公开(公告)号：US3007627A

公开(公告)日：1961-11-07

申请号：US80368359

申请日：1959-04-02

Applicant: NAT RES CORP

Inventor： GUNTER REICH

IPC: H01J41/16

CPC classification number: H01J41/16

公开(公告)号：US2547200A

公开(公告)日：1951-04-03

申请号：US71163646

申请日：1946-11-22

Applicant: HARTFORD NAT BANK & TRUST CO

Inventor： GERARDUS DORGELO EDUARD

IPC: H01J1/20 ,  H01J7/18 ,  H01J29/84 ,  H01J29/94 ,  H01J41/16

CPC classification number: H01J41/16 ,  H01J1/20 ,  H01J7/18 ,  H01J29/84 ,  H01J29/94

公开(公告)号：US20240136165A1

公开(公告)日：2024-04-25

申请号：US18535606

申请日：2023-12-11

Applicant: Helion Energy, Inc.

Inventor： David Kirtley ,  Anthony Pancotti ,  Christopher James Pihl

IPC: H01J41/16 ,  H01J41/20

CPC classification number: H01J41/16 ,  H01J41/20

Abstract: A vacuum pump includes a liquid getter that is sprayed into a pump chamber. The sprayed liquid getter can chemically bind with gaseous substance in the pump chamber to create ultra-low pressure in the pump chamber and an attached vacuum chamber. The liquefied getter can be circulated and recycled in the vacuum pump.

公开(公告)号：US10014145B2

公开(公告)日：2018-07-03

申请号：US15595290

申请日：2017-05-15

Applicant: TOKYO ELECTRON LIMITED

Inventor： Tomohiro Saito ,  Tadashi Mitsunaga ,  Kouji Maeda ,  Tetsuya Miyashita

IPC: H01J11/52 ,  H01J41/16 ,  H01J21/18 ,  H01J11/46 ,  H01J41/12 ,  H01J21/02 ,  H01J11/20

CPC classification number: H01J11/52 ,  H01J11/20 ,  H01J11/46 ,  H01J21/02 ,  H01J21/18 ,  H01J37/32724 ,  H01J37/32816 ,  H01J37/32834 ,  H01J41/12 ,  H01J41/16

Abstract: A vacuum exhaust method is for decreasing a pressure in a processing chamber in which a mounting table configured to mount thereon a substrate is provided by using a gas exhaust unit. The vacuum exhaust method includes mounting a non-evaporated getter (NEG) on the mounting table, and adsorbing an active gas in the processing chamber on the NEG mounted on the mounting table. In the adsorbing the active gas, the NEG is maintained at a predetermined temperature.

公开(公告)号：US3401264A

公开(公告)日：1968-09-10

申请号：US53757466

申请日：1966-03-25

Applicant: KAMAN CORP

Inventor： CARR ELISABETH H

IPC: G01V5/10 ,  H01J27/08 ,  H01J41/16 ,  H05H3/06

CPC classification number: G01V5/102 ,  H01J27/08 ,  H01J41/16 ,  H05H3/06

公开(公告)号：US3371854A

公开(公告)日：1968-03-05

申请号：US56817066

申请日：1966-07-27

Applicant: WISCONSIN ALUMNI RES FOUND

Inventor： HERB RAYMOND G

IPC: H01J41/16

CPC classification number: H01J41/16

公开(公告)号：US3371853A

公开(公告)日：1968-03-05

申请号：US55838366

申请日：1966-06-17

Applicant: WISCONSIN ALUMNI RES FOUND

Inventor： MALIAKAL JOSEPH C

IPC: H01J41/16

CPC classification number: H01J41/16

公开(公告)号：US3365119A

公开(公告)日：1968-01-23

申请号：US54504266

申请日：1966-04-25

Applicant: ITT

Inventor： SELIG KAINER

IPC: F04F9/00 ,  H01J41/12 ,  H01J41/16

CPC classification number: F04F9/00 ,  H01J41/12 ,  H01J41/16

公开(公告)号：US3339106A

公开(公告)日：1967-08-29

申请号：US45969165

申请日：1965-05-28

Applicant: CANADIAN PATENTS DEV

Inventor： REDHEAD PAUL A

IPC: H01J41/16

CPC classification number: H01J41/16

公开(公告)号：US3330472A

公开(公告)日：1967-07-11

申请号：US49205765

申请日：1965-10-01

Applicant: NAT RES CORP

Inventor： MALIAKAL JOSEPH C

IPC: H01J41/16

CPC classification number: H01J41/16