公开(公告)号：US06680779B2

公开(公告)日：2004-01-20

申请号：US09841484

申请日：2001-04-25

申请人： Masahiro Toida

发明人： Masahiro Toida

IPC分类号： G01B902

CPC分类号： A61B5/0066 ,  A61B5/0073 ,  G01N21/4795

摘要： An optical tomograph obtains a tomogram of an object by dividing a low coherence light beam into a signal light beam and a reference light beam, shifting the frequency of at least one of the signal light beam and the reference light beam so that the signal light beam and the reference light beam becomes different from each other in frequency, causing the signal light beam to impinge upon the object, causing the signal light reflected at a predetermined depth of the object to interfere with the reference light beam, and measuring the intensity of the obtained interference light. A light amplifier amplifies the reflected signal light.

摘要翻译： 光学断层摄影仪通过将低相干光束分成信号光束和参考光束来获得对象的断层图像，使信号光束和参考光束中的至少一个的频率移位，使得信号光束 并且参考光束在频率上变得彼此不同，导致信号光束撞击物体，使得在物体的预定深度处反射的信号光与参考光束干涉，并且测量 获得干涉光。 光放大器放大反射信号光。

公开(公告)号：US06671057B2

公开(公告)日：2003-12-30

申请号：US09999792

申请日：2001-10-31

申请人： Andre E. Orban

发明人： Andre E. Orban

IPC分类号： G01B902

CPC分类号： G01V7/14 ,  G01B9/02097

摘要： A gravity sensor is disclosed which includes a first mass adapted to free fall when selectively released from an initial position. The mass has optical elements adapted to change a length of an optical path in response to movement of the mass. The sensor output is coupled to a beam splitter. One output of the splitter is coupled substantially optically directly to an interferometer. Another output of the splitter is coupled to the interferometer through an optical delay line. A frequency of the interference pattern is directly related to gravity at the mass. A second such mass having similar optics, optically coupled in series to the first mass and adapted to change the path length in opposed sign, when selectively dropped to cause time coincident movement of the two masses, generates an interference pattern having frequency related to gravity difference.

公开(公告)号：US06665075B2

公开(公告)日：2003-12-16

申请号：US10007983

申请日：2001-11-13

申请人： Daniel M. Mittleman ,  Jon L. Johnson

发明人： Daniel M. Mittleman ,  Jon L. Johnson

IPC分类号： G01B902

CPC分类号： G01N21/49

摘要： A broadband imaging system is disclosed that provides greatly enhanced depth resolution through the use of phase shift interferometry. The system may comprise a transmitter, a splitter, a phase inverter, and a receiver. The transmitter transmits a signal pulse that is split into a measurement pulse and a reference pulse. The measurement pulse is applied to a sample, and a relative phase shift of approximately &pgr; radians is introduced between the measurement pulse and the reference pulse by the phase inverter. The measurement and reference pulses are then recombined to form a combined pulse that is detected by the receiver. The phase inverter may be a simple lens that introduces a Gouy phase shift by passing the measurement or reference pulse through a focal point. In this manner, a background-free measurement is provided, which provides a greatly enhanced sensitivity to small changes in the measurement waveform, regardless of origin.

公开(公告)号：US06643027B2

公开(公告)日：2003-11-04

申请号：US09929767

申请日：2001-08-14

申请人： William Gong ,  Richard Tella ,  Glenn Rankin

发明人： William Gong ,  Richard Tella ,  Glenn Rankin

IPC分类号： G01B902

CPC分类号： G01B11/0608

摘要： The split-beam optical thickness gauge (OTG) measures the height difference of two adjacent surfaces. Low-coherence light is generated by the low-coherence light source. The split-beam probe head receives the low-coherence light and splits the incoming low-coherence light into a primary beam and walk-off beam. The primary beam shines upon a first surface and is reflected back up into the split-beam probe head. The walk-off beam shines upon a second surface and is reflected back up into the split-beam probe head. Spatial separation between the primary beam and the walk-off beam ensures that each beam shines substantially on only one of the surfaces. An incorporated polarizer assures that the primary and walk-off beams interfere. The reflected light returns to the autocorrelator and is detected so that distance measurements can be determined based upon a change in the path difference between the reflected primary beam and the walk-off beam.

公开(公告)号：US06643026B2

公开(公告)日：2003-11-04

申请号：US09779634

申请日：2001-02-09

申请人： Hideo Kanda ,  Fumio Watanabe ,  Fumio Kobayashi

发明人： Hideo Kanda ,  Fumio Watanabe ,  Fumio Kobayashi

IPC分类号： G01B902

CPC分类号： G01B9/02022 ,  G01B2290/70

摘要： In an optical system for an oblique incidence interferometer, first and second prisms are used for luminous flux dividing and for luminous flux combining, respectively. Reference light and measurement light are separated from each other at a surface where collimated coherent light enters or exits from the first prism, whereas the reference light and measurement light are combined together at a surface where the measurement light enters or exits from the second prism.

