公开(公告)号：US07743519B2

公开(公告)日：2010-06-29

申请号：US11868141

申请日：2007-10-05

申请人： Futoyoshi Kou ,  Akihiro Fuse

发明人： Futoyoshi Kou ,  Akihiro Fuse

IPC分类号： G01C17/38

CPC分类号： G01C17/28 ,  G01C17/38 ,  G01P15/0922 ,  G01P15/18 ,  G01P2015/084

摘要： A sensor module maintaining high detection accuracy. Correction data of a detected magnetic field is updated only in a case that a fluctuation band acquired from an output signal of an acceleration sensor is less than a threshold value and a difference between an azimuth angle acquired from an output signal of a terrestrial magnetism sensor and an inclination angle acquired from an output signal of acceleration sensor is less than the threshold value. Therefore, the correction data is updated only in a case that a magnetic field at a position of a mobile object is stably detected, and an accuracy of the correction data can be maintained.

摘要翻译： 传感器模块保持高检测精度。 检测磁场的校正数据仅在从加速度传感器的输出信号获取的波动频带小于阈值和从地磁传感器的输出信号获取的方位角和 从加速度传感器的输出信号获取的倾斜角度小于阈值。 因此，仅在稳定地检测移动体的位置的磁场的情况下才更新校正数据，能够维持校正数据的精度。

公开(公告)号：US08552720B2

公开(公告)日：2013-10-08

申请号：US12403424

申请日：2009-03-13

申请人： Futoyoshi Kou ,  Akihiro Fuse ,  Junichi Azumi

发明人： Futoyoshi Kou ,  Akihiro Fuse ,  Junichi Azumi

IPC分类号： G01R33/02

CPC分类号： G01R33/093 ,  B82Y25/00 ,  H01L43/08

摘要： A disclosed magnetic sensor includes a substrate having a plane surface and multiple sloping surfaces; multiple soft magnetic films each disposed on a different one of the sloping surfaces and magnetized according to strength of a magnetic field; and multiple detecting devices each disposed on the plane surface, including a free layer and a pinned layer and configured to produce a detection output according to magnetization of the free layer and the pinned layer. Each of the soft magnetic films is magnetically coupled with the free layer of a different one of the detecting devices. The pinned layers of the detecting devices have magnetization directions different from each other.

摘要翻译： 所公开的磁传感器包括具有平面和多个倾斜表面的基板; 多个软磁膜各自设置在不同的一个倾斜表面上，并且根据磁场的强度被磁化; 以及多个检测装置，每个检测装置均设置在平面上，包括自由层和被钉扎层，并被配置为根据自由层和钉扎层的磁化产生检测输出。 每个软磁膜与不同的检测装置的自由层磁耦合。 检测装置的固定层具有彼此不同的磁化方向。

公开(公告)号：US20090015251A1

公开(公告)日：2009-01-15

申请号：US12137902

申请日：2008-06-12

申请人： Junichi AZUMI ,  Futoyoshi Kou ,  Akihiro Fuse

发明人： Junichi AZUMI ,  Futoyoshi Kou ,  Akihiro Fuse

IPC分类号： G01R33/09 ,  G01R3/00

CPC分类号： G01R33/093 ,  B82Y25/00 ,  Y10T29/49002

摘要： A magnetic sensor is disclosed that has plural axes at the same time, able to be fabricated in a small number of steps. The magnetic sensor includes a substrate; and plural sensor bridge circuits each including a pair of magnetic field detectors and a pair of fixed resistors on the substrate, the pair of the magnetic field detectors and the pair of the fixed resistors being connected to form a bridge circuit, each of the magnetic field detectors being formed of a magneto-resistance effect element, and magnetization directions of the magnetic field detectors intersect with each other in a three-dimensional manner. The substrate has plural inclined surfaces, normal directions of the inclined surfaces intersect with each other in a three-dimensional manner, and the pair of the magnetic field detectors in each of the sensor bridge circuits is arranged on the same inclined surface.

摘要翻译： 公开了一种磁传感器，其同时具有多个轴，能够以少量的步骤制造。 磁传感器包括基板; 以及多个传感器桥接电路，每个包括一对磁场检测器和一对固定电阻器，所述一对磁场检测器和一对固定电阻器被连接以形成桥接电路，每个磁场 检测器由磁阻效应元件形成，并且磁场检测器的磁化方向以三维方式彼此相交。 基板具有多个倾斜面，倾斜面的法线方向以三维方式相交，并且每个传感器桥接电路中的一对磁场检测器配置在同一倾斜面上。

公开(公告)号：US06483304B1

公开(公告)日：2002-11-19

申请号：US09041041

申请日：1998-03-12

申请人： Futoyoshi Kou ,  Yoshiyuki Kiyosawa

发明人： Futoyoshi Kou ,  Yoshiyuki Kiyosawa

IPC分类号： G01R2908

CPC分类号： G01R29/0878 ,  G01V3/10

摘要： A magnetic field probe includes a substrate and a conductive layer provided on the substrate. The conductive layer has a coil, lead wires, and pads. The coil has at least one turn and outputs a signal indicative of a magnetic field from a device under test in a vicinity of the magnetic field probe. The lead wires extend from the coil to the pads, the signal from the coil being transmitted to the pads through the lead wires. An isolating layer of a dielectric material is provided on the lead wires to protect the lead wires between the coil and the pads in the conductive layer. A shielding layer of a conductive material is provided on the isolating layer to protect the isolating layer. The shielding layer prevents distortion of the magnetic field at the lead wires in conjunction with the isolating layer.

