公开(公告)号：US09130348B2

公开(公告)日：2015-09-08

申请号：US13192852

申请日：2011-07-28

申请人： Susumu Noda ,  Takui Sakaguchi ,  Kazuya Nagase ,  Wataru Kunishi ,  Eiji Miyai ,  Yoshikatsu Miura ,  Dai Ohnishi

发明人： Susumu Noda ,  Takui Sakaguchi ,  Kazuya Nagase ,  Wataru Kunishi ,  Eiji Miyai ,  Yoshikatsu Miura ,  Dai Ohnishi

IPC分类号： H01S5/00 ,  H01S5/12 ,  H01S5/10 ,  H01S5/187

CPC分类号： H01S5/105 ,  H01S5/1231 ,  H01S5/18316 ,  H01S5/18319 ,  H01S5/187 ,  H01S5/3013 ,  H01S2301/17

摘要： A two-dimensional photonic crystal laser according to the present invention includes a two-dimensional photonic crystal layer 15 having a base body made of AlαGa1-αAs (0

摘要翻译： 根据本发明的二维光子晶体激光器包括具有由AlαGa1-αAs（0 <α<1）或（Al＆bgr; Ga1-bgr））γIn1-γP（...）形成的基体的二维光子晶体层15 0 <=＆bgr; <1,0 <γ<1），周期性地布置有修正的折射率区域（空气孔）151，以及通过外延法在二维光子晶体层15上形成的外延生长层16。 由于AlαGa1-αAs和（Al＆bgr; Ga1-bgr）γIn1-γP即使在高温下也是固体，所以在形成外延生长层16的过程中，空气孔151不会变形， 作为谐振器的三维光子晶体层15可以保持在高水平。

公开(公告)号：US20140036947A1

公开(公告)日：2014-02-06

申请号：US14003549

申请日：2012-02-29

申请人： Akiyoshi Watanabe ,  Kazuyoshi Hirose ,  Kousuke Shibata ,  Takahiro Sugiyama ,  Yoshitaka Kurosaka ,  Susumu Noda

发明人： Akiyoshi Watanabe ,  Kazuyoshi Hirose ,  Kousuke Shibata ,  Takahiro Sugiyama ,  Yoshitaka Kurosaka ,  Susumu Noda

IPC分类号： H01S5/12

CPC分类号： H01S5/12 ,  H01S5/105 ,  H01S5/22 ,  H01S2301/18

摘要： The present edge-emitting semiconductor layer element includes two-dimensional photonic crystals 4 formed in a semiconductor layer, and when one direction of a contact region of an electrode 8 is provided as a length direction (X-direction) and a direction perpendicular to both of the length direction and a thickness direction of a substrate is provided as a width direction (Y-direction), the two-dimensional photonic crystals 4 are, when viewed from a direction (Z-axis) perpendicular to the substrate, located in a region containing the electrode contact region and wider in the width direction than the contact region, and have a refractive index periodic structure in which the refractive index satisfies a Bragg's diffraction condition while periodically changing at every interval along the one direction (X-axis).

摘要翻译： 本发明的边缘发射半导体层元件包括形成在半导体层中的二维光子晶体4，并且当电极8的接触区域的一个方向被设置为长度方向（X方向）和垂直于两者的方向时 沿着长度方向和基板的厚度方向设置为宽度方向（Y方向），当从垂直于基板的方向（Z轴）观察时，二维光子晶体4位于 并且具有折射率周期性结构，其中折射率满足布拉格衍射条件，同时沿着一个方向（X轴）沿每个间隔周期性地变化。

公开(公告)号：US07978745B2

公开(公告)日：2011-07-12

申请号：US12164449

申请日：2008-06-30

申请人： Susumu Noda ,  Mitsuru Yokoyama ,  Takuji Hatano

发明人： Susumu Noda ,  Mitsuru Yokoyama ,  Takuji Hatano

IPC分类号： H01S5/18 ,  H01S5/12

CPC分类号： H01S5/105 ,  H01S5/183

摘要： Two-dimensional photonic crystal surface-emitting laser comprising a two-dimensional photonic crystal, having media different in refractive index arrayed in a two-dimensional cycle, disposed in the vicinity of an active layer that emits light by the injection of carriers, wherein the two-dimensional photonic crystal consists of square lattices having equal lattice constants in perpendicular directions, and a basic lattice consisting of a square with one medium as a vertex has an asymmetric refractive index distribution with respect to either one of the two diagonals of the basic lattice to thereby emit light in a constant polarizing direction.