摘要翻译： 在用于倾斜入射干涉仪的光学系统中，第一和第二棱镜分别用于光通量分配和光通量组合。 参考光和测量光在准直相干光从第一棱镜进入或离开的表面彼此分离，而参考光和测量光在测量光进入或离开第二棱镜的表面处组合在一起。

公开(公告)号：US06633387B1

公开(公告)日：2003-10-14

申请号：US09679064

申请日：2000-10-05

申请人： Kiyokazu Okamoto ,  Ikumatsu Fujimoto ,  Hirohisa Handa ,  Naoki Mitsutani

发明人： Kiyokazu Okamoto ,  Ikumatsu Fujimoto ,  Hirohisa Handa ,  Naoki Mitsutani

IPC分类号： G01B902

CPC分类号： G01B11/27 ,  G01B9/10

摘要： An interference optical system (18) leads parallel beam to a pair of opposed test surface (M1, M2). It then leads, from the test surfaces via different optical paths (C1, C2), interference fringe images formed by radiation of the parallel beam to the test surfaces (M1, M2), respectively. The interference optical system (18) has a pair of opposite reference surfaces (S1, S2) formed thereon and defined with a highly accuracy parallelism and distance. A measurement head (27) is provided with these reference surfaces (S1, S2), which are interposed between and oppose to the test surfaces (M1, M2), respectively. Imaging devices (19a, 20a) take interference fringe images that are created through interference between a light reflected at each of the test surfaces (M1, M2) and a light reflected at the corresponding reference surface (S1, S2) opposing thereto.

摘要翻译： 干涉光学系统（ 18 ）将平行光束引导到一对相对的测试表面（M 1 ，M 2 ）。 然后，通过不同的光路（C 1 ，C 2 ）从测试表面引出，形成干涉条纹图像 通过将平行光束分别照射到测试表面（M 1 ，M 2 ）。 干涉光学系统（ 18 ）具有一对相反的参考表面（S 1 ，S 2 ），并以高度精确的平行度和距离定义。 这些参考表面（S 1 ，S 2的测量头（ 27 ） ），它们介于测试表面之间并与其相对（M 1 ，M 2 ）。 成像设备（ 19 a ，20 a >）采取通过每个测试表面（M 1 ，M 2 之间的反射光的干涉产生的干涉条纹图像 ）和与其相对的相应参考表面（S 1 ，S 2 ）反射的光。 / PTEXT>

公开(公告)号：US06633385B2

公开(公告)日：2003-10-14

申请号：US09975836

申请日：2001-10-11

申请人： François Trépanier

发明人： François Trépanier

IPC分类号： G01B902

CPC分类号： G02B5/1857

摘要： A system and a method for recording interference fringes in a photosensitive medium. Two light beams are guided along different light paths to impinge on a photosensitive medium, where they interfere to produce the interference fringes. One of the beam is reflected along its path on a delay mirror forming a fixed angle &phgr; with respect to the plane of the photosensitive medium. Both the photosensitive medium and delay mirror are translated with respect to the light paths of the two beams, thereby recording the interference fringes all along the medium. The angle &phgr; is chosen so that the interference pattern is fixed relative to the photosensitive medium along its length.

摘要翻译： 用于在光敏介质中记录干涉条纹的系统和方法。 两个光束沿着不同的光路被引导以照射到感光介质上，在这些光敏介质上它们干涉以产生干涉条纹。 光束中的一个沿着其路径反射在延迟反射镜上，相对于感光介质的平面形成固定角度φi。 感光介质和延迟镜都相对于两个光束的光路平移，从而沿着介质记录干涉条纹。 角度phi被选择为使得干涉图案相对于沿其长度的感光介质是固定的

公开(公告)号：US06631003B1

公开(公告)日：2003-10-07

申请号：US09436766

申请日：1999-11-09

申请人： Basil W. Hakki

发明人： Basil W. Hakki

IPC分类号： G01B902

CPC分类号： G02B6/29349 ,  G02B6/024

摘要： An uncorrelated Michelson interferometer is formed with single mode optical fiber. In a first embodiment, light is transmitted into an optical 3 dB coupler, and split into a transmission down a first optical fiber and transmission down a second, significantly longer second optical fiber. In the disclosed embodiment, the second optical fiber path may be several meters, and even hundreds of meters longer than that of the first fiber optic path. The light at the ends of the respective first and second fiber optic paths is reflected back into the single mode optical fiber, and coupled in the optical coupler. In the first embodiment, since the second fiber optic is relatively long, an unknown amount of rotation of the polarization would otherwise occur. Thus, a polarization controller is used to control the polarization in the longer, second optical fiber such that a maximum signal is output from the optical coupler. The interference between the reflected and coupled light signals from the two fiber optic paths is uncorrelated if the difference in path lengths 2&Dgr;L (up and back in each fiber optic path) exceeds the optical coherence length of the signal in the single mode optical fiber. In a second embodiment, the need for the polarization controller is eliminated by using polarization maintaining fiber (PMF) in both the first and second fiber optic paths, and using an optical rotator such as a Faraday &pgr;/4 rotator between the ends of the PMF fiber and the respective reflectors. Using PMF optical fiber and Faraday rotators, the return (i.e., reflected) light signal in each of the optical fibers, is orthogonal to the respective input signals. Moreover, the return light signal experiences no polarization mode delay. Thus, the polarizations of the returned (i.e., reflected) light signals in each of the first and second fiber optic paths are matched due to the use of PMF optical fiber.

