公开(公告)号：US07508189B2

公开(公告)日：2009-03-24

申请号：US11733896

申请日：2007-04-11

Applicant: Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Glenn Scott Claydon ,  Debbie Gahaton Jones ,  Anis Zribi

Inventor： Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Glenn Scott Claydon ,  Debbie Gahaton Jones ,  Anis Zribi

IPC: G01R31/00

CPC classification number: G01R15/207 ,  G01R15/148 ,  G01R33/0283 ,  G01R33/0286 ,  G01R35/005 ,  Y10T29/49002

Abstract: A micro-electromechanical system current and magnetic field sensor is presented. The micro-electromechanical system current and magnetic field sensor is configured to sense a magnetic field produced by a current carrying conductor. The sensor includes a structural component comprising a substrate and a compliant layer, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field. The sensor further includes a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.

Abstract translation: 提出了一种微机电系统电流和磁场传感器。 微机电系统电流和磁场传感器被配置为感测由载流导体产生的磁场。 该传感器包括结构部件，其包括基板和柔性层，耦合到结构部件的磁 - 机械转换器，以提供磁场的机械指示。 传感器还包括耦合到结构部件的应变响应部件以感测机械指示并且响应于此而提供载流导体中的电流的指示。

公开(公告)号：US20080122431A1

公开(公告)日：2008-05-29

申请号：US11733896

申请日：2007-04-11

Applicant: ERTUGRUL BERKCAN ,  SHANKAR CHANDRASEKARAN ,  CHRISTOPHER JAMES KAPUSTA ,  LAURA JEAN MEYER ,  GLENN SCOTT CLAYDON ,  DEBBIE GAHATON JONES ,  ANIS ZRIBI

Inventor： ERTUGRUL BERKCAN ,  SHANKAR CHANDRASEKARAN ,  CHRISTOPHER JAMES KAPUSTA ,  LAURA JEAN MEYER ,  GLENN SCOTT CLAYDON ,  DEBBIE GAHATON JONES ,  ANIS ZRIBI

IPC: G01R19/00 ,  G01R33/02

CPC classification number: G01R15/207 ,  G01R15/148 ,  G01R33/0283 ,  G01R33/0286 ,  G01R35/005 ,  Y10T29/49002

Abstract: A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.

Abstract translation: 基于微机电系统（MEMS）的电流和磁场传感器包括基于MEMS的磁场感测部件，包括硅衬底的结构部件和包括选自二氧化硅和氮化硅的材料的柔性层， 耦合到所述结构部件以提供所述磁场的机械指示的磁 - 机械转换器，以及耦合到所述结构部件以感测所述机械指示并且提供所述载流导体中的电流的指示的应变响应部件 回应。

公开(公告)号：US07221144B2

公开(公告)日：2007-05-22

申请号：US11289910

申请日：2005-11-30

Applicant: Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Glenn Scott Claydon ,  Debbie Gahaton Jones ,  Anis Zribi

Inventor： Ertugrul Berkcan ,  Shankar Chandrasekaran ,  Christopher James Kapusta ,  Laura Jean Meyer ,  Glenn Scott Claydon ,  Debbie Gahaton Jones ,  Anis Zribi

IPC: G01R31/00

CPC classification number: G01R15/207 ,  G01R15/148 ,  G01R33/0283 ,  G01R33/0286 ,  G01R35/005 ,  Y10T29/49002

Abstract: A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.

Abstract translation: 基于微机电系统（MEMS）的电流和磁场传感器包括基于MEMS的磁场感测部件，包括硅衬底的结构部件和包括选自二氧化硅和氮化硅的材料的柔性层， 耦合到所述结构部件以提供所述磁场的机械指示的磁 - 机械转换器，以及耦合到所述结构部件以感测所述机械指示并且提供所述载流导体中的电流的指示的应变响应部件 回应。