摘要翻译： 二维光子晶体表面发射激光器，其包括二维光子晶体，其具有以二维周期排列的折射率不同的介质，设置在通过注入载流子而发光的有源层附近，其中， 二维光子晶体由在垂直方向上具有相等晶格常数的方形晶格组成，并且由具有一个介质作为顶点的正方形组成的基本晶格相对于基本晶格的两个对角线中的任一个具有不对称折射率分布 从而以恒定的偏振方向发光。

公开(公告)号：US20090034566A1

公开(公告)日：2009-02-05

申请号：US11919344

申请日：2005-04-28

申请人： Susumu Noda ,  Masahiro Imada ,  Dai Ohnishi

发明人： Susumu Noda ,  Masahiro Imada ,  Dai Ohnishi

IPC分类号： H01S3/16

CPC分类号： H01S5/0425 ,  B41J2/45 ,  H01S5/06243 ,  H01S5/105 ,  H01S5/18 ,  H01S2301/18

摘要： One objective of the present invention is to provide a laser device which is capable of scanning beams of a laser light of high output power at a high speed without using mechanical scanning mechanisms. A plurality of the upper electrodes 33 is linearly arranged in the photonic crystal laser provided with an active layer 21 and a two-dimensional photonic crystal layer 23 which are held between upper electrodes 33 and a lower electrode 27. A current is introduced from one upper electrode 33 or the plurality of the upper electrodes 33 disposed adjacently. Therefore, the active layer 21 generates light and the light is intensified by diffraction in the two-dimensional photonic crystal layer 23, so that a stronger laser light is emitted to the outside from around the upper electrodes 33 into which a current is introduced. When the current-injected upper electrodes are sequentially switched, a laser light scan is performed in the direction of the array of the upper electrodes. Since this switching can be made electrically, a laser light scan can be achieved at a high speed without using the mechanical scanning mechanisms.

摘要翻译： 本发明的一个目的是提供一种能够在不使用机械扫描机构的情况下高速扫描高输出功率的激光的光束的激光装置。 多个上部电极33线性排列在设置有被保持在上部电极33和下部电极27之间的有源层21和二维光子晶体层23的光子晶体激光器中。从一个上部电极引入电流 电极33或相邻设置的多个上电极33。 因此，有源层21产生光，并且通过二维光子晶体层23中的衍射增强光，使得更强的激光从引入电流的上电极33的周围向外部发射。 当依次切换电流注入的上电极时，在上电极阵列的方向上执行激光扫描。 由于可以进行该切换，因此可以在不使用机械扫描机构的情况下高速实现激光扫描。

公开(公告)号：US07390683B2

公开(公告)日：2008-06-24

申请号：US11375016

申请日：2006-03-15

申请人： Atsushi Sugitatsu ,  Hitoshi Tada ,  Susumu Noda

发明人： Atsushi Sugitatsu ,  Hitoshi Tada ,  Susumu Noda

IPC分类号： H01L21/00

CPC分类号： H01S5/0425 ,  B82Y20/00 ,  G02B6/12004 ,  G02B6/1225 ,  G02F1/025 ,  G02F2202/32 ,  H01L2933/0083 ,  H01S5/0424 ,  H01S5/105 ,  H01S5/1085 ,  H01S5/2004 ,  H01S5/3054 ,  H01S5/32

摘要： A semiconductor device has a two-dimensional slab photonic crystal structure in which a substrate supports a sheet-like slab layer including, sequentially stacked, a lower cladding layer, an active layer, and an upper cladding layer. A periodic refractive index profile structure, in surfaces of the stacked layers, introduces a linear defect region that serves as a waveguide. A p-type region and an n-type region in the slab layer define a pn junction surface at a predetermined angle with respect to the surfaces of the stacked layers in the slab layer.

摘要翻译： 半导体器件具有二维平板光子晶体结构，其中基板支撑包括顺序堆叠的下包层，有源层和上包层的片状板层。 在堆叠层的表面中的周期性折射率分布结构引入用作波导的线性缺陷区域。 板状层中的p型区域和n型区域相对于板坯层中的堆叠层的表面以预定的角度限定pn结表面。

