摘要:
A process for producing high-purity sulfuric acid, comprising: an absorption step of causing water to contact sulfuric acid anhydride in a gaseous state which may possibly contain sulfurous acid gas as an impurity, so as to cause the sulfuric acid anhydride to be absorbed into the water, thereby to provide sulfuric acid; a stripping step of subjecting the sulfuric acid to stripping by use of air, thereby to separate and remove the sulfurous acid gas in the sulfuric acid; and a transport step of subjecting at least a portion of the sulfuric acid to liquid transportation by means of a circulating pump; wherein the temperature of the liquid at the inlet port of the circulating pump is 0.degree.-30.degree. C. When the above process is used, it is possible to produce high-purity sulfuric acid from which metal constituents and sulfurous acid gas as impurities have highly been removed.
摘要:
An apparatus and method for reprocessing waste piranha containing contaminated H.sub.2 SO.sub.4 from, for example, a semiconductor processing operation is described. The apparatus and method include a first distillation flask which are maintained under a substantial vacuum. The first distillation flask includes a first column with a column packing means and a reflux means to retard loss of H.sub.2 SO.sub.4 in the first distillation. The second distillation flask boils off substantially pure H.sub.2 SO.sub.4 through a column which is coupled to a condenser which condenses substantially pure H.sub.2 SO.sub.4.
摘要翻译:描述了一种用于从例如半导体处理操作中再处理含有污染的H 2 SO 4的废弃食人鱼的设备和方法。 该装置和方法包括保持在基本真空下的第一蒸馏瓶。 第一蒸馏瓶包括具有柱填充装置的第一塔和用于在第一蒸馏中延迟H 2 SO 4的损失的回流装置。 第二蒸馏瓶通过与冷凝器相连的柱子将基本上纯的H 2 SO 4烧掉,冷凝器冷凝基本上纯的H 2 SO 4。