公开(公告)号：US07012683B2

公开(公告)日：2006-03-14

申请号：US10993473

申请日：2004-11-18

申请人： Ralph C. Wolf ,  Eva L. Benitez ,  Dongsheng (Don) Chen ,  John D. Greene ,  Jamie M. Sullivan ,  Eric N. Vella ,  Khiem D. Vo

发明人： Ralph C. Wolf ,  Eva L. Benitez ,  Dongsheng (Don) Chen ,  John D. Greene ,  Jamie M. Sullivan ,  Eric N. Vella ,  Khiem D. Vo

IPC分类号： G01N21/88

CPC分类号： G01N21/956 ,  G01N21/47 ,  G01N21/9501

摘要： Disclosed are methods and apparatus for detecting a relatively wide dynamic range of intensity values from a beam (e.g., scattered light, reflected light, or secondary electrons) originating from a sample, such as a semiconductor wafer. In other words, the inspection system provides detected output signals having wide dynamic ranges. The detected output signals may then be analyzed to determine whether defects are present on the sample. For example, the intensity values from a target die are compared to the intensity values from a corresponding portion of a reference die, where a significant intensity difference may be defined as a defect. In a specific embodiment, an inspection system for detecting defects on a sample is disclosed. The system includes a beam generator for directing an incident beam towards a sample surface and a detector positioned to detect a detected beam originating from the sample surface in response to the incident beam. The detector has a sensor for detecting the detected beam and generating a detected signal based on the detected beam and a non-linear component coupled to the sensor. The non-linear component is arranged to generate a non-linear detected signal based on the detected signal. The detector further includes a first analog-to-digital converter (ADC) coupled to the non-linear component. The first ADC is arranged to digitize the non-linear detected signal into a digitized detected signal.

摘要翻译： 公开了用于检测来自诸如半导体晶片的样品的光束（例如，散射光，反射光或二次电子）的相对宽的动态范围的方法和装置。 换句话说，检查系统提供检测到的具有宽动态范围的输出信号。 然后可以分析检测到的输出信号，以确定样品中是否存在缺陷。 例如，将来自目标管芯的强度值与来自参考管芯的相应部分的强度值进行比较，其中将显着的强度差定义为缺陷。 在具体实施例中，公开了一种用于检测样品上的缺陷的检查系统。 该系统包括用于将入射光束引向样品表面的光束发生器，以及响应入射光束检测来自样品表面的检测光束的检测器。 检测器具有用于检测检测到的光束并基于检测到的光束产生检测信号的传感器和耦合到传感器的非线性分量。 非线性分量被布置成基于检测到的信号产生非线性检测信号。 检测器还包括耦合到非线性分量的第一模数转换器（ADC）。 第一ADC被布置成将非线性检测信号数字化为数字化的检测信号。

公开(公告)号：US06833913B1

公开(公告)日：2004-12-21

申请号：US10180807

申请日：2002-06-24

申请人： Ralph C. Wolf ,  Eva L. Benitez ,  Dongsheng Don Chen ,  John D. Greene ,  Jamie M. Sullivan ,  Eric N. Vella ,  Khiem D. Vo

发明人： Ralph C. Wolf ,  Eva L. Benitez ,  Dongsheng Don Chen ,  John D. Greene ,  Jamie M. Sullivan ,  Eric N. Vella ,  Khiem D. Vo

IPC分类号： G01N2188

CPC分类号： G01N21/956 ,  G01N21/47 ,  G01N21/9501

摘要： Disclosed are methods and apparatus for detecting a relatively wide dynamic range of intensity values from a beam (e.g., scattered light, reflected light, or secondary electrons) originating from a sample, such as a semiconductor wafer. In other words, the inspection system provides detected output signals having wide dynamic ranges. The detected output signals may then be analyzed to determine whether defects are present on the sample. For example, the intensity values from a target die are compared to the intensity values from a corresponding portion of a reference die, where a significant intensity difference may be defined as a defect. In a specific embodiment, an inspection system for detecting defects on a sample is disclosed. The system includes a beam generator for directing an incident beam towards a sample surface and a detector positioned to detect a detected beam originating from the sample surface in response to the incident beam. The detector has a sensor for detecting the detected beam and generating a detected signal based on the detected beam and a non-linear component coupled to the sensor. The non-linear component is arranged to generate a non-linear detected signal based on the detected signal. The detector further includes a first analog-to-digital converter (ADC) coupled to the non-linear component. The first ADC is arranged to digitize the non-linear detected signal into a digitized detected signal.

