Hollow cathode discharging apparatus
    2.
    发明授权
    Hollow cathode discharging apparatus 有权
    中空阴极排放装置

    公开(公告)号:US07721673B2

    公开(公告)日:2010-05-25

    申请号:US11700023

    申请日:2007-01-31

    IPC分类号: C23C16/00 C23F1/00 H01L21/306

    摘要: The present invention provides a hollow cathode discharging apparatus including a hollow anode electrode, a hollow cathode electrode insulatedly fixed in the hollow anode electrode, a gas distribution pipe fixed in the hollow cathode electrode. The hollow anode electrode and the hollow cathode electrode are formed with anode openings and cathode openings respectively. Defined by the gas distribution pipe and the hollow cathode electrode and along the axis thereof is a spiral pathway winding through the cathode openings, so as to form a plurality of continuous and communicated reaction chambers. The gas distribution pipe is disposed with gas separation apertures communicated and adapted to introduce a reactive gas into the reaction chambers. The communicated reaction chambers enable uniform distribution of the reactive gas and thereby facilitate scale-up of the apparatus in axial. Accordingly, the present invention overcomes drawbacks of the prior art.

    摘要翻译: 本发明提供一种中空阴极喷射装置,其包括中空阳极电极,绝缘地固定在中空阳极电极中的中空阴极电极,固定在中空阴极电极中的气体分配管。 中空阳极电极和中空阴极电极分别形成有阳极开口和阴极开口。 由气体分配管和空心阴极电极及其轴线限定为通过阴极开口卷绕的螺旋路径,以形成多个连续且连通的反应室。 气体分配管设置有连通并适于将反应性气体引入反应室的气体分离孔。 所传送的反应室能够均匀分布反应气体,从而有助于装置在轴向上放大。 因此,本发明克服了现有技术的缺陷。

    Hollow cathode discharging apparatus
    3.
    发明申请
    Hollow cathode discharging apparatus 有权
    中空阴极排放装置

    公开(公告)号:US20080106202A1

    公开(公告)日:2008-05-08

    申请号:US11700023

    申请日:2007-01-31

    IPC分类号: H01J61/09

    摘要: The present invention provides a hollow cathode discharging apparatus including a hollow anode electrode, a hollow cathode electrode insulatedly fixed in the hollow anode electrode, a gas distribution pipe fixed in the hollow cathode electrode. The hollow anode electrode and the hollow cathode electrode are formed with anode openings and cathode openings respectively. Defined by the gas distribution pipe and the hollow cathode electrode and along the axis thereof is a spiral pathway winding through the cathode openings, so as to form a plurality of continuous and communicated reaction chambers. The gas distribution pipe is disposed with gas separation apertures communicated and adapted to introduce a reactive gas into the reaction chambers. The communicated reaction chambers enable uniform distribution of the reactive gas and thereby facilitate scale-up of the apparatus in axial. Accordingly, the present invention overcomes drawbacks of the prior art.

    摘要翻译: 本发明提供一种中空阴极喷射装置,其包括中空阳极电极,绝缘地固定在中空阳极电极中的中空阴极电极,固定在中空阴极电极中的气体分配管。 中空阳极电极和中空阴极电极分别形成有阳极开口和阴极开口。 由气体分配管和空心阴极电极及其轴线限定为通过阴极开口卷绕的螺旋路径,以形成多个连续且连通的反应室。 气体分配管设置有连通并适于将反应性气体引入反应室的气体分离孔。 所传送的反应室能够均匀分布反应气体,从而有助于装置在轴向上放大。 因此,本发明克服了现有技术的缺陷。