Apparatus for forming a magnetic field and methods of use thereof
    2.
    发明授权
    Apparatus for forming a magnetic field and methods of use thereof 有权
    用于形成磁场的装置及其使用方法

    公开(公告)号:US08773020B2

    公开(公告)日:2014-07-08

    申请号:US13097800

    申请日:2011-04-29

    CPC classification number: H01J37/321 H01J37/32669

    Abstract: Apparatus for forming a magnetic field and methods of use thereof are provided herein. In some embodiments, a plurality of coils having substantially similar dimensions disposed about a process chamber in a symmetric pattern centered about a central axis of the process chamber, wherein the plurality of coils are configured to produce a magnetic field having a plurality of magnetic field lines that are substantially planar and substantially parallel. In some embodiments, the plurality of coils comprises eight coils disposed about the process chamber, wherein each of the eight coils is offset by an angle of about 45 degrees from respective adjacent coils of the eight coils.

    Abstract translation: 本文提供了形成磁场的装置及其使用方法。 在一些实施例中,具有基本相似的尺寸的多个线圈以围绕处理室的中心轴线为中心的对称图案围绕处理室布置,其中多个线圈被配置为产生具有多个磁场线的磁场 其基本上是平面的并且基本上平行。 在一些实施例中,多个线圈包括围绕处理室布置的八个线圈,其中八个线圈中的每一个与八个线圈的相应相邻线圈相距大约45度的角度偏移。

    Electronegative plasma thruster with optimized injection

    公开(公告)号:US10233912B2

    公开(公告)日:2019-03-19

    申请号:US13131366

    申请日:2009-11-24

    Abstract: A plasma thruster includes extraction of a stream of positive ions. The plasma thruster includes a single ionization stage; injecting ionizable gas for said ionization stage comprising injecting a first gas and an electronegative second gas; creating an RF electric field to cause the gases to ionize in the ionization stage creating a first zone called the hot zone, in the ionization stage; the first gas being distributed in the hot first zone, the second gas being distributed in a second zone less hot than said first zone; extracting a stream of negative ions and a stream of positive ions, these being both connected to the ionization stage; and the extraction of a stream of positive ions and the extraction of a stream of negative ions, ensuring that the thruster is electrically neutral.

    APPARATUS FOR FORMING A MAGNETIC FIELD AND METHODS OF USE THEREOF
    6.
    发明申请
    APPARATUS FOR FORMING A MAGNETIC FIELD AND METHODS OF USE THEREOF 有权
    用于形成磁场的装置及其使用方法

    公开(公告)号:US20120097870A1

    公开(公告)日:2012-04-26

    申请号:US13097800

    申请日:2011-04-29

    CPC classification number: H01J37/321 H01J37/32669

    Abstract: Apparatus for forming a magnetic field and methods of use thereof are provided herein. In some embodiments, a plurality of coils having substantially similar dimensions disposed about a process chamber in a symmetric pattern centered about a central axis of the process chamber, wherein the plurality of coils are configured to produce a magnetic field having a plurality of magnetic field lines that are substantially planar and substantially parallel. In some embodiments, the plurality of coils comprises eight coils disposed about the process chamber, wherein each of the eight coils is offset by an angle of about 45 degrees from respective adjacent coils of the eight coils.

    Abstract translation: 本文提供了形成磁场的装置及其使用方法。 在一些实施例中,具有基本相似的尺寸的多个线圈以围绕处理室的中心轴线为中心的对称图案围绕处理室布置,其中多个线圈被配置为产生具有多个磁场线的磁场 其基本上是平面的并且基本上平行。 在一些实施例中,多个线圈包括围绕处理室布置的八个线圈,其中八个线圈中的每一个与八个线圈的相应相邻线圈相距大约45度的角度偏移。

    ELECTRONEGATIVE PLASMA THRUSTER WITH OPTIMIZED INJECTION
    7.
    发明申请
    ELECTRONEGATIVE PLASMA THRUSTER WITH OPTIMIZED INJECTION 审中-公开
    具优化注射的电子等离子体振荡器

    公开(公告)号:US20110232261A1

    公开(公告)日:2011-09-29

    申请号:US13131366

    申请日:2009-11-24

    CPC classification number: F03H1/0025 F03H1/0012 H05H1/54

    Abstract: A plasma thruster includes extraction of a stream of positive ions. The plasma thruster includes a single ionization stage; means for injecting ionizable gas for said ionization stage, said means comprising at least first means for injecting a first gas and second means for injecting an electronegative second gas; means for creating an RF electric field so as to cause the gases to ionize in the ionization stage, said means creating a first zone called the hot zone, in the ionization stage; the first gas being distributed in the hot first zone, the second gas being distributed in a second zone less hot than said first zone; first means for extracting a stream of negative ions and second means for extracting a stream of positive ions, these being both connected to the ionization stage; and the extraction of a stream of positive ions and the extraction of a stream of negative ions, ensuring that the thruster is electrically neutral.

    Abstract translation: 等离子体推进器包括提取正离子流。 等离子体推进器包括单个电离阶段; 用于为所述电离阶段注入可离子化气体的装置,所述装置至少包括用于注入第一气体的第一装置和用于注入电负性第二气体的第二装置; 用于产生RF电场以在电离阶段使气体离子化的装置,所述装置在电离阶段中产生称为热区的第一区; 第一气体分布在热第一区域中,第二气体分布在比所述第一区域少热的第二区域中; 用于提取负离子流的第一装置和用于提取正离子流的第二装置,它们都连接到电离级; 并提取正离子流和提取负离子流,确保推进器电气中性。

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