Inductively coupled plasma device
    67.
    发明授权

    公开(公告)号:US10079134B2

    公开(公告)日:2018-09-18

    申请号:US15736278

    申请日:2017-05-25

    Inventor: Yu Wei Jun Liu

    Abstract: The present disclosure provides an inductively coupled plasma device, comprising a reaction chamber, a dielectric coupling plate, and a coil above the dielectric coupling plate. The dielectric coupling plate comprises at least two layers. The dielectric coupling plate comprises a plurality of regions, each region being provided with an electric field regulating structure, the electric field regulating structure being located between the at least two layers of the dielectric coupling plate. The electric field regulating structure is configured to regulate an intensity of an electric field that enters the reaction chamber through each region of the dielectric coupling plate.

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