公开(公告)号：US5763987A

公开(公告)日：1998-06-09

申请号：US636307

申请日：1996-04-23

Applicant: Kazutoshi Morikawa ,  Shinsuke Yura ,  Shinji Kawabuchi

Inventor： Kazutoshi Morikawa ,  Shinsuke Yura ,  Shinji Kawabuchi

IPC: H01J3/02 ,  H01J9/02 ,  H01J1/30 ,  H01J31/02

CPC classification number: H01J3/022 ,  H01J9/025

Abstract: An electron source includes a cathode electrode having an emitter of conical shape. A first insulating film surrounds the emitter. A first extracting electrode disposed on the first insulating film draws out electrons from the emitter. A second insulating film is disposed on the extracting electrode and a focusing electrode is disposed on the second insulating film for focusing the electrons. The films and electrodes are hollowed to constitute a well surrounding the emitter, and the electrodes are applied predetermined voltages respectively to control the electrons emitted from the emitter. A disturbance that the voltage applied to the focusing electrode causes to the electric field around a summit of the emitter is suppressed. The electrode source may be made by determining a thickness of a masking material so that, when forming the conical emitter, an area occupied by the films deposited on the masking material in the well is smaller than the well when all the films have been completed. The emitter of conical shape is formed in the cathode electrode by using the mask having the determined thickness. The first insulating film, the extracting electrode, the second insulating film, and the focusing electrode are then successively formed, after removing the mask and the layers deposited on the mask successively.

Abstract translation: 电子源包括具有圆锥形发射体的阴极电极。 第一绝缘膜围绕发射器。 设置在第一绝缘膜上的第一提取电极从发射极引出电子。 第二绝缘膜设置在提取电极上，并且聚焦电极设置在用于聚焦电子的第二绝缘膜上。 膜和电极被挖空以构成围绕发射极的阱，并且分别施加预定电压的电极以控制从发射极发射的电子。 施加到聚焦电极的电压导致发射极顶端附近的电场的干扰被抑制。 可以通过确定掩模材料的厚度来制造电极源，使得当形成锥形发射器时，当所有膜已经完成时，沉积在阱中的掩模材料上的膜占据的面积小于阱。 通过使用具有确定厚度的掩模，在阴极中形成锥形发射器。 然后，依次形成第一绝缘膜，提取电极，第二绝缘膜和聚焦电极，然后依次形成除去掩模和掩模之后的层。

公开(公告)号：US5763880A

公开(公告)日：1998-06-09

申请号：US610489

申请日：1996-03-04

Applicant: Hidetoshi Nisiyama ,  Masakuni Okamoto ,  Hiroyuki Shinada ,  Katsuhiro Kuroda

Inventor： Hidetoshi Nisiyama ,  Masakuni Okamoto ,  Hiroyuki Shinada ,  Katsuhiro Kuroda

IPC: H01J1/304 ,  H01J37/06 ,  H01J37/073 ,  H01J3/02

CPC classification number: H01J37/073 ,  H01J1/304 ,  H01J2201/30426 ,  H01J2201/317 ,  H01J2237/06316

Abstract: A cathode (e.g., a Schottky emission cathode) having an electron emitter of a tungsten single-crystal with a sharp point, and a heater connected to the electron emitter to heat it. The work function of the crystal face of the point of the electron emitter is reduced by providing adsorbed thereon a nitride of Zr, Ti, Y, Nb, Sc, V or La, or an oxide of Y, Sc, V or La. The nitride or oxide can be formed as a reservoir on the heater (from where it thermally diffuses to the point), or chemically adsorbed on the point. For forming the nitride or oxide on the point, the metal forming the nitride or oxide can be provided on the point and reacted with nitrogen or oxygen thereat to form the nitride or oxide; to provide the metal on the point, the metal forming the nitride or oxide can either be evaporated onto the point, or can form a reservoir on the heater and thermally diffuse therefrom to the point. The effect of reducing the work function results in a cathode having a narrow FWHM (full width at half maximum) of emission electrons and a high current density.

