公开(公告)号：US20050218842A1

公开(公告)日：2005-10-06

申请号：US10819041

申请日：2004-04-05

Applicant: Pai-Hsueh Yang ,  Kazuhiro Hirano ,  Ping-Wei Chang ,  Tim Teng ,  Bausan Yuan

Inventor： Pai-Hsueh Yang ,  Kazuhiro Hirano ,  Ping-Wei Chang ,  Tim Teng ,  Bausan Yuan

IPC: H02P1/00 ,  H02P25/06

CPC classification number: H02P25/06

Abstract: A stage assembly (220) for moving a device (200) includes a stage (208), and actuator pair (226) and a control system (224). The actuator pair (226) includes a first actuator (228) that is coupled to the stage (208). The first actuator (228) has a first E core (236) and a first I core (240) that is spaced apart a first gap (g1) from the first E core (236). The control system (224) directs current to the first actuator (228) to move the stage (208). In one embodiment, the amount of current directed to the first actuator (228) is determined utilizing a first parameter (a) that is added to the first gap (g1). The value of the first parameter (a) is determined by experimental testing. Additionally, the amount of current directed to the first actuator (228) can be determined utilizing a second parameter (b) that is added to the first gap (g1). The value of the second parameter (b) is determined by experimental testing.

Abstract translation: 用于移动设备（200）的平台组件（220）包括平台（208）和致动器对（226）和控制系统（224）。 致动器对（226）包括联接到平台（208）的第一致动器（228）。 第一致动器（228）具有第一E型芯（236）和第一I型芯（240），其与第一E型芯（236）间隔开第一间隙（g 1> 1）。 控制系统（224）将电流引导到第一致动器（228）以移动平台（208）。 在一个实施例中，使用添加到第一间隙（g 1> 1）的第一参数（a）来确定引导到第一致动器（228）的电流量。 第一个参数（a）的值由实验测试确定。 另外，可以利用添加到第一间隙（g1> 1）的第二参数（b）来确定引导到第一致动器（228）的电流量。 第二个参数（b）的值由实验测试确定。

公开(公告)号：US06686990B2

公开(公告)日：2004-02-03

申请号：US09725912

申请日：2000-11-30

Applicant: Andrew J. Hazelton ,  Bausan Yuan

Inventor： Andrew J. Hazelton ,  Bausan Yuan

IPC: G03B2742

CPC classification number: G03F7/70358 ,  G03F7/70725

Abstract: A positioning method in which a system performs operations relative to areas on a substrate by a series of relative movements between the system and substrate scanning exposures. The method includes the steps of disposing a first area relative to a system performing an operation relative to the first area, and moving the substrate from a first position where the first operation relative to the first area has finished to a second position where a second operation relative to a second area is to start, and synchronously moving the system from a third position where the first operation relative to the first area has finished to a fourth position where the second operation relative to the second area is to start. An acceleration of the substrate during movement from the first position to the second position and an acceleration of the system during movement from the third position to the fourth position continually have absolute values greater than zero.

Abstract translation: 一种定位方法，其中系统通过系统和基板扫描曝光之间的一系列相对移动来执行相对于基板上的区域的操作。 该方法包括以下步骤：相对于执行相对于第一区域的操作的系统布置第一区域，以及将基板相对于第一区域的第一操作完成的第一位置移动到第二位置，在第二位置，第二操作 相对于第二区域开始，并且使系统从第一操作相对于第一区域的第三位置完成移动到相对于第二区域的第二操作开始的第四位置。 在从第一位置移动到第二位置期间的基板的加速度以及从第三位置到第四位置的运动期间的系统的加速度连续地具有大于零的绝对值。

公开(公告)号：US06590639B1

公开(公告)日：2003-07-08

申请号：US09663184

申请日：2000-09-15

Applicant: Bausan Yuan ,  Michael Binnard ,  Martin Lee

Inventor： Bausan Yuan ,  Michael Binnard ,  Martin Lee

IPC: G03B2762

CPC classification number: G03F7/70825 ,  G03F7/709

Abstract: An active vibration isolation system includes a pneumatic control system and an electronic control system. The pneumatic control system supports a mass sensitive to vibration and isolates the mass from high frequency external disturbances. The electronic control system isolates the mass from low frequency external disturbances. The pneumatic control system includes a compliance chamber filled with a fluid to pneumatically support the mass, apparatus for directly measuring a pressure level in the compliance chamber, and apparatus for controlling the pressure level to minimize the effects of pressure variation in the compliance chamber. The measuring apparatus includes an instrument to measure an absolute pressure level of the compliance chamber or an instrument to measure a differential pressure level between the compliance chamber and a reference chamber having a predetermined pressure level.

