Dual wafer plating fixture for a continuous plating line

    公开(公告)号:US11598018B2

    公开(公告)日:2023-03-07

    申请号:US16295995

    申请日:2019-03-07

    摘要: A wafer plating fixture for use in simultaneously electroplating a two substrates. The wafer plating fixture including: an electrically conductive carrier bus; a plurality of contact clips electrically coupled to the carrier bus and configured to hold the two substrates in place and electrically couple the two substrates to the carrier bus; and a non-conductive substrate backer to separate the two substrates coupled to the carrier bus. A method of electroplating a plurality of substrates. The method including: mounting two substrates to be plated onto a wafer plating fixture; mounting the wafer plating fixture on a continuous belt of plating system; dipping the wafer plating fixture with the two substrates held thereon into an electroplating bath; and applying a voltage to the two substrates via the wafer plating fixture.

    LOW ANGLE MEMBRANE FRAME FOR AN ELECTROPLATING CELL

    公开(公告)号:US20220298667A1

    公开(公告)日:2022-09-22

    申请号:US17639514

    申请日:2020-09-02

    IPC分类号: C25D17/00 C25D17/08 C25D17/10

    摘要: A cell to process a substrate includes at least one chamber wall, a membrane frame, and a membrane. The at least one chamber wall is arranged to form a cavity below a holder of the substrate. The membrane frame is disposed on the at least one chamber wall and across the cavity. The membrane is supported by the membrane frame and separating a first electrolyte from a second electrolyte. The membrane includes a surface extending from a center of the cavity radially outward at an angle relative to a reference plane, and wherein the angle is greater than or equal to 0° and less than or equal to 3°.