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公开(公告)号:US20110132087A1
公开(公告)日:2011-06-09
申请号:US12925750
申请日:2010-10-27
Applicant: Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
Inventor: Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
IPC: G01C19/56
CPC classification number: G01C19/5747
Abstract: A yaw rate sensor having a substrate, a first Coriolis element and a second Coriolis element is described, the first Coriolis element being excitable to a first vibration by first excitation means, and the second Coriolis element being excitable to a second vibration by second excitation means, and the first and second Coriolis elements being connected to one another by a spring structure, and the spring structure also including at least one rocker structure, the rocker structure being anchored on the substrate by at least one spring element.
Abstract translation: 描述了具有基板,第一科里奥利元件和第二科里奥利元件的偏航率传感器,第一科里奥利元件可由第一激励装置激发到第一振动,第二科里奥利元件可由第二激励装置激发到第二振动 并且所述第一和第二科里奥利元件通过弹簧结构彼此连接,并且所述弹簧结构还包括至少一个摇臂结构,所述摇臂结构通过至少一个弹簧元件锚固在所述基板上。
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公开(公告)号:US20110023600A1
公开(公告)日:2011-02-03
申请号:US12834953
申请日:2010-07-13
Applicant: Martin WREDE , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
Inventor: Martin WREDE , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
IPC: G01C19/56
CPC classification number: G01C19/5712 , G01C19/5747
Abstract: A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.
Abstract translation: 一种微机械摆动速率传感器,包括第一偏转速率传感器元件,该第一偏转速率传感器元件输出包含关于围绕第一旋转轴线的旋转的信息的第一传感器信号,输出第二传感器信号的第二偏转速度传感器元件, 包含关于围绕垂直于第一旋转轴线的第二旋转轴线的旋转的信息,驱动第一偏转速率传感器元件的驱动器和耦合连杆,其将第一横摆速率传感器元件和 第二偏转速率传感器元件彼此之间,使得第一偏转速率传感器元件的驱动也引起第二偏转速率传感器元件的驱动。
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