Abstract translation: 具有具有尖锐点的钨单晶的电子发射体的阴极（例如，肖特基发射阴极）和连接到电子发射器以加热它的加热器。 通过在其上吸附Zr，Ti，Y，Nb，Sc，V或La的氮化物或Y，Sc，V或La的氧化物，可以减少电子发射体点的晶面的功函数。 氮化物或氧化物可以形成为加热器上的储存器（从其热扩散到该点）或化学吸附在该点上。 为了在该点上形成氮化物或氧化物，形成氮化物或氧化物的金属可以在该点上提供并在其上与氮气或氧气反应以形成氮化物或氧化物; 为了在该点上提供金属，形成氮化物或氧化物的金属可以蒸发到点上，或者可以在加热器上形成储存器，并从其中散射到该点。 降低功函数的效果导致发射电子具有窄FWHM（半高全宽）和高电流密度的阴极。

公开(公告)号：US5751097A

公开(公告)日：1998-05-12

申请号：US789175

申请日：1997-01-24

Applicant: Jack Allan Mandelman ,  Micheal David Potter

Inventor： Jack Allan Mandelman ,  Micheal David Potter

IPC: H01J3/02 ,  H01J1/16 ,  B05D5/12

CPC classification number: H01J3/022 ,  H01J2201/30423

Abstract: Lateral field emission devices ("FEDs") for display elements and methods of fabrication are set forth. The FED includes a thin-film emitter oriented parallel to, and disposed above, a substrate. The FED further includes a columnar shaped anode having a first lateral surface. A phosphor layer is disposed adjacent to the first lateral surface. Specifically, the anode is oriented such that the lateral surface and adjacent phosphor layer are perpendicular to the substrate. The emitter has a tip which is spaced less than the mean free distance of an electron in air from the phosphor layer. Operationally, when a voltage potential is applied between said anode and said emitter, electrons are emitted from the tip of the emitter into the phosphor layer causing the phosphor layer to emit electromagnetic energy. Further specific details of the field emission device, fabrication method, method of operation, and associated display are set forth.

Abstract translation: 阐述了用于显示元件和制造方法的侧面场致发射器件（“FED”）。 FED包括平行于并设置在基板上方的薄膜发射极。 FED还包括具有第一侧表面的柱状阳极。 磷光体层邻近第一侧面设置。 具体地，阳极被定向成使得侧表面和相邻磷光体层垂直于衬底。 发射器具有一个尖端，该尖端的距离小于空气中的电子与荧光体层的平均自由距离。 在工作上，当在所述阳极和所述发射极之间施加电压电位时，电子从发射极的尖端发射到荧光体层中，从而使荧光层发射电磁能。 阐述了场致发射装置，制造方法，操作方法和相关显示器的进一步具体细节。

公开(公告)号：US5736810A

公开(公告)日：1998-04-07

申请号：US641252

申请日：1996-04-30

Applicant: Jack Allan Mandelman ,  Michael David Potter

Inventor： Jack Allan Mandelman ,  Michael David Potter

IPC: H01J3/02 ,  H01J1/16

CPC classification number: H01J3/022 ,  H01J2201/30423

Abstract: Lateral field emission devices ("FEDs") for display elements and methods of fabrication are set forth. The FED includes a thin-film emitter oriented parallel to, and disposed above, a substrate. The FED further includes a columnar shaped anode having a first lateral surface. A phosphor layer is disposed adjacent to the first lateral surface. Specifically, the anode is oriented such that the lateral surface and adjacent phosphor layer are perpendicular to the substrate. The emitter has a tip which is spaced less than the mean free distance of an electron in air from the phosphor layer. Operationally, when a voltage potential is applied between said anode and said emitter, electrons are emitted from the tip of the emitter into the phosphor layer causing the phosphor layer to emit electromagnetic energy. Further specific details of the field emission device, fabrication method, method of operation, and associated display are set forth.

