Method and apparatus for electron pattern imaging
    1.
    发明授权
    Method and apparatus for electron pattern imaging 有权
    电子图像成像的方法和装置

    公开(公告)号:US08735815B2

    公开(公告)日:2014-05-27

    申请号:US13924786

    申请日:2013-06-24

    Applicant: EDAX, Inc.

    Abstract: A system for electron pattern imaging includes: a device for converting electron patterns into visible light provided to receive an electron backscatter diffraction (EBSD) pattern from a sample and convert the EBSD pattern to a corresponding light pattern; a first optical system positioned downstream from the device for converting electron patterns into visible light for focusing the light pattern produced by the device for converting electron patterns into visible light; a camera positioned downstream from the first optical system for obtaining an image of the light pattern; an image intensifier positioned between the device for converting electron patterns into visible light and the camera for amplifying the light pattern produced by the device for converting electron patterns into visible light; and a device positioned within the system for protecting the image intensifier from harmful light.

    Abstract translation: 用于电子图案成像的系统包括:用于将电子图案转换成可见光的装置,用于从样品接收电子反向散射衍射(EBSD)图案,并将EBSD图案转换为对应的光图案; 位于装置下游的第一光学系统,用于将电子图案转换成可见光,用于聚焦由装置产生的用于将电子图案转换成可见光的光图案; 位于第一光学系统下游的相机,用于获得光图案的图像; 位于用于将电子图案转换成可见光的装置之间的图像增强器和用于放大由该装置产生的用于将电子图案转换成可见光的光图案的照相机; 以及位于系统内的用于保护图像增强器免受有害光的设备。

    Method and Apparatus for Electron Pattern Imaging
    4.
    发明申请
    Method and Apparatus for Electron Pattern Imaging 有权
    电子图像成像方法与装置

    公开(公告)号:US20130341506A1

    公开(公告)日:2013-12-26

    申请号:US13924786

    申请日:2013-06-24

    Applicant: EDAX, Inc.

    Abstract: A system for electron pattern imaging includes: a device for converting electron patterns into visible light provided to receive an electron backscatter diffraction (EBSD) pattern from a sample and convert the EBSD pattern to a corresponding light pattern; a first optical system positioned downstream from the device for converting electron patterns into visible light for focusing the light pattern produced by the device for converting electron patterns into visible light; a camera positioned downstream from the first optical system for obtaining an image of the light pattern; an image intensifier positioned between the device for converting electron patterns into visible light and the camera for amplifying the light pattern produced by the device for converting electron patterns into visible light; and a device positioned within the system for protecting the image intensifier from harmful light.

    Abstract translation: 用于电子图案成像的系统包括:用于将电子图案转换成可见光的装置,用于从样品接收电子反向散射衍射(EBSD)图案,并将EBSD图案转换为对应的光图案; 位于装置下游的第一光学系统,用于将电子图案转换成可见光,用于聚焦由装置产生的用于将电子图案转换成可见光的光图案; 位于第一光学系统下游的相机,用于获得光图案的图像; 位于用于将电子图案转换成可见光的装置之间的图像增强器和用于放大由该装置产生的用于将电子图案转换成可见光的光图案的照相机; 以及位于系统内的用于保护图像增强器免受有害光的设备。

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