摘要翻译： 用单模光纤形成不相关的迈克尔逊干涉仪。 在第一实施例中，光被传输到光学3dB耦合器中，并且被分成第一光纤下的传输，并向下传输第二明显更长的第二光纤。 在所公开的实施例中，第二光纤路径可以是数米，甚至比第一光纤路径长几百米。 相应的第一和第二光纤路径的端部处的光被反射回到单模光纤中，并耦合在光耦合器中。 在第一实施例中，由于第二光纤相对较长，否则会出现未知量的极化旋转。 因此，使用偏振控制器来控制较长的第二光纤中的偏振，使得从光耦合器输出最大信号。 如果在单模光纤中的信号的光相干长度超过光纤相干长度，则路径长度2DeltaL（每个光纤路径中的上下反射）的差值不相关于来自两个光纤路径的反射和耦合的光信号之间的干扰。 在第二实施例中，通过在第一和第二光纤路径中使用偏振维持光纤（PMF）以及在PMF的端部之间使用诸如法拉第pi / 4旋转器之类的旋光器来消除对偏振控制器的需要 纤维和各自的反射器。 使用PMF光纤和法拉第旋转器，每个光纤中的返回（即反射）光信号与各个输入信号正交。 此外，返回光信号没有经历偏振模式延迟。 因此，由于使用PMF光纤，所以第一和第二光纤路径中的每一个中返回的（即，反射的）光信号的偏振是匹配的。

公开(公告)号：US06630290B2

公开(公告)日：2003-10-07

申请号：US09819364

申请日：2001-03-27

申请人： Colin Williams ,  Jonathan Dowling ,  Giovanni della Rossa

发明人： Colin Williams ,  Jonathan Dowling ,  Giovanni della Rossa

IPC分类号： G01B902

CPC分类号： G03F7/70408 ,  G03F7/001

摘要： A system of etching using quantum entangled particles to get shorter interference fringes. An interferometer is used to obtain an interference fringe. N entangled photons are input to the interferometer. This reduces the distance between interference fringes by n, where again n is the number of entangled photons.

摘要翻译： 使用量子纠缠粒子进行蚀刻的系统以获得更短的干涉条纹。 干涉仪用于获得干涉条纹。 N个纠缠的光子被输入到干涉仪。 这将干涉条纹之间的距离减小了n，其中n是纠缠的光子的数量。

公开(公告)号：US06628402B1

公开(公告)日：2003-09-30

申请号：US09414498

申请日：1999-10-08

申请人： Tuneo Yamaba ,  Hideo Ishimori

发明人： Tuneo Yamaba ,  Hideo Ishimori

IPC分类号： G01B902

CPC分类号： G01B11/0608 ,  G01B9/02003 ,  G01B9/02061 ,  G01B9/02083 ,  G01B2290/70

摘要： In a phase interference detecting system with use of an interferometer, a height from a reference surface on a measurement surface is detected by receiving interference components of reflection lights from the reference surface and a measurement surface, which lights are divided from a laser beam and are modulated with a frequency being different therefrom, i.e., by irradiating only one laser beam. A light detector is constructed with a line type sensor for receiving the interference components of the reflection lights, and has a plurality of pixel groups for common use of a measurement surface and a plurality of pixel groups for exclusive use of a reference surface, which are provided at both thereof. A reference surface phase detecting means calculates a reference surface phase signal with respect to the pixels at a measurement point within the pixel group for common use of measurement surface, on a basis of an average value of signals of a predetermined number of pixel groups positioned at both sides in symmetric with respect to said measurement point. A measurement point phase calculating means calculates a measurement point phase signal of said reflection lights being incident upon the pixels at said measurement point on a basis of signals of the pixels at said measurement point. A height calculating means calculates out a signal corresponding to height of said measurement point by subtracting said reference surface phase signal from said measurement point phase signal.

摘要翻译： 在使用干涉仪的相位干涉检测系统中，通过从参考表面和测量表面接收反射光的干涉分量来检测来自测量表面上的参考表面的高度，这些光被从激光束分开并且是 以与其不同的频率进行调制，即通过仅照射一个激光束。 光检测器构造有用于接收反射光的干涉分量的线型传感器，并且具有用于通常使用测量表面的多个像素组和用于专用于参考表面的多个像素组，其是 两者均设置。 基准表面相位检测装置基于位于测量表面的预定数量的像素组的信号的平均值，针对测量表面的共同使用的像素组内的测量点处的像素计算参考面相位信号 两侧相对于所述测量点对称。 测量点相位计算装置基于所述测量点处的像素的信号，计算入射到所述测量点处的像素的所述反射光的测量点相位信号。 高度计算装置通过从所述测量点相位信号中减去所述参考表面相位信号来计算出与所述测量点的高度相对应的信号。