Harald Schenk ,  Alexandre Gatto ,  Minghong Yang ,  Jörg Heber ,  Norbert Kaiser

IPC分类号： G02B5/08

CPC分类号： G02B26/0833 ,  G02B5/08

摘要： The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminum layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.

摘要翻译： 本发明涉及具有用于深紫外（DUV）和真空 - 紫外（VUV）光谱范围的高反射涂层的微机械镜，其基于涂覆有铝层和透明喷涂涂层的基底。 同样，本发明涉及用于生产具有高反射涂层的这种微机械层的方法及其用于生产微传感器，光学数据存储或视频和数据投影显示器的用途。

公开(公告)号：US20090072769A1

公开(公告)日：2009-03-19

申请号：US12243308

申请日：2008-10-01

申请人： Harald Schenk

发明人： Harald Schenk

IPC分类号： H02K33/00

CPC分类号： G02B26/0841

摘要： The invention relates to an apparatus and to a method for controlling or regulating the deflection of micromechanically manufactured deflectable elements which, driven electrostatically, are deflected in an oscillating manner. It is the object of the invention to provide a possibility with which a much larger deflection range can be utilized and in so doing the required voltage potential difference for the electrostatic drive of a deflection can be kept small and the occurrence of the pull-in effect can be avoided. In accordance with the invention, a deflectable element is present which is held at a frame element by at least one spring element and which can be deflected using an electrostatic drive. The deflection can be achieved by means of at least one counter-electrode and the deflectable element usable as an electrode. In addition, at least one detector is present which is suitable for the contactless detection of at least one deflection position and which is connected to an electronic evaluation and control unit to influence the electrical voltage potential difference between the deflectable element and the counter-electrode(s) in dependence of a specific deflection position.

摘要翻译： 本发明涉及一种用于控制或调节微机械制造的可偏转元件的偏转的装置和方法，其静电驱动以振荡方式偏转。 本发明的目的是提供可以利用更大的偏转范围的可能性，并且因此可以将偏转的静电驱动所需的电压电位差保持较小并且引入效果的发生 可以避免。 根据本发明，存在可偏转元件，其通过至少一个弹簧元件保持在框架元件处，并且可以使用静电驱动来偏转。 可以通过至少一个对电极和可用作电极的可偏转元件来实现偏转。 另外，存在至少一个适用于至少一个偏转位置的非接触式检测并且连接到电子评估和控制单元以影响可偏转元件和对电极之间的电压电位差的检测器（ s）根据特定的偏转位置。

公开(公告)号：US20080239531A1

公开(公告)日：2008-10-02

申请号：US12058855

申请日：2008-03-31

申请人： Harald SCHENK ,  Thilo SANDNER

发明人： Harald SCHENK ,  Thilo SANDNER

IPC分类号： G02B7/182

CPC分类号： G02B26/0833 ,  G02B27/0018

摘要： An optical device includes a deflectable optical functional structure for interacting with electromagnetic radiation incident thereon, and a protective structure which is associated to the optical functional structure and at least partly transparent for the electromagnetic radiation. The optical functional structure is arranged in a manner tilted relative to the protective structure so that, in a non-deflected position of the optical functional structure, a main beam path of the electromagnetic radiation which interacts with the optical functional structure through the protective structure has an angle relative to a sub-beam path of the electromagnetic radiation reflected at the protective structure.

摘要翻译： 光学装置包括用于与入射在其上的电磁辐射相互作用的可偏转光学功能结构，以及与光学功能结构相关联并且对于电磁辐射至少部分透明的保护结构。 光学功能结构以相对于保护结构倾斜的方式布置，使得在光学功能结构的非偏转位置中，通过保护结构与光学功能结构相互作用的电磁辐射的主光束路径具有 相对于在保护结构处反射的电磁辐射的子光束路径的角度。

公开(公告)号：US20080068704A1

公开(公告)日：2008-03-20

申请号：US11630175

申请日：2005-06-27

申请人： Jan-Uwe Schmidt ,  Thilo Sandner ,  Harald Schenk ,  Alexandre Gatto ,  Minghong Yang ,  Jorg Heber ,  Norbert Kaiser

发明人： Jan-Uwe Schmidt ,  Thilo Sandner ,  Harald Schenk ,  Alexandre Gatto ,  Minghong Yang ,  Jorg Heber ,  Norbert Kaiser

IPC分类号： G02B5/08

CPC分类号： G02B26/0833 ,  G02B5/08

摘要： The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminium layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.

