Piezoelectric actuator inkjet head and method of forming the same
    52.
    发明授权
    Piezoelectric actuator inkjet head and method of forming the same 失效
    压电致动器喷墨头及其形成方法

    公开(公告)号:US07682001B2

    公开(公告)日:2010-03-23

    申请号:US11581333

    申请日:2006-10-17

    Abstract: A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.

    Abstract translation: 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极,形成在下电极上的与每个压力室对应的位置处的压电层,形成在下电极上的支撑焊盘,支撑焊盘接触压电体的一端 并且离开压电层的一端延伸,以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路,以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成,并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分,并且第二部分可以比第一部分更宽。

    Piezoelectric actuator for an ink-jet printhead and method of forming the same
    53.
    发明授权
    Piezoelectric actuator for an ink-jet printhead and method of forming the same 失效
    用于喷墨打印头的压电致动器及其形成方法

    公开(公告)号:US07681989B2

    公开(公告)日:2010-03-23

    申请号:US11064826

    申请日:2005-02-25

    Abstract: In a piezoelectric actuator for an ink-jet printhead, and a method of forming the same, formed on a flow path plate having a pressurizing chamber, the piezoelectric actuator for applying a driving force for ink ejection to the pressurizing chamber, the piezoelectric actuator includes a lower electrode formed on the flow path plate, a bonding pad formed on the flow path plate to be insulated from the lower electrode, wherein a driving circuit for voltage application is bonded to an upper surface of the bonding pad, a piezoelectric layer formed on the lower electrode at a position corresponding to the pressurizing chamber, wherein an end of the piezoelectric layer extends onto the bonding pad, and an upper electrode formed on the piezoelectric layer, wherein an end of the upper electrode extends beyond the end of the piezoelectric layer and contacts the upper surface of the bonding pad.

    Abstract translation: 在具有加压室的流路板上形成的用于喷墨打印头的压电致动器及其形成方法中,压电致动器用于向加压室施加用于喷墨的驱动力,压电致动器包括 形成在所述流路板上的下电极,形成在所述流路板上以与所述下电极绝缘的接合焊盘,其中施加电压的驱动电路接合到所述接合焊盘的上表面,形成在所述接合焊盘的上表面上的压电层 所述下部电极在与所述加压室对应的位置处,其中所述压电层的端部延伸到所述接合焊盘上,以及形成在所述压电层上的上部电极,其中所述上部电极的端部延伸超出所述压电层的端部 并接触焊盘的上表面。

    Defect detection device of a print head and method of detecting defect of a print head
    54.
    发明授权
    Defect detection device of a print head and method of detecting defect of a print head 失效
    打印头的缺陷检测装置和检测打印头缺陷的方法

    公开(公告)号:US07571975B2

    公开(公告)日:2009-08-11

    申请号:US11302400

    申请日:2005-12-14

    CPC classification number: B41J2/16579 B41J2/0451 B41J2/04581 B41J2002/14354

    Abstract: A defect detection device of a printer head, and a method of detecting defects, including first to Nth actuators providing a driving force for ejecting ink to ink chambers; a vibration signal generator generating vibration signals for vibrating the first to Nth actuators; a first switch receiving the generated vibration signals and outputting the vibration signals to a Kth actuator among the first to Nth actuators; a second switch receiving vibration signals of one or more among the first to Nth actuators and outputting an Lth vibration signal that corresponds to a vibration signal of the Lth actuator adjacent to the Kth actuator among the received vibration signals; and a defect detector comparing the Lth vibration signal output from the second switch with the specific vibration signal of the Lth actuator when there is no defect in a printer head and detecting defects in the printer head.

    Abstract translation: 打印机头的缺陷检测装置以及检测缺陷的方法,包括第一至第N致动器,其提供用于将墨喷射到墨室的驱动力; 振动信号发生器,产生振动第一至第N致动器的振动信号; 接收所生成的振动信号的第一开关,并将振动信号输出到第一至第N致动器中的第K个致动器; 接收第一至第N致动器中的一个或多个的振动信号的第二开关,并输出与所接收的振动信号中与第K个致动器相邻的第L致动器的振动信号相对应的第L振动信号; 以及当打印机头中没有缺陷并且检测打印头中的缺陷时,比较从第二开关输出的Lth振动信号与第L个致动器的特定振动信号的缺陷检测器。

    PIEZOELECTRIC INKJET HEAD
    56.
    发明申请
    PIEZOELECTRIC INKJET HEAD 审中-公开
    压电喷头

    公开(公告)号:US20080309736A1

    公开(公告)日:2008-12-18

    申请号:US11923863

    申请日:2007-10-25

    CPC classification number: B41J2/14233 B41J2002/14306 B41J2002/14475

    Abstract: A piezoelectric inkjet head includes a plurality of pressure chambers in which ink to be ejected is filled. A plurality of piezoelectric actuators is respectively disposed in correspondence to the pressure chambers. A plurality of nozzles is in fluid communication with the pressure chambers, and at least two nozzles are formed in each of the pressure chambers.

