公开(公告)号：US20050264136A1

公开(公告)日：2005-12-01

申请号：US11139040

申请日：2005-05-27

申请人： Jun Tsutsumi ,  Shogo Inoue ,  Masanori Ueda

发明人： Jun Tsutsumi ,  Shogo Inoue ,  Masanori Ueda

IPC分类号： H03H9/00 ,  H03H9/08 ,  H03H9/145 ,  H03H9/25 ,  H03H9/64 ,  H03H9/72

CPC分类号： H03H9/0076 ,  H03H9/14541 ,  H03H9/6476 ,  H03H9/725

摘要： A surface acoustic wave device includes at least one interdigital transducer having electrodes of a double-layered structure in which an upper film and an underlying film are laminated. The upper film has a main component of Al and a first metal of Ti added to the main component. The underlying film has a main component of Ti.

摘要翻译： 表面声波装置包括至少一个叉指式换能器，其具有层叠有上层膜和下层膜的双层结构的电极。 上部膜具有Al的主要成分和添加到主要成分中的Ti的第一金属。 底层膜具有Ti的主要成分。

公开(公告)号：US20050174200A1

公开(公告)日：2005-08-11

申请号：US10854332

申请日：2004-05-27

申请人： Jeong Lee ,  Jang Park

发明人： Jeong Lee ,  Jang Park

IPC分类号： C23F4/00 ,  H01L21/3065 ,  H01L41/09 ,  H01L41/107 ,  H01L41/22 ,  H01L41/29 ,  H03H3/08 ,  H03H9/02 ,  H03H9/145 ,  H03H9/64

CPC分类号： H03H9/14541 ,  H03H3/08 ,  H03H9/02929 ,  H03H9/02937 ,  Y10T29/42

摘要： A fabrication method of a SAW device. A first conductive layer, an etch-stop layer made of conductive material and a second conductive layer are formed one atop another in their order on the piezoelectric ceramic substrate. A mask is provided on a first portion of the second conductive layer corresponding to a first SAW filter region. A second portion of the second conductive layer corresponding to a second SAW filter region is selectively removed by using the mask. The mask is removed and a photoresist pattern in use for forming electrodes of the first and second SAW filters is provided on the first portion of the second conductive layer corresponding to the first SAW filter region and on a first portion of the etch-stop layer corresponding to the second SAW filter region. The first and second conductive layers and the etch-stop layer are selectively removed by using the photoresist pattern, and the photoresist pattern is removed.

摘要翻译： 一种SAW器件的制造方法。 第一导电层，由导电材料制成的蚀刻停止层和第二导电层在压电陶瓷衬底上依次形成在另一个之上。 在与第一SAW滤波器区对应的第二导电层的第一部分上设置掩模。 通过使用掩模来选择性地去除与第二SAW滤波器区域对应的第二导电层的第二部分。 去除掩模，并且在与第一SAW滤波器区域相对应的第二导电层的第一部分上并且在蚀刻停止层的第一部分上对应于用于形成第一和第二SAW滤波器的电极的光致抗蚀剂图案 到第二SAW滤波器区域。 通过使用光致抗蚀剂图案选择性地去除第一和第二导电层和蚀刻停止层，并去除光刻胶图案。

公开(公告)号：US20040150292A1

公开(公告)日：2004-08-05

申请号：US10763178

申请日：2004-01-26

申请人： Murata Manufacturing Co., Ltd.

发明人： Hideo Kidoh

IPC分类号： H03H009/25

CPC分类号： H03H9/14505 ,  H03H9/02551 ,  H03H9/14541

摘要： In a surface acoustic wave filter, an input-side IDT electrode and an output-side IDT electrode are arranged on a piezoelectric substrate so as to be separated from each other in the propagation of a surface acoustic wave. The thickness of the IDT electrodes is set so that the first coefficient of the velocity-dispersion has a negative value.

摘要翻译： 在表面声波滤波器中，输入侧IDT电极和输出侧IDT电极配置在压电基板上，以便在声表面波的传播中彼此分离。 IDT电极的厚度被设定为使得速度 - 色散的第一系数具有负值。

公开(公告)号：US20030146674A1

公开(公告)日：2003-08-07

申请号：US10061550

申请日：2002-02-01

发明人： Philippe Jacot ,  Philippe Krebs ,  Christian Lambert

IPC分类号： H03H009/25

CPC分类号： H03H9/14541 ,  H03H3/08 ,  H03H9/02897

摘要： A surface acoustic wave device includes a transducer electrode formed on a substrate. In one aspect, the electrode has a plurality of layers. At least one of the layers is metal and another of the layers is a material for providing a hardening effect to the metal layer by reinforcement with Al2O3 precipitates. In another aspect, the electrode is electrically connected to a metal component that permits electrical connection of the surface acoustic wave device to an electrical device external to the surface acoustic wave device. The electrode has a metal portion of a first metallization. The component is of a second, different metallization. In other aspects, the surface acoustic wave device is made via a method to have such structural aspects.

摘要翻译： 表面声波装置包括形成在基板上的换能器电极。 在一个方面，电极具有多个层。 层中的至少一层是金属，另一个层是用于通过用Al 2 O 3沉淀物增强来向金属层提供硬化作用的材料。 另一方面，电极电连接到允许表面声波装置电连接到表面声波装置外部的电气装置的金属部件。 电极具有第一金属化的金属部分。 该组件是第二种不同的金属化。 在其他方面，通过具有这种结构方面的方法制造表面声波装置。

公开(公告)号：US06486591B2

公开(公告)日：2002-11-26

申请号：US09884996

申请日：2001-06-21

申请人： Tokihiro Nishihara

发明人： Tokihiro Nishihara

IPC分类号： H01L4108

CPC分类号： H03H9/14541 ,  H03H9/02929

摘要： A surface acoustic wave device comprising a substrate having a piezoelectric function on a surface thereof, and an electrode film having a four-layer structure comprising, from underneath, a first layer comprising Ti, a second layer comprising Al or an Al alloy, a third layer comprising an intermetallic compound, a silicide or a CuAl2, and a fourth layer comprising Al or an Al alloy on the substrate.

