Invention Grant
- Patent Title: MEMS oscillating magnetic sensor and method of making
- Patent Title (中): MEMS振荡磁传感器及其制作方法
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Application No.: US12854321Application Date: 2010-08-11
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Publication No.: US08278919B2Publication Date: 2012-10-02
- Inventor: Gregory Alexander Fischer , Jonathan Elliott Fine , Alan Shane Edelstein
- Applicant: Gregory Alexander Fischer , Jonathan Elliott Fine , Alan Shane Edelstein
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Secretary of the Army
- Current Assignee: The United States of America as represented by the Secretary of the Army
- Current Assignee Address: US DC Washington
- Agent Lawrence E. Anderson
- Main IPC: G01R33/02
- IPC: G01R33/02 ; G01R33/07 ; G01B7/30

Abstract:
A microelectromechanical system (MEMS) device for sensing a magnetic field comprising: a base; a cantilever attached to the base structure at a first end and movable at a second end, the second end oscillating at a predetermined frequency upon application of a current; a magnetic sensor attached to the movable second end; at least one flux concentrator mounted on the base adapted to transfer magnetic flux to the sensor; whereby when the current is applied, the oscillation of the cantilever causes the sensor to oscillate between the lines of flux transferred from the at least one flux concentrator resulting in the shift of the frequency of the sensed magnetic field to the predetermined frequency. The invention further comprises a method of making the MEMS device.
Public/Granted literature
- US20120206134A1 MEMS OSCILLATING MAGNETIC SENSOR AND METHOD OF MAKING Public/Granted day:2012-08-16
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