公开(公告)号：US20180259553A1

公开(公告)日：2018-09-13

申请号：US15917210

申请日：2018-03-09

Applicant: Anasys Instruments Corp.

Inventor： Honghua Yang ,  Craig Prater

IPC: G01Q60/18 ,  G01N21/39 ,  G01N21/65

Abstract: Systems and methods may be provided for measuring an infrared absorption of a sub micrometer region of a sample. An Infrared light source may illuminate a sample in a region that is interacting with the tip of a Scanning Probe Microscope (SPM), stimulating the sample in a way that produces measurable optical properties related to Infrared absorption of the sample region. A probe light source is directed at the region of the sample and SPM tip, and probe light emanating from the tip and sample region is collected. The collected light may be used to derive infrared absorption spectrum information of the sample region, possibly on a sub-micron scale.