摘要翻译： 磁场探针包括衬底和设置在衬底上的导电层。 导电层具有线圈，引线和焊盘。 线圈具有至少一匝，并且在磁场探针附近输出表示来自被测器件的磁场的信号。 引线从线圈延伸到焊盘，来自线圈的信号通过引线传输到焊盘。 在导线上设置电介质材料的绝缘层，以保护引线在导体层中的线圈和焊盘之间。 在绝缘层上设置导电材料的屏蔽层以保护隔离层。 屏蔽层防止引线与隔离层结合的磁场变形。

公开(公告)号：US08134361B2

公开(公告)日：2012-03-13

申请号：US12137902

申请日：2008-06-12

申请人： Junichi Azumi ,  Futoyoshi Kou ,  Akihiro Fuse

发明人： Junichi Azumi ,  Futoyoshi Kou ,  Akihiro Fuse

IPC分类号： G01R33/09

CPC分类号： G01R33/093 ,  B82Y25/00 ,  Y10T29/49002

摘要： A magnetic sensor including sensor bridge circuits, each including a pair of magnetic field detectors and a pair of fixed resistors. The magnetic field detectors in each bridge circuit are located on the same inclined surface, while the fixed resistors are each located on a different inclined surface. The inclined surface configuration reduces the number of fabrication steps necessary to fabricate the magnetic sensor.

摘要翻译： 一种磁传感器，包括传感器桥接电路，每个磁传感器包括一对磁场检测器和一对固定电阻器。 每个桥接电路中的磁场检测器位于相同的倾斜表面上，而固定电阻器各自位于不同的倾斜表面上。 倾斜表面结构减少制造磁传感器所需的制造步骤数量。

公开(公告)号：US07808749B2

公开(公告)日：2010-10-05

申请号：US11713050

申请日：2007-03-02

申请人： Futoyoshi Kou

发明人： Futoyoshi Kou

IPC分类号： G11B5/127

CPC分类号： G01R33/093 ,  B82Y25/00 ,  H01L27/22 ,  H01L43/12

摘要： A magnetoresistance effect element which is used in a magnetic sensor is disclosed. The magnetoresistance effect element includes a soft layer whose magnetization easy direction is changed by a direction of an external magnetic field, and a magnetization fixing layer whose magnetization direction is fixed by having a magnetic layer and an anti-ferromagnetic layer. A magnetoresistance effect is generated by a change of electric conduction which is caused by a relative angle between the magnetization easy direction of the soft layer and the magnetization direction of the magnetization fixing layer. When the magnetic sensor includes two or more magnetoresistance effect elements for having two-axis or more vectors of the magnetization directions, the two or more magnetoresistance effect elements are adjacently disposed.

摘要翻译： 公开了一种用于磁传感器的磁阻效应元件。 磁阻效应元件包括其易磁化方向由外部磁场的方向变化的软层，以及通过具有磁性层和反铁磁性层而使其磁化方向固定的磁化固定层。 通过由软层的易磁化方向和磁化固定层的磁化方向之间的相对角度引起的电导变化产生磁阻效应。 当磁传感器包括用于具有两个或更多个磁化方向矢量的两个或更多个磁阻效应元件时，两个或更多个磁阻效应元件相邻布置。

公开(公告)号：US20070205766A1

公开(公告)日：2007-09-06

申请号：US11713050

申请日：2007-03-02

申请人： Futoyoshi Kou

发明人： Futoyoshi Kou

IPC分类号： G01R33/02

CPC分类号： G01R33/093 ,  B82Y25/00 ,  H01L27/22 ,  H01L43/12

摘要： A magnetoresistance effect element which is used in a magnetic sensor is disclosed. The magnetoresistance effect element includes a soft layer whose magnetization easy direction is changed by a direction of an external magnetic field, and a magnetization fixing layer whose magnetization direction is fixed by having a magnetic layer and an anti-ferromagnetic layer. A magnetoresistance effect is generated by a change of electric conduction which is caused by a relative angle between the magnetization easy direction of the soft layer and the magnetization direction of the magnetization fixing layer. When the magnetic sensor includes two or more magnetoresistance effect elements for having two-axis or more vectors of the magnetization directions, the two or more magnetoresistance effect elements are adjacently disposed.