Abstract translation: 阐述了用于显示元件和制造方法的侧面场致发射器件（“FED”）。 FED包括平行于并设置在基板上方的薄膜发射极。 FED还包括具有第一侧表面的柱状阳极。 磷光体层邻近第一侧面设置。 具体地，阳极被定向成使得侧表面和相邻磷光体层垂直于衬底。 发射器具有一个尖端，该尖端的距离小于空气中的电子与荧光体层的平均自由距离。 在工作上，当在所述阳极和所述发射极之间施加电压电位时，电子从发射极的尖端发射到荧光体层中，从而使荧光层发射电磁能。 阐述了场致发射装置，制造方法，操作方法和相关显示器的进一步具体细节。

公开(公告)号：US5729087A

公开(公告)日：1998-03-17

申请号：US697715

申请日：1996-08-28

Applicant: Ho-Ching Chien

Inventor： Ho-Ching Chien

IPC: H01J1/304 ,  H01J3/02 ,  H01J31/12 ,  H01J1/62 ,  H01J1/02 ,  H01J1/16 ,  H01J63/04

CPC classification number: H01J3/022 ,  H01J1/3042 ,  H01J31/127

Abstract: A field emission display that may be viewed through the back plate, thus providing increased luminous efficiency, and methods for making such a display, are described. A glass substrate is provided as a base for the display faceplate. There is a reflective, conductive layer over the glass substrate. A phosphor layer is formed over the reflective, conductive layer. A second glass substrate acts as a transparent base for the display baseplate, which is mounted opposite and parallel to the faceplate. A first transparent insulating layer is formed over the second glass substrate. There are parallel, transparent cathode electrodes with auxiliary metal electrodes, over the first insulating layer. Parallel, transparent gate electrodes are formed over, separate from, and orthogonally to the parallel, transparent cathode electrodes, and also have auxiliary metal electrodes. A second transparent insulating layer is between the gate electrodes and the cathode electrodes. A plurality of openings extend through the second insulating layer and the gate electrodes. At each opening is a field emission microtip connected to and extending up from a cathode electrode, whereby electrons may be selectively emitted from each microtip to form a display image on the faceplate phosphor layer, which is viewable through the baseplate.

Abstract translation: 描述可以通过背板观看场致发射显示器，从而提供增加的发光效率，以及制造这种显示器的方法。 提供玻璃基板作为显示面板的基座。 玻璃基板上有一层反射导电层。 磷光体层形成在反射导电层上。 第二玻璃基板用作显示基板的透明基座，该底板安装成与面板相对并平行。 在第二玻璃基板上形成第一透明绝缘层。 在第一绝缘层上方具有平行的具有辅助金属电极的透明阴极电极。 平行的，透明的栅电极形成在平行的透明阴极电极的上方，与之分开并且与其垂直，并且还具有辅助金属电极。 第二透明绝缘层位于栅电极和阴极之间。 多个开口延伸穿过第二绝缘层和栅电极。 在每个开口处是连接到阴极电极并从阴极电极向上延伸的场发射微尖端，由此可以从每个微尖端选择性地发射电子，以在面板荧光体层上形成可通过基板观察的显示图像。

公开(公告)号：US5717279A

公开(公告)日：1998-02-10

申请号：US607465

申请日：1996-02-27

Applicant: Hironori Imura

Inventor： Hironori Imura

IPC: H01J1/304 ,  B81B1/00 ,  H01J3/02 ,  H01J1/30 ,  H01J19/24

CPC classification number: H01J3/022 ,  H01J2201/319

Abstract: A field emission cold cathode includes a conductive substrate (1), an insulating layer (2) disposed on the substrate (1), a gate electrode (3) disposed on the insulating layer (2), cavities (4) extending through the gate electrode (3) and the insulating layer (2), and emitter cones (6) disposed on the substrate (1) within the cavities (4). The gate electrode further includes high resistance areas (5) disposed around the tips of the emitter cones (6) that enables the field emission cold cathode to operate in the event of a short circuit between the gate electrode (3) and an emitter cone (6) due to electrically conductive foreign material entering a cavity (4). The field emission cold cathode can be use in an electron gun.

