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公开(公告)号：US08136399B2
公开(公告)日：2012-03-20
申请号：US12342337
申请日：2008-12-23
IPC分类号： G01P9/04
CPC分类号： G01C19/5656
摘要： An angular rate sensor includes: a substrate; and a vibrator having a beam part supported in a state of floating from the substrate and a pair of supports formed on the substrate and provided at both ends of the beam part for supporting the beam part. The vibrator includes a piezoelectric film formed in the beam part, a detecting electrode for detecting an angular rate, the detecting electrode being formed on the piezoelectric film so as to extend toward a center portion of the beam part from one end thereof, and a driving electrode for vibrating the vibrator, the driving electrode being formed on the piezoelectric film so as to extend toward the center portion of the beam part from the other end thereof and to be spaced from the detecting electrode.
摘要翻译： 角速率传感器包括：基板; 以及振动器，其具有以从基板浮起的状态支撑的梁部分和形成在基板上的一对支撑件，并且设置在梁部分的两端以支撑梁部分。 振动器包括形成在梁部分中的压电膜，用于检测角速率的检测电极，检测电极形成在压电膜上，以便从其一端朝向梁部分的中心部分延伸，并且驱动 用于振动振动器的电极，驱动电极形成在压电膜上，以便从其另一端朝向梁部分的中心部分延伸并且与检测电极间隔开。
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公开(公告)号：US20090173156A1
公开(公告)日：2009-07-09
申请号：US12342337
申请日：2008-12-23
IPC分类号： G01P3/44
CPC分类号： G01C19/5656
摘要： An angular rate sensor includes: a substrate; and a vibrator having a beam part supported in a state of floating from the substrate and a pair of supports formed on the substrate and provided at both ends of the beam part for supporting the beam part. The vibrator includes a piezoelectric film formed in the beam part, a detecting electrode for detecting an angular rate, the detecting electrode being formed on the piezoelectric film so as to extend toward a center portion of the beam part from one end thereof, and a driving electrode for vibrating the vibrator, the driving electrode being formed on the piezoelectric film so as to extend toward the center portion of the beam part from the other end thereof and to be spaced from the detecting electrode.
摘要翻译： 角速率传感器包括：基板; 以及振动器，其具有以从基板浮起的状态支撑的梁部分和形成在基板上的一对支撑件，并且设置在梁部分的两端以支撑梁部分。 振动器包括形成在梁部分中的压电膜，用于检测角速率的检测电极，检测电极形成在压电膜上，以便从其一端朝向梁部分的中心部分延伸，并且驱动 用于振动振动器的电极，驱动电极形成在压电膜上，以便从其另一端朝向梁部分的中心部分延伸并且与检测电极间隔开。
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3.发明授权公开(公告)号：US08978469B2
公开(公告)日：2015-03-17
申请号：US13436931
申请日：2012-03-31
IPC分类号： G01C19/56 , G01C19/5769 , H01L41/08 , H01L41/113
CPC分类号： G01C19/5769 , H01L41/0815 , H01L41/1132
摘要： A piezoelectric thin film structure includes a substrate, a silicon oxide film disposed on the substrate, a first aluminum oxide film disposed on the silicon oxide film, a lower electrode layer disposed on the first aluminum oxide film, a piezoelectric film layer disposed on the lower electrode layer, and an upper electrode layer disposed on the piezoelectric film layer.
摘要翻译： 一种压电薄膜结构，包括基板，设置在基板上的氧化硅膜，设置在氧化硅膜上的第一氧化铝膜，设置在第一氧化铝膜上的下电极层，设置在下层的压电膜层 电极层和设置在压电膜层上的上电极层。
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4.发明申请公开(公告)号：US20120247207A1
公开(公告)日：2012-10-04
申请号：US13436931
申请日：2012-03-31
IPC分类号： G01C19/56 , H01L41/18 , H01L41/053
CPC分类号： G01C19/5769 , H01L41/0815 , H01L41/1132
摘要： A piezoelectric thin film structure includes a substrate, a silicon oxide film disposed on the substrate, a first aluminum oxide film disposed on the silicon oxide film, a lower electrode layer disposed on the first aluminum oxide film, a piezoelectric film layer disposed on the lower electrode layer, and an upper electrode layer disposed on the piezoelectric film layer.
摘要翻译： 一种压电薄膜结构，包括基板，设置在基板上的氧化硅膜，设置在氧化硅膜上的第一氧化铝膜，设置在第一氧化铝膜上的下电极层，设置在下层的压电膜层 电极层和设置在压电膜层上的上电极层。
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公开(公告)号：US20100206073A1
公开(公告)日：2010-08-19
申请号：US12678942
申请日：2008-09-25
CPC分类号： G01C19/56 , G01C19/5656
摘要： An angular velocity detecting device includes a semiconductor substrate (2); an oscillator (3) formed on the semiconductor substrate (2); and a control circuit (4) which is formed on the semiconductor substrate (2) and controls the oscillator (3).
摘要翻译： 角速度检测装置包括半导体衬底（2）; 形成在半导体衬底（2）上的振荡器（3）; 以及形成在半导体衬底（2）上并控制振荡器（3）的控制电路（4）。
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