摘要翻译： 本发明涉及具有用于深紫外（DUV）和真空 - 紫外（VUV）光谱范围的高反射涂层的微机械镜，其基于涂覆有铝层和透明喷涂涂层的基底。 同样，本发明涉及用于生产具有高反射涂层的这种微机械层的方法及其用于生产微传感器，光学数据存储或视频和数据投影显示器的用途。

公开(公告)号：US20070165297A1

公开(公告)日：2007-07-19

申请号：US11640497

申请日：2006-12-18

申请人： Thilo Sandner ,  Wolfram Pufe ,  Harald Schenk

发明人： Thilo Sandner ,  Wolfram Pufe ,  Harald Schenk

IPC分类号： G02B26/00

CPC分类号： G02B26/0866 ,  G02B26/0825

摘要： The invention relates to active microoptic reflecting components for adapting or changing the focal length or focal position in optical systems. It is the object of the invention to make available a miniaturised reflecting microoptic component for focusing or defocusing incident electromagnetic radiation, with which a variation in the focal distance can be achieved simply and at low cost. On the component according to the invention there is an elastically deformably membrane which is formed at least with one reflecting layer comprising a first material or material mixture and at least with one further layer or substrate which is formed from a second material or material mixture. First and second materials or material mixtures have thermal coefficients of expansion which deviate from each other. In addition a heating or temperature control mechanism is present.

摘要翻译： 本发明涉及用于适应或改变光学系​​统中的焦距或焦点位置的有源微光反射部件。 本发明的目的是提供一种用于聚焦或散焦入射电磁辐射的小型化反射微光学元件，通过该小型化可以简单且低成本地实现焦距的变化。 在根据本发明的部件上，存在可弹性变形的膜，其至少形成有一个包含第一材料或材料混合物的反射层，并且至少形成有由第二材料或材料混合物形成的另一层或基底。 第一和第二材料或材料混合物具有彼此偏离的热膨胀系数。 此外，存在加热或温度控制机构。

公开(公告)号：US07034936B2

公开(公告)日：2006-04-25

申请号：US10916835

申请日：2004-08-11

申请人： Harald Schenk ,  Heinrich Grueger

发明人： Harald Schenk ,  Heinrich Grueger

IPC分类号： G01J3/06 ,  G01J3/18

CPC分类号： G01J3/06

摘要： The present invention is based on the knowledge that the advantages of a moveable dispersive element with regard to the simple detector element and the adjustability of the measurement range and the resolution can also be used in a miniaturization of a spectrometer, when the dispersive element is operated generally in resonance instead by a quasi-static drive. A proposed spectrometer comprises a vibratably suspended dispersive element for spectrally decomposing a light beam, whose spectral distribution is to be determined, into spectral components, a means for putting the vibratably suspended dispersive element into a vibration with a frequency, which is in such a ratio to the natural frequency of the vibratably suspended dispersive element that a resonance amplification of the voltage of the dispersive element occurs, and a detector for detecting a spectral component of the light beam.

摘要翻译： 本发明基于以下知识：当分散元件被操作时，关于简单检测器元件的可移动色散元件的优点和测量范围和分辨率的可调性也可以用于光谱仪的小型化 通常是共振而不是准静态驱动。 所提出的光谱仪包括可振动悬浮的分散元件，用于将其光谱分布被确定的光束光谱分解成光谱分量，用于将振动悬浮的分散元件以一定比例的频率放入振动中的装置 达到分散元件的电压的共振放大发生的可振动悬浮的分散元件的固有频率，以及用于检测光束的光谱分量的检测器。

公开(公告)号：US20050057750A1

公开(公告)日：2005-03-17

申请号：US10916835

申请日：2004-08-11

申请人： Harald Schenk ,  Heinrich Grueger

发明人： Harald Schenk ,  Heinrich Grueger

IPC分类号： G01J3/06 ,  G01J3/28

CPC分类号： G01J3/06

摘要： The present invention is based on the knowledge that the advantages of a moveable dispersive element with regard to the simple detector element and the adjustability of the measurement range and the resolution can also be used in a miniaturization of a spectrometer, when the dispersive element is operated generally in resonance instead by a quasistatic drive. A proposed spectrometer comprises a vibratably suspended dispersive element for spectrally decomposing a light beam, whose spectral distribution is to be determined, into spectral components, a means for putting the vibratably suspended dispersive element into a vibration with a frequency, which is in such a ratio to the natural frequency of the vibratably suspended dispersive element that a resonance amplification of the voltage of the dispersive element occurs, and a detector for detecting a spectral component of the light beam.

摘要翻译： 本发明基于以下知识：当分散元件被操作时，关于简单检测器元件的可移动色散元件的优点和测量范围和分辨率的可调性也可以用于光谱仪的小型化 通常是谐振而不是准静态驱动。 所提出的光谱仪包括可振动悬浮的分散元件，用于将其光谱分布被确定的光束光谱分解成光谱分量，用于将振动悬浮的分散元件以一定比例的频率放入振动中的装置 达到分散元件的电压的共振放大发生的可振动悬浮的分散元件的固有频率，以及用于检测光束的光谱分量的检测器。