Abstract translation: 场致发射冷阴极包括导电基板（1），设置在基板（1）上的绝缘层（2），设置在绝缘层（2）上的栅电极（3），延伸穿过栅极 电极（3）和绝缘层（2）以及设置在空腔（4）内的基板（1）上的发射极（6）。 栅电极还包括围绕发射极（6）的尖端设置的高电阻区域（5），其使得场致发射冷阴极能够在栅极（3）和发射极锥体（3）之间发生短路的情况下操作 6）由于导电异物进入空腔（4）。 场致发射冷阴极可用于电子枪。

公开(公告)号：US5711694A

公开(公告)日：1998-01-27

申请号：US670468

申请日：1996-06-26

Applicant: Jules D. Levine ,  Chi-Cheong Shen ,  Robert Taylor

Inventor： Jules D. Levine ,  Chi-Cheong Shen ,  Robert Taylor

IPC: H01J3/02 ,  H01J9/02 ,  H01J1/30 ,  H01J9/18

CPC classification number: H01J3/022 ,  H01J9/025

Abstract: An electron emitter plate (110) for an FED image display has an extraction (gate) electrode (22) spaced by a dielectric insulating spacer (125) from a cathode electrode including a conductive mesh (18). Arrays (12) of microtips (14) are located in mesh spacings (16), within apertures (26) formed in clusters (23) in extraction electrode (22). Microtips (14) are deposited through the apertures (26). Apertures (26) are arranged in regular, periodic arrays (23, 23', 123, 123') defining lattices having occupied apertured positions and internal unapertured vacancy positions (150, 150'). The insulating spacer (125) is etched to undercut electrode (22) to connect apertured lattice positions, forming a common cavity (141) for microtips (14) within each mesh spacing (16), and leaving central posts (143) at the unapertured vacancies (150, 150'). The etch-out reduces the dielectric constant factor of gate-to-cathode capacitance in the finished structure. Placing posts at vacancy positions enables gate support over the cavity without sacrificing high microtip density.

Abstract translation: 用于FED图像显示器的电子发射器板（110）具有从包括导电网（18）的阴极电极与电介质绝缘间隔物（125）间隔开的提取（栅极）电极（22）。 小尖头（14）的阵列（12）位于提取电极（22）中形成为簇（23）的孔（26）内的网格间隔（16）中。 微尖头（14）通过孔（26）沉积。 孔径（26）以规则的周期性阵列（23,23'，123,123'）布置，限定具有占据有孔位置和内部未孔隙位置（150,150'）的格子。 将绝缘间隔物（125）蚀刻到底切电极（22）以连接有孔的晶格位置，在每个网格间隔（16）内形成用于微尖端（14）的公共腔（141），并将中心柱（143）留在未孔 空缺（150,150'）。 蚀刻减少了成品结构中栅极至阴极电容的介电常数因子。 将岗位放置在空缺位置，可以在空腔上实现门支撑，而不会牺牲高的微螺纹密度。

公开(公告)号：US5700175A

公开(公告)日：1997-12-23

申请号：US629157

申请日：1996-04-08

Applicant: Wen Chun Wang ,  Tzung-Zu Yang

Inventor： Wen Chun Wang ,  Tzung-Zu Yang

IPC: G09G3/22 ,  H01J3/02 ,  H01J31/12 ,  H01J1/30 ,  H01J9/18

CPC classification number: H01J3/022 ,  G09G3/22 ,  H01J31/127 ,  G09G2320/029 ,  G09G2320/0626

Abstract: The field emission device includes, in addition to the main, conventional array of field emission devices and its associated driving circuits, an additional, separate, pixel-sized group of field emission devices close to, but separated from, said main array. Electrons emitted by the additional pixel are collected on a separate, non-fluorescent, anode, and additional circuitry is provided, including a feedback loop from a detector of the additional pixel's cathode current to the gate voltage supply of the main array. Consequently, the voltage of the gate lines varies in inverse proportion to the cathode current of the additional pixel. This results in a display whose brightness is constant even when turned on for the first time or after a period of idleness. A method for manufacturing the device is also available.

