公开(公告)号：US07190447B2

公开(公告)日：2007-03-13

申请号：US11372556

申请日：2006-03-11

Applicant: Steven W. Meeks

Inventor： Steven W. Meeks

IPC: G01N21/00

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.

Abstract translation: 提出了一种双面光学检测系统，其可以在表面的单次扫描中检测和分类薄膜盘或晶片上的颗粒，凹坑和划痕。 在一个实施例中，本发明使用一对正交取向的激光束，一个在径向上，一个在圆周方向上在晶片或薄膜盘的两个表面上。 来自径向和周向光束的散射光通过其偏振分离，或者通过使用二向色镜与两种不同的激光波长分离。

公开(公告)号：US20060256327A1

公开(公告)日：2006-11-16

申请号：US11459586

申请日：2006-07-24

Applicant: Mehdi Vaez-Iravani ,  Guoheng Zhao ,  Stanley Stokowski

Inventor： Mehdi Vaez-Iravani ,  Guoheng Zhao ,  Stanley Stokowski

IPC: G01N21/88

CPC classification number: G01N21/95623 ,  G01N21/47 ,  G01N21/94 ,  G01N2201/1045

Abstract: A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam. For inspecting surface with a pattern thereon, the light from the surface is first passed through a spatial filter before it is imaged onto the charge-coupled devices. The spatial filter includes stripes of scattering regions that shift in synchronism with relative motion between the beam and the surface to block Fourier components from the pattern. The spatial filter may be replaced by reflective strips that selectively reflects scattered radiation to the detector, where the reflective strips also shifts in synchronism with the relative motion.

Abstract translation: 使用圆柱形镜或透镜将输入的准直光束聚焦到要检查的表面上的线上，其中线基本上在聚焦束的入射平面中。 光束的图像被投影到平行于线的电荷耦合器件的阵列上，用于检测表面的异常和/或特征，其中阵列位于聚焦光束的入射平面之外。 为了在其上检查具有图案的表面，来自表面的光首先在其被成像到电荷耦合器件之前通过空间滤光器。 空间滤波器包括散射区域的条带，其与波束和表面之间的相对运动同步地移动，以阻止来自图案的傅立叶分量。 空间滤波器可以被选择性地将散射的辐射反射到检测器的反射条替代，其中反射条也与相对运动同步地移动。

公开(公告)号：US20040156042A1

公开(公告)日：2004-08-12

申请号：US10360512

申请日：2003-02-06

Inventor： Mehdi Vaez-Iravani ,  Guoheng Zhao ,  Stanley E. Stokowski

IPC: G01N021/00

CPC classification number: G01N21/95623 ,  G01N21/47 ,  G01N21/94 ,  G01N2201/1045

Abstract: A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam. For inspecting surface with a pattern thereon, the light from the surface is first passed through a spatial filter before it is imaged onto the charge-coupled devices. The spatial filter includes stripes of scattering regions