摘要翻译： 公开了用于检测来自诸如半导体晶片的样品的光束（例如，散射光，反射光或二次电子）的相对宽的动态范围的方法和装置。 换句话说，检查系统提供检测到的具有宽动态范围的输出信号。 然后可以分析检测到的输出信号，以确定样品中是否存在缺陷。 例如，将来自目标管芯的强度值与来自参考管芯的对应部分的强度值进行比较，其中将显着的强度差定义为缺陷。 在具体实施例中，公开了一种用于检测样品上的缺陷的检查系统。 该系统包括用于将入射光束引向样品表面的光束发生器，以及响应入射光束检测来自样品表面的检测光束的检测器。 检测器具有用于检测检测到的光束并基于检测到的光束产生检测信号的传感器和耦合到传感器的非线性分量。 非线性分量被布置成基于检测到的信号产生非线性检测信号。 检测器还包括耦合到非线性分量的第一模数转换器（ADC）。 第一ADC被布置成将非线性检测信号数字化为数字化的检测信号。

公开(公告)号：US06686995B2

公开(公告)日：2004-02-03

申请号：US10163762

申请日：2002-06-04

申请人： Dieter E. Wilk ,  Anlun Tang ,  Eric N. Vella ,  Rex Runyon ,  Jamie Michael Sullivan ,  Ralph Thomas Johnson

发明人： Dieter E. Wilk ,  Anlun Tang ,  Eric N. Vella ,  Rex Runyon ,  Jamie Michael Sullivan ,  Ralph Thomas Johnson

IPC分类号： G01N2188

CPC分类号： G02B27/46 ,  G01N21/95623

摘要： Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 &OHgr; per square. The PSF provides selective filtering in two directions. In other words, the PSF provides two dimensional filtering.

摘要翻译： 公开了一种用于选择性地过滤在光学系统内被检查的样品发出的光的空间部分的机构。 在一个实施例中，可编程空间滤波器（PSF）由与UV波长范围的一部分中的光兼容的材料构成。 在具体实施方案中，PSF由诸如聚合物稳定的液晶材料的UV相容材料构成。 在另一方面，PSF还包括由UV级玻璃形成的一对板。 PSF还可以包括相对薄的第一和第二ITO层，其导致约100和约300Ω/平方之间的薄层电阻。 PSF在两个方向提供选择性滤波。 换句话说，PSF提供二维滤波。

公开(公告)号：US06686994B2

公开(公告)日：2004-02-03

申请号：US10163398

申请日：2002-06-04

申请人： Dieter Wilk ,  Anlun Tang ,  Eric N. Vella ,  Rex Runyon ,  Jamie M. Sullivan

发明人： Dieter Wilk ,  Anlun Tang ,  Eric N. Vella ,  Rex Runyon ,  Jamie M. Sullivan

IPC分类号： G01N2188

CPC分类号： G01N21/95623 ,  G02B27/46 ,  G02F2001/13775 ,  G02F2203/055

摘要： Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 &OHgr; per square.

摘要翻译： 公开了一种用于选择性地过滤在光学系统内被检查的样品发出的光的空间部分的机构。 在一个实施例中，可编程空间滤波器（PSF）由与UV波长范围的一部分中的光兼容的材料构成。 在具体实施方案中，PSF由诸如聚合物稳定的液晶材料的UV相容材料构成。 在另一方面，PSF还包括由UV级玻璃形成的一对板。 PSF还可以包括相对薄的第一和第二ITO层，其导致约100和约300Ω/平方之间的薄层电阻。