公开(公告)号：US08942463B2

公开(公告)日：2015-01-27

申请号：US14224534

申请日：2014-03-25

Applicant: ASML Netherlands B.V.

Inventor： Yu Cao ,  Luoqi Chen ,  Antoine Jean Bruguier ,  Wenjin Shao

IPC: G06K9/62 ,  G06T3/00 ,  G03F7/20 ,  G06T7/00

CPC classification number: G06T3/0056 ,  G03F7/705 ,  G03F7/70666 ,  G03F7/70675 ,  G06T7/0004

Abstract: A method for determining an image of a mask pattern in a resist coated on a substrate, the method including determining an aerial image of the mask pattern at substrate level; and convolving the aerial image with at least two orthogonal convolution kernels to determine a resist image that is representative of the mask pattern in the resist.

Abstract translation: 一种用于确定涂覆在基板上的抗蚀剂中的掩模图案的图像的方法，所述方法包括：确定掩模图案在基板层面的空间图像; 以及使用至少两个正交卷积内核卷积该空间图像以确定表示抗蚀剂中的掩模图案的抗蚀剂图像。

公开(公告)号：US20140317580A1

公开(公告)日：2014-10-23

申请号：US14282754

申请日：2014-05-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Jun YE ,  Yu Cao ,  Hanying Feng

IPC: G06F17/50

CPC classification number: G06F17/5009 ,  G03F1/144 ,  G03F1/36

Abstract: Methods are disclosed to create efficient model-based Sub-Resolution Assist Features (MB-SRAF). An SRAF guidance map is created, where each design target edge location votes for a given field point on whether a single-pixel SRAF placed on this field point would improve or degrade the aerial image over the process window. In one embodiment, the SRAF guidance map is used to determine SRAF placement rules and/or to fine-tune already-placed SRAFs. The SRAF guidance map can be used directly to place SRAFs in a mask layout. Mask layout data including SRAFs may be generated, wherein the SRAFs are placed according to the SRAF guidance map. The SRAF guidance map can comprise an image in which each pixel value indicates whether the pixel would contribute positively to edge behavior of features in the mask layout if the pixel is included as part of a sub-resolution assist feature.

Abstract translation: 公开了创建有效的基于模型的子分辨率辅助特征（MB-SRAF）的方法。 创建SRAF指南图，其中每个设计目标边缘位置对于给定的场点投票，放置在该场点上的单像素SRAF是否将改善或降级过程窗口上的空中图像。 在一个实施例中，SRAF引导图用于确定SRAF放置规则和/或微调已经放置的SRAF。 SRAF引导图可以直接用于将SRAF放置在掩码布局中。 可以生成包括SRAF的掩模布局数据，其中根据SRAF引导图放置SRAF。 SRAF引导图可以包括图像，其中每个像素值指示如果像素被包括为子分辨率辅助特征的一部分，则像素是否将对掩模布局中的特征的边缘行为贡献积极。