公开(公告)号：US07935948B2

公开(公告)日：2011-05-03

申请号：US11691468

申请日：2007-03-26

申请人： Erica R. Porras ,  Natarajan Ramanan

发明人： Erica R. Porras ,  Natarajan Ramanan

IPC分类号： G01N15/06 ,  G01N21/00 ,  G01F23/00

CPC分类号： H01L21/6715 ,  H01L21/67253

摘要： An apparatus for monitoring a position of a semiconductor process fluid interface in a dispense nozzle includes an extended optical source adapted to provide an optical beam propagating along an optical path. The optical beam is characterized by a path width measured in a first direction aligned with a dispense direction. The apparatus also includes an optical detector coupled to the optical path and adapted to detect at least a portion of the optical beam and a dispense nozzle disposed along the optical path at a location between the extended optical source and the optical detector. The apparatus further includes a nozzle positioning member coupled to the dispense nozzle and adapted to translate the dispense nozzle in the first direction.

摘要翻译： 用于监测分配喷嘴中的半导体工艺流体界面的位置的装置包括适于提供沿光路传播的光束的扩展光源。 光束的特征在于沿与分配方向对齐的第一方向测量的路径宽度。 该装置还包括耦合到光路并适于检测光束的至少一部分的光学检测器以及沿着光路布置在扩展光源和光学检测器之间的位置处的分配喷嘴。 该装置还包括联接到分配喷嘴并适于沿着第一方向平移分配喷嘴的喷嘴定位构件。

公开(公告)号：US07984891B2

公开(公告)日：2011-07-26

申请号：US11788427

申请日：2007-04-20

申请人： Mark Crockett ,  John W. Lane ,  Michael J. DeChellis ,  Chris Melcer ,  Erica R. Porras ,  Aneesh Khullar ,  Balarabe N. Mohammed

发明人： Mark Crockett ,  John W. Lane ,  Michael J. DeChellis ,  Chris Melcer ,  Erica R. Porras ,  Aneesh Khullar ,  Balarabe N. Mohammed

IPC分类号： F16K31/00

CPC分类号： F16K27/003 ,  C22C19/055 ,  C22C19/07 ,  C22C38/001 ,  C22C38/02 ,  C22C38/04 ,  C22C38/44 ,  C22C38/58 ,  F15C5/00 ,  F16K99/0001 ,  Y10T29/41 ,  Y10T29/49144 ,  Y10T29/49405 ,  Y10T29/49425 ,  Y10T29/49906

摘要： A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The fluid delivery system includes an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.

摘要翻译： 一种节省空间的集成流体输送系统，其特别适用于半导体加工设备中的气体分配。 流体输送系统包括集成的流体流动网络结构，除了含有流体流动通道的分层基底之外，还可以包括各种流体处理和监测部件。 分层基板是扩散接合的，并且根据设计和材料要求，各种流体处理和监测部件可以部分地集成或完全集成到基板中。

公开(公告)号：US20080035666A1

公开(公告)日：2008-02-14

申请号：US11691468

申请日：2007-03-26

申请人： Erica R. Porras ,  Natarajan Ramanan

发明人： Erica R. Porras ,  Natarajan Ramanan

IPC分类号： B67D5/08 ,  G01B11/14

CPC分类号： H01L21/6715 ,  H01L21/67253

摘要： An apparatus for monitoring a position of a semiconductor process fluid interface in a dispense nozzle includes an extended optical source adapted to provide an optical beam propagating along an optical path. The optical beam is characterized by a path width measured in a first direction aligned with a dispense direction. The apparatus also includes an optical detector coupled to the optical path and adapted to detect at least a portion of the optical beam and a dispense nozzle disposed along the optical path at a location between the extended optical source and the optical detector. The apparatus further includes a nozzle positioning member coupled to the dispense nozzle and adapted to translate the dispense nozzle in the first direction.

摘要翻译： 用于监测分配喷嘴中的半导体工艺流体界面的位置的装置包括适于提供沿光路传播的光束的扩展光源。 光束的特征在于沿与分配方向对齐的第一方向测量的路径宽度。 该装置还包括耦合到光路并适于检测光束的至少一部分的光学检测器以及沿着光路布置在扩展光源和光学检测器之间的位置处的分配喷嘴。 该装置还包括联接到分配喷嘴并适于沿着第一方向平移分配喷嘴的喷嘴定位构件。

公开(公告)号：US20090039057A1

公开(公告)日：2009-02-12

申请号：US12287772

申请日：2008-10-14

申请人： Mark Crockett ,  John W. Lane ,  Micahel J. DeChellis ,  Chris Melcer ,  Erica R. Porras ,  Aneesh Khullar ,  Balarabe N. Mohammed

发明人： Mark Crockett ,  John W. Lane ,  Micahel J. DeChellis ,  Chris Melcer ,  Erica R. Porras ,  Aneesh Khullar ,  Balarabe N. Mohammed

IPC分类号： C23F1/00

CPC分类号： F16K99/0001 ,  F16K27/003 ,  F16K99/0015 ,  F16K99/0028 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076

摘要： A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The invention also includes an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.

摘要翻译： 一种节省空间的集成流体输送系统，其特别适用于半导体加工设备中的气体分配。 本发明还包括集成流体流网络结构，除了包含流体流动通道的分层基板之外，还可以包括各种流体处理和监测部件。 分层基板是扩散接合的，并且根据设计和材料要求，各种流体处理和监测部件可以部分地集成或完全集成到基板中。