公开(公告)号：US20050210966A1

公开(公告)日：2005-09-29

申请号：US11088086

申请日：2005-03-23

Applicant: Masafumi Watanabe ,  Kazunori Ando

Inventor： Masafumi Watanabe ,  Kazunori Ando

IPC: G01Q30/20 ,  G01B5/28 ,  G01Q20/02 ,  G01Q30/08 ,  G01Q30/10 ,  G01Q30/12 ,  G01Q30/16 ,  G01Q30/18

CPC classification number: G01Q20/02 ,  G01Q30/12 ,  G01Q80/00

Abstract: A scanning probe microscope capable of radiating light on a sample without moving the sample from the scanning probe microscope and measuring the sample with controlling the condition under which the sample is placed and without changing the location of the sample is provided. The scanning probe microscope includes a cantilever having a probe on a top end thereof, sample moving means for moving the sample, detachable cantilever bending amount detecting means for detecting bending amount of the cantilever by means of a laser beam and exposure means for exposing the sample to light from upper side of the cantilever, wherein the cantilever bending amount detecting means is independently detachable when exposure of the sample is carried out.

Abstract translation: 提供能够在样品上照射样品而不从扫描探针显微镜移动样品并且通过控制放置样品的条件并且不改变样品的位置来测量样品的扫描探针显微镜。 扫描探针显微镜包括：在其顶端具有探针的悬臂，用于移动样本的样品移动装置，用于通过激光束检测悬臂的弯曲量的可拆卸的悬臂弯曲量检测装置，以及用于暴露样品的曝光装置 从悬臂的上侧照射，其中，当进行样品的曝光时，悬臂弯曲量检测装置可独立地拆卸。