摘要翻译： 公开了一种用于磁传感器的磁阻效应元件。 磁阻效应元件包括其易磁化方向由外部磁场的方向变化的软层，以及通过具有磁性层和反铁磁性层而使其磁化方向固定的磁化固定层。 通过由软层的易磁化方向和磁化固定层的磁化方向之间的相对角度引起的电导变化产生磁阻效应。 当磁传感器包括用于具有两个或更多个磁化方向矢量的两个或更多个磁阻效应元件时，两个或更多个磁阻效应元件相邻布置。

公开(公告)号：US06696834B2

公开(公告)日：2004-02-24

申请号：US10229215

申请日：2002-08-28

申请人： Futoyoshi Kou ,  Yoshiyuki Kiyosawa

发明人： Futoyoshi Kou ,  Yoshiyuki Kiyosawa

IPC分类号： G01R2908

CPC分类号： G01R29/0878 ,  G01V3/10

摘要： A magnetic field probe includes a substrate and a conductive layer provided on the substrate. The conductive layer has a coil, lead wires, and pads. The coil has at least one turn and outputs a signal indicative of a magnetic field from a device under test in a vicinity of the magnetic field probe. The lead wires extend from the coil to the pads, the signal from the coil being transmitted to the pads through the lead wires. An isolating layer of a dielectric material is provided on the lead wires to protect the lead wires between the coil and the pads in the conductive layer. A shielding layer of a conductive material is provided on the isolating layer to protect the isolating layer. The shielding layer prevents distortion of the magnetic field at the lead wires in conjunction with the isolating layer.

摘要翻译： 磁场探针包括衬底和设置在衬底上的导电层。 导电层具有线圈，引线和焊盘。 线圈具有至少一匝，并且在磁场探针附近输出表示来自被测器件的磁场的信号。 引线从线圈延伸到焊盘，来自线圈的信号通过引线传输到焊盘。 在导线上设置电介质材料的绝缘层，以保护引线在导体层中的线圈和焊盘之间。 在绝缘层上设置导电材料的屏蔽层以保护隔离层。 屏蔽层防止引线与隔离层结合的磁场变形。

公开(公告)号：US20090237074A1

公开(公告)日：2009-09-24

申请号：US12403424

申请日：2009-03-13

申请人： Futoyoshi KOU ,  Akihiro Fuse ,  Junichi Azumi

发明人： Futoyoshi KOU ,  Akihiro Fuse ,  Junichi Azumi

IPC分类号： G01R33/09

CPC分类号： G01R33/093 ,  B82Y25/00 ,  H01L43/08

摘要： A disclosed magnetic sensor includes a substrate having a plane surface and multiple sloping surfaces; multiple soft magnetic films each disposed on a different one of the sloping surfaces and magnetized according to strength of a magnetic field; and multiple detecting devices each disposed on the plane surface, including a free layer and a pinned layer and configured to produce a detection output according to magnetization of the free layer and the pinned layer. Each of the soft magnetic films is magnetically coupled with the free layer of a different one of the detecting devices. The pinned layers of the detecting devices have magnetization directions different from each other.

摘要翻译： 所公开的磁传感器包括具有平面和多个倾斜表面的基板; 多个软磁膜各自设置在不同的一个倾斜表面上，并根据磁场的强度被磁化; 以及多个检测装置，每个检测装置均设置在平面上，包括自由层和被钉扎层，并被配置为根据自由层和钉扎层的磁化产生检测输出。 每个软磁膜与不同的检测装置的自由层磁耦合。 检测装置的固定层具有彼此不同的磁化方向。

公开(公告)号：US20080250661A1

公开(公告)日：2008-10-16

申请号：US11868141

申请日：2007-10-05

申请人： Futoyoshi KOU ,  Akihiro Fuse

发明人： Futoyoshi KOU ,  Akihiro Fuse

IPC分类号： G01C17/38

CPC分类号： G01C17/28 ,  G01C17/38 ,  G01P15/0922 ,  G01P15/18 ,  G01P2015/084

摘要： A sensor module maintaining high detection accuracy. Correction data of a detected magnetic field is updated only in a case that a fluctuation band acquired from an output signal of an acceleration sensor is less than a threshold value and a difference between an azimuth angle acquired from an output signal of a terrestrial magnetism sensor and an inclination angle acquired from an output signal of acceleration sensor is less than the threshold value. Therefore, the correction data is updated only in a case that a magnetic field at a position of a mobile object is stably detected, and an accuracy of the correction data can be maintained.

摘要翻译： 传感器模块保持高检测精度。 检测磁场的校正数据仅在从加速度传感器的输出信号获取的波动频带小于阈值的情况下和从地磁传感器的输出信号获取的方位角和 从加速度传感器的输出信号获取的倾斜角度小于阈值。 因此，仅在稳定地检测移动体的位置的磁场的情况下才更新校正数据，能够维持校正数据的精度。