Abstract translation: 主动隔振系统包括气动控制系统和电子控制系统。 气动控制系统支持对振动的质量敏感，并将质量与高频外部干扰隔离。 电子控制系统将质量与低频外部干扰隔离开来。 气动控制系统包括填充有流体的顺应室，用于气动地支撑质量，用于直接测量顺应室中的压力水平的装置，以及用于控制压力水平的装置，以使顺应室中的压力变化的影响最小化。 测量装置包括用于测量柔性室的绝对压力水平的仪器或用于测量柔性室与具有预定压力水平的参考室之间的压差水平的仪器。

公开(公告)号：US06486941B1

公开(公告)日：2002-11-26

申请号：US09557122

申请日：2000-04-24

Applicant: Andrew J. Hazelton ,  Bausan Yuan

Inventor： Andrew J. Hazelton ,  Bausan Yuan

IPC: G03B2742

CPC classification number: G03F7/70716

Abstract: A stage assembly (10) for moving and positioning a device (24) includes a stage base (12), a first stage frame (40), and a second stage frame (66). The stage assembly (10) also includes a pair of X movers (82) (84), and a first stage Y mover (86) that precisely move the first stage frame (40) relative to the stage base (12). Uniquely, the first stage frame (40) is guideless along the X axis, along the Y axis and about the Z axis. With this design, movers (82) (84) (86) can precisely control the position of the first stage frame (40) along the X axis, along the Y axis and about the Z axis. Further, current to the X movers (82) (84) is varied according to the position of the second stage frame (66) relative to the first stage frame (40). These features allow for more accurate positioning of the device (24) by the stage assembly (10) and better performance of the stage assembly (10).

Abstract translation: 用于移动和定位装置（24）的平台组件（10）包括台架（12），第一平台框架（40）和第二平台框架（66）。 舞台组件（10）还包括一对X移动器（82）（84）和第一级Y移动器（86），其相对于舞台底座（12）精确地移动第一舞台框架（40）。 独特地，第一级框架（40）沿Y轴和Z轴沿着X轴是无引导的。 通过这种设计，移动器（82）（84）（86）可以沿Y轴和Z轴精确地控制第一级框架（40）沿X轴的位置。 此外，根据第二级框架（66）相对于第一级框架（40）的位置，改变到X移动器（82）（84）的电流。 这些特征允许通过平台组件（10）更准确地定位设备（24）并且更好地实现台架组件（10）的性能。

公开(公告)号：US5777403A

公开(公告)日：1998-07-07

申请号：US692904

申请日：1996-07-30

Applicant: Bausan Yuan

Inventor： Bausan Yuan

IPC: H02K41/035 ,  H02K41/02

CPC classification number: H02K41/0356

Abstract: A voice coil motor has a flux return housing with at least one magnet and a soft iron cantilevered core. A coil holder, including an electrical coil spaced from magnet, is telescoped over the core with an air gap between the sides of the coil holder and the sides of core. The coil holder has an open end and a closed end forming with the distal end of the core a pressurized air bellows, which can vertically support a payload such as a Z-axis motion stage. The coil holder is telescopically movable with respect to the core along the air gap supplied with pressurized air through longitudinal air ducts in the core and through transverse orifices extending from the ducts to the air gap. A regulator is connected to a core central bore for adjusting pressure in a bellows chamber between the coil holder closed end and the distal end of the core for supporting the payload.

Abstract translation: 音圈电机具有至少一个磁体和软铁悬臂芯的磁通返回壳体。 包括与磁体间隔开的电线圈的线圈保持器被套叠在芯上，在线圈架的侧面和芯的侧面之间具有气隙。 线圈保持器具有开口端和封闭端，其与芯的远端形成加压空气波纹管，其可以垂直地支撑诸如Z轴运动平台的有效载荷。 线圈架可沿着沿着空气间隙的空气间隙可靠地移动，空气间隙通过芯中的纵向空气管道和从管道延伸到气隙的横向孔口供应加压空气。 调节器连接到芯中心孔，用于调节线圈架封闭端和用于支撑有效载荷的芯的远端之间的波纹管室中的压力。