    Abstract translation: 压电喷墨头包括多个压力室,其中填充有待喷射的墨。 多个压电致动器分别对应于压力室设置。 多个喷嘴与压力室流体连通,并且在每个压力室中形成至少两个喷嘴。

    Substrate bonding method
    57.
    发明申请
    Substrate bonding method 审中-公开
    基板接合法

    公开(公告)号:US20080006369A1

    公开(公告)日:2008-01-10

    申请号:US11595939

    申请日:2006-11-13

    CPC classification number: C09J5/02 H01L21/187 H01L21/76251

    Abstract: A substrate bonding method using dry etching is disclosed. The substrate bonding method according to the exemplary embodiments of the present invention may notably reduce an amount of time required for bonding the substrates, and increase a manufacturing productivity.

    Abstract translation: 公开了使用干蚀刻的基板接合方法。 根据本发明的示例性实施例的基板接合方法可以显着地减少粘合基板所需的时间量,并且提高制造生产率。

    Method of forming piezoelectric actuator of inkjet head
    58.
    发明申请
    Method of forming piezoelectric actuator of inkjet head 失效
    形成喷墨头压电致动器的方法

    公开(公告)号:US20070186397A1

    公开(公告)日:2007-08-16

    申请号:US11583798

    申请日:2006-10-20

    Abstract: A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.

    Abstract translation: 提供一种形成在振动板上的喷墨头的压电致动器的方法,以提供用于将油墨喷射到每个压力室的驱动力。 该方法包括在振动板上形成下电极,在下电极上形成压电层,位于每个压力室之上,形成覆盖下电极和压电层的保护层,暴露压电层的上表面 通过减小保护层和压电层的厚度,在压电层的上表面上形成上电极,除去保护层。 根据本发明,由于具有平坦的上表面的压电层形成均匀的图形,所以形成在其上的上电极的面积和厚度被均匀地控制。

    Piezoelectric inkjet printhead
    59.
    发明申请
    Piezoelectric inkjet printhead 失效
    压电喷墨打印头

    公开(公告)号:US20070176980A1

    公开(公告)日:2007-08-02

    申请号:US11491929

    申请日:2006-07-25

    CPC classification number: B41J2/14233 B41J2/055

    Abstract: A piezoelectric inkjet printhead includes a manifold, a chamber array including a plurality of chambers in connection with the manifold and arranged along at least one side of the manifold, a vibrating plate to cover the plurality of chambers, and a plurality of piezoelectric actuators formed on the vibrating plate to change pressures of corresponding ones of the plurality of chambers by vibrating the vibrating plate. The plurality of chambers includes a plurality of pressure chambers disposed in a center portion of the chamber array and having corresponding ink ejecting nozzles, and at least two dummy chambers, one disposed on each side of the chamber array and having corresponding dummy nozzles that do not eject ink. A plurality of trenches may be formed in the vibrating plate between each of the piezoelectric actuators.

    Abstract translation: 压电喷墨打印头包括歧管,腔室阵列,其包括与歧管连接的多个腔室,并且沿着歧管的至少一侧布置,覆盖多个腔室的振动板,以及形成在 所述振动板通过振动所述振动板来改变所述多个室中相应的室的压力。 多个室包括设置在室阵列的中心部分并具有对应的喷墨喷嘴的多个压力室,以及至少两个虚设室,一个设置在室阵列的每一侧上,并且具有不对应的虚拟喷嘴 弹出墨水。 可以在每个压电致动器之间的振动板中形成多个沟槽。

    Defect detection device of a print head and method of detecting defect of a print head

    公开(公告)号:US20060125870A1

    公开(公告)日:2006-06-15

    申请号:US11302400

    申请日:2005-12-14

    CPC classification number: B41J2/16579 B41J2/0451 B41J2/04581 B41J2002/14354

    Abstract: A defect detection device of a printer head, and a method of detecting defects, including first to Nth actuators providing a driving force for ejecting ink to ink chambers; a vibration signal generator generating vibration signals for vibrating the first to Nth actuators; a first switch receiving the generated vibration signals and outputting the vibration signals to a Kth actuator among the first to Nth actuators; a second switch receiving vibration signals of one or more among the first to Nth actuators and outputting an Lth vibration signal that corresponds to a vibration signal of the Lth actuator adjacent to the Kth actuator among the received vibration signals; and a defect detector comparing the Lth vibration signal output from the second switch with the specific vibration signal of the Lth actuator when there is no defect in a printer head and detecting defects in the printer head.

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