公开(公告)号：US06480076B2

公开(公告)日：2002-11-12

申请号：US09745820

申请日：2000-12-21

申请人： David S. Yip ,  Alvin M. Kong ,  Rahil U. Bhorania

发明人： David S. Yip ,  Alvin M. Kong ,  Rahil U. Bhorania

IPC分类号： H03H964

CPC分类号： H03H9/14505 ,  H03H3/08 ,  H03H9/02653 ,  H03H9/14541

摘要： The invention relates to a new family of surface acoustic wave single-phase unidirectional transducers (SPUDTs) by using M uniform width, uniformly spaced, single-level interdigitated electrodes lying on a uniform grid of a piezoelectric substrate where unidirectionality is achieved by selectively etching reflective structures into the substrate either in the spaces located between adjacent electrodes or under selected electrodes of the transducer. A SAW filter, resonator or delay line can also be formed by fabricating two such transducers on a single substrate, each having surface acoustic waves radiating towards the other.

公开(公告)号：US20020113526A1

公开(公告)日：2002-08-22

申请号：US09884996

申请日：2001-06-21

申请人： Fujitsu Limited

发明人： Tokihiro Nishihara

IPC分类号： H01L041/047

CPC分类号： H03H9/14541 ,  H03H9/02929

摘要： A surface acoustic wave device comprising a substrate having a piezoelectric function on a surface thereof, and an electrode film having a four-layer structure comprising, from underneath, a first layer comprising Ti, a second layer comprising Al or an Al alloy, a third layer comprising an intermetallic compound, a silicide or a CuAl2, and a fourth layer comprising Al or an Al alloy on the substrate.

摘要翻译： 一种声表面波装置，包括其表面具有压电功能的基板和具有四层结构的电极膜，所述电极膜包括从下方形成包括Ti的第一层，包含Al或Al合金的第二层，第三层 包含金属间化合物，硅化物或CuAl 2的层，以及在基板上包含Al或Al合金的第四层。

公开(公告)号：US20020079987A1

公开(公告)日：2002-06-27

申请号：US09745820

申请日：2000-12-21

发明人： David S. Yip ,  Alvin M. Kong ,  Rahil U. Bhorania

IPC分类号： H03H009/64

CPC分类号： H03H9/14505 ,  H03H3/08 ,  H03H9/02653 ,  H03H9/14541

摘要： The invention relates to a new family of surface acoustic wave single-phase unidirectional transducers (SPUDTs) by using M uniform width, uniformly spaced, single-level interdigitated electrodes lying on a uniform grid of a piezoelectric substrate where unidirectionality is achieved by selectively etching reflective structures into the substrate either in the spaces located between adjacent electrodes or under selected electrodes of the transducer. A SAW filter, resonator or delay line can also be formed by fabricating two such transducers on a single substrate, each having surface acoustic waves radiating towards the other.

摘要翻译： 本发明涉及一种新的表面声波单相单向换能器系列（SPUDT），它们通过使用均匀宽度均匀间隔的单电平指状电极，位于压电衬底的均匀栅格上，其中通过选择性地蚀刻反射 在位于相邻电极之间的空间中或在换能器的选定电极下的结构进入衬底。 也可以通过在单个基板上制造两个这样的换能器来形成SAW滤波器，谐振器或延迟线，每个具有朝向另一个辐射的表面声波。

公开(公告)号：US06369491B1

公开(公告)日：2002-04-09

申请号：US09654114

申请日：2000-08-31

申请人： Masatoshi Nakagawa ,  Makoto Tose ,  Yoshihiro Koshido ,  Michio Kadota ,  Toshimaro Yoneda ,  Takeshi Nakao

发明人： Masatoshi Nakagawa ,  Makoto Tose ,  Yoshihiro Koshido ,  Michio Kadota ,  Toshimaro Yoneda ,  Takeshi Nakao

IPC分类号： H03H915

CPC分类号： H03H9/14541 ,  H03H9/02669 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908 ,  Y10T29/49128

摘要： A surface acoustic wave device includes a piezoelectric plate and at least one interdigital electrode provided on the piezoelectric plate. The interdigital electrode includes a first metallic thin film and a second metallic thin film laminated on the first metallic thin film and containing tantalum as a principal component, and at least a portion of the tantalum of the second metallic thin film is &agr;-tantalum.

公开(公告)号：US5344745A

公开(公告)日：1994-09-06

申请号：US16716

申请日：1993-02-11

申请人： Kazuhiko Yamanouchi

发明人： Kazuhiko Yamanouchi

IPC分类号： H03H3/08 ,  H03H9/02 ,  H03H9/145 ,  G03C5/00

CPC分类号： H03H9/02818 ,  H03H3/08 ,  H03H9/14505 ,  H03H9/14541

摘要： In a surface acoustic wave transducer having closely space-apart IDT electrode segments, a metallic oxide is selectively formed only along the marginal edge of each electrode segment so that it separates adjacent electrode segments, thereby preventing short-circuiting therebetween, permitting easy fabrication of the transducer and improving the yield rate of fabrication.

摘要翻译： 在具有紧密间隔开的IDT电极段的表面声波传感器中，仅沿着每个电极段的边缘选择性地形成金属氧化物，使得其分离相邻的电极段，从而防止它们之间的短路，从而容易地制造 传感器，提高制造成品率。