公开(公告)号：US08278919B2

公开(公告)日：2012-10-02

申请号：US12854321

申请日：2010-08-11

Applicant: Gregory Alexander Fischer ,  Jonathan Elliott Fine ,  Alan Shane Edelstein

Inventor： Gregory Alexander Fischer ,  Jonathan Elliott Fine ,  Alan Shane Edelstein

IPC: G01R33/02 ,  G01R33/07 ,  G01B7/30

CPC classification number: G01R33/091 ,  G01R33/072

Abstract: A microelectromechanical system (MEMS) device for sensing a magnetic field comprising: a base; a cantilever attached to the base structure at a first end and movable at a second end, the second end oscillating at a predetermined frequency upon application of a current; a magnetic sensor attached to the movable second end; at least one flux concentrator mounted on the base adapted to transfer magnetic flux to the sensor; whereby when the current is applied, the oscillation of the cantilever causes the sensor to oscillate between the lines of flux transferred from the at least one flux concentrator resulting in the shift of the frequency of the sensed magnetic field to the predetermined frequency. The invention further comprises a method of making the MEMS device.

Abstract translation: 一种用于感测磁场的微机电系统（MEMS）装置，包括：基座; 悬臂，其在第一端处附接到所述基部结构并且可在第二端移动，所述第二端在施加电流时以预定频率振荡; 安装在可动第二端的磁性传感器; 安装在基座上的适于将磁通传递到传感器的至少一个磁通集中器; 由此当施加电流时，悬臂的振荡导致传感器在从至少一个集流器传递的磁通线之间振荡，导致感测磁场的频率移动到预定频率。 本发明还包括制造MEMS器件的方法。