公开(公告)号：US20070075318A1

公开(公告)日：2007-04-05

申请号：US10550596

申请日：2004-03-23

申请人： Susumu Noda ,  Mitsuru Yokoyama ,  Koujirou Sekine ,  Eiji Miyai

发明人： Susumu Noda ,  Mitsuru Yokoyama ,  Koujirou Sekine ,  Eiji Miyai

IPC分类号： H01L33/00

CPC分类号： H01S5/34313 ,  B82Y20/00 ,  G02B6/1225 ,  H01S5/105 ,  H01S5/1228 ,  H01S5/34373

摘要： A two-dimensional photonic crystal surface-emitting laser having a photonic crystal (20) in which a photonic crystal periodic structure (21) is located in or near an active layer (first medium) (12) which emits light when carriers are injected thereto. The photonic crystal periodic structure (21) comprises a second medium with a refractive index different from that of the active layer scattered in two-dimensional periodic array. The photonic crystal periodic structure is of a square lattice structure or a triangular lattice structure which has translation symmetry but does not have rotation symmetry. Alternatively, the phtonic crystal periodic structure is of a square lattice structure or a rectangular lattice structure which is classified into pl, pm, pg or cm according to the two-dimensional pattern classification method. It is the most desirable that the lattice structure is composed of triangular lattice points.

摘要翻译： 一种具有光子晶体（20）的二维光子晶体表面发射激光器，其中光子晶体周期结构（21）位于在载体被注入时发光的有源层（第一介质）（12）中或其附近 。 光子晶体周期结构（21）包括具有与二维周期性阵列中散射的有源层的折射率不同的折射率的第二介质。 光子晶体周期结构具有平方晶格结构或具有平移对称但不具有旋转对称性的三角形晶格结构。 或者，根据二维图案分类方法，所述晶体晶体周期结构为方形晶格结构或矩形晶格结构，其分为p1，pm，pg或cm。 最理想的是，晶格结构由三角形点阵组成。

公开(公告)号：US20050018734A1

公开(公告)日：2005-01-27

申请号：US10897004

申请日：2004-07-23

申请人： Atsushi Sugitatsu ,  Susumu Noda

发明人： Atsushi Sugitatsu ,  Susumu Noda

IPC分类号： G02B6/12 ,  H01S3/10 ,  H01S5/00 ,  H01S5/026 ,  H01S5/22 ,  H01S5/343 ,  H01S5/50

CPC分类号： H01S5/0265 ,  B82Y20/00 ,  H01S3/10076 ,  H01S5/101 ,  H01S5/34306 ,  H01S5/50 ,  H01S5/5045

摘要： In an optical device, a slab layer includes an active layer sandwiched between cladding layers. The slab layer has a periodic refractive index profile structure in a two-dimensional plane, as a two-dimensional slab photonic crystal structure, and a linear defect region serving as a waveguide in the periodic refractive index profile structure. Regions having different widths of the waveguides, as segments of the waveguide, are connected in series.

摘要翻译： 在光学装置中，平板层包括夹在包层之间的有源层。 板状层在二维平面中具有周期性折射率分布结构，作为二维平板光子晶体结构，以及在周期性折射率分布结构中用作波导的线性缺陷区域。 作为波导段的波导宽度不同的区域串联连接。

公开(公告)号：US06717167B2

公开(公告)日：2004-04-06

申请号：US10241424

申请日：2002-09-12

申请人： Susumu Noda

发明人： Susumu Noda

IPC分类号： G01B1100

CPC分类号： H01L21/30 ,  B82Y20/00 ,  G02B6/1225 ,  H01L21/681 ,  H01L33/0079

摘要： Two pieces of semiconductor wafers 101 and 102 to be stacked and fused together are secured to wafer holders 201 and 202 respectively, and are then integrally held at a wafer hold unit 2. Rough position alignment is first applied to these semiconductor wafers 101 and 102 while supplying infrared light thereto from an infrared light source 30 of an infrared light system 3 for detection of a resultant lattice image at a detection unit 5. Then, fine position alignment is performed while supplying laser light from an laser light source 40 of a laser light system 4 for detection of a resultant diffraction image at the detection unit 5. Thus, in the manufacture of a semiconductor device having its crystal structure with three-dimensional periodical refractive index distribution employing precision multilayer stack methods by using a wafer fusion, a method and apparatus for manufacturing the semiconductor device is realized which is capable of achieving precise position alignment between lattice layers stacked over each other with reduced complexity in position alignment thereof.