Abstract translation: 除了主要的现场发射器件阵列及其相关联的驱动电路之外，场致发射器件还包括靠近但与所述主阵列分离的附加的，独立的像素大小的一组场致发射器件。 由附加像素发射的电子被收集在单独的非荧光阳极上，并且提供附加的电路，包括从附加像素的阴极电流的检测器到主阵列的栅极电压源的反馈回路。 因此，栅极线的电压与附加像素的阴极电流成反比。 这导致即使在第一次或在闲置一段时间后开启时其亮度恒定的显示器。 也可以使用制造该装置的方法。

公开(公告)号：US5691600A

公开(公告)日：1997-11-25

申请号：US489017

申请日：1995-06-08

Applicant: Curtis D. Moyer ,  Jeffery A. Whalin ,  Wayne Morrow ,  Steven A. Voight

Inventor： Curtis D. Moyer ,  Jeffery A. Whalin ,  Wayne Morrow ,  Steven A. Voight

IPC: G09F9/30 ,  H01J1/304 ,  H01J3/02 ,  H01J9/02 ,  H01J29/04 ,  H01J29/46 ,  H01J31/12 ,  H01J1/66

CPC classification number: H01J9/025 ,  H01J29/467 ,  H01J3/022 ,  H01J2201/30423 ,  H01J2329/00

Abstract: A plurality of edge emitters in a FED array include a plate shaped substrate having parallel, laterally spaced apart grooves formed in a first surface and parallel, laterally spaced apart grooves formed in the opposite surface so that each second groove crosses each first groove at an angle. The combined depths of the grooves is greater than the thickness of the plate substrate so that an opening is formed through the substrate at each point where a second groove crosses a first groove. Gate metal is deposited on the surfaces in the openings and emitter material is deposited on the lands of the first surface to form FED emitters in each opening.

Abstract translation: FED阵列中的多个边缘发射器包括板形基板，该板状基板具有形成在第一表面中的平行的横向间隔开的槽，并且在相对表面中形成平行的横向间隔开的槽，使得每个第二槽以一定角度与每个第一槽交叉 。 槽的组合深度大于板基板的厚度，使得在第二槽与第一槽交叉的每个点处通过基板形成开口。 栅极金属沉积在开口的表面上，发射体材料沉积在第一表面的焊盘上，以在每个开口中形成FED发射体。

公开(公告)号：US5682078A

公开(公告)日：1997-10-28

申请号：US650368

申请日：1996-05-20

Applicant: Akira Shishido

Inventor： Akira Shishido

IPC: H01J1/304 ,  H01J3/02 ,  H01J19/24

CPC classification number: H01J3/022

Abstract: A field emission cold cathode structure has an insulation layer having two-dimensional arrays of cavities, with a gate electrode on the insulation layer and two-dimensional arrays of opening portions having a generally circular shape positioned over the cavities. Field emission cold cathodes within the cavities each has a cone-like shape with a pointed top. The tops of the field emission cold cathodes are off-center within the opening portions in horizontal directions toward a reference point positioned on the gate electrode, and the distances of the tops from centers of the opening portions are varied to increase in accordance with increase in distance of the field emission cold cathodes from the reference point. This causes deflections of electron beams emitted from the tops of the field emission cold cathodes toward a concentration point which is positioned on a line extending from the reference point in a vertical direction to a surface of the gate electrode.

Abstract translation: 场发射冷阴极结构具有具有二维空腔阵列的绝缘层，绝缘层上具有栅极电极，并且具有位于空腔上方的大致圆形形状的开口部分的二维阵列。 腔内的场致发射冷阴极均具有带顶尖的锥形形状。 场发射冷阴极的顶部在开口部分的水平方向偏离位于栅极电极上的参考点，并且顶部与开口部分的中心的距离根据增加而变化 场发射冷阴极与参考点的距离。 这导致从场致发射冷阴极的顶部发射的电子束的偏转朝着从垂直方向上的参考点延伸到栅电极的表面的线上的浓度点。