摘要翻译： 要堆叠并熔合在一起的两块半导体晶片101和102分别固定到晶片保持器201和202，然后一体地保持在晶片保持单元2上。首先将这些半导体晶片101和102的粗略位置对准施加到 从红外光系统3的红外光源30向检测单元5提供红外光，以检测所得到的格子图像。然后，在从激光的激光源40提供激光的同时进行微细位置对准 系统4用于在检测单元5处检测所得到的衍射图像。因此，在通过使用晶片熔合制造具有采用精密多层堆叠方法的具有三维周期折射率分布的晶体结构的半导体器件的制造中， 实现了半导体器件的制造装置，其能够实现晶格之间的精确位置对准 冰层彼此堆叠，降低了位置对准的复杂性。

公开(公告)号：US09048623B2

公开(公告)日：2015-06-02

申请号：US13581743

申请日：2011-03-01

申请人： Susumu Noda ,  Kyoko Kitamura ,  Yoshitaka Kurosaka ,  Kyosuke Sakai

发明人： Susumu Noda ,  Kyoko Kitamura ,  Yoshitaka Kurosaka ,  Kyosuke Sakai

IPC分类号： H01S5/18 ,  H01S5/10 ,  B82Y20/00 ,  H01S5/187 ,  H01S5/026 ,  H01S5/343

CPC分类号： H01S5/105 ,  B82Y20/00 ,  H01S5/0267 ,  H01S5/1071 ,  H01S5/187 ,  H01S5/34333 ,  H01S2301/14 ,  H01S2301/203

摘要： A photonic crystal laser capable of producing a radially-polarized halo-shaped laser beam having a smaller width than conventional beams includes: an active layer; a ring-shaped photonic crystal including a plate-shaped base body on one side of the active layer, the base body having a number of modified refractive index areas of the same shape, the modified refractive index areas having a refractive index different from the base body and periodically arranged in the circumferential direction of a ring, and each of the modified refractive index areas being asymmetrically shaped with respect to an axis extending through the center of the modified refractive index area in the radial direction of the ring; a first and second electrode facing each other across the active layer and the ring-shaped photonic crystal; and a window provided in the second electrode capable of allowing passage of a laser light generated from the ring-shaped photonic crystal.

摘要翻译： 能够产生具有比常规光束更小的宽度的径向偏振的卤素状激光束的光子晶体激光器包括：有源层; 在有源层的一侧包括板状基体的环状光子晶体，所述基体具有多个相同形状的改性折射率区域，所述改性折射率区域的折射率不同于所述基底 并且每个修改的折射率区域相对于在环的径向方向上延伸穿过修改的折射率区域的中心的轴线不对称地成形; 第一和第二电极，跨越有源层和环形光子晶体彼此面对; 以及设置在第二电极中的能够允许从环形光子晶体产生的激光通过的窗口。

公开(公告)号：US08300672B2

公开(公告)日：2012-10-30

申请号：US13061337

申请日：2009-08-18

申请人： Susumu Noda ,  Seita Iwahashi ,  Yoshitaka Kurosaka ,  Kyosuke Sakai ,  Eiji Miyai ,  Dai Ohnishi ,  Wataru Kunishi

发明人： Susumu Noda ,  Seita Iwahashi ,  Yoshitaka Kurosaka ,  Kyosuke Sakai ,  Eiji Miyai ,  Dai Ohnishi ,  Wataru Kunishi

IPC分类号： H01S5/00

CPC分类号： H01S5/18 ,  H01S5/105 ,  H01S5/187

摘要： A two-dimensional photonic crystal laser light is provided. The two-dimensional photonic crystal laser includes a two-dimensional photonic crystal made of a plate-shaped member provided with a periodic arrangement of identically-shaped modified refractive index areas having a refractive index different from that of the plate-shaped member; and an active layer provided on one side of the two-dimensional photonic crystal. The modified refractive index areas are arranged at lattice points of a lattice with a same period at least in two directions; each modified refractive index area is shaped so that a feedback strength is different with respect to directions of two primitive lattice vectors of the lattice; the two-dimensional photonic crystal has a periodic structure of a supercell, which contains a plurality of lattice points; and the sum of the feedback strengths by all modified refractive index areas in the supercell is identical in each direction of the two primitive lattice vectors.

摘要翻译： 提供二维光子晶体激光。 二维光子晶体激光器包括由板状构件制成的二维光子晶体，该二维光子晶体具有折射率不同于板状构件的相同形状的改性折射率区域的周期性布置; 以及设置在二维光子晶体的一侧上的有源层。 修饰的折射率区域至少在两个方向上布置在具有相同周期的格子的格子点处; 每个修改的折射率区域被成形为使得反馈强度相对于晶格的两个原始晶格矢量的方向是不同的; 二维光子晶体具有包含多个格点的超单元的周期性结构; 并且超级单元中的所有修改的折射率区域的反馈强度的总和在两个原始格子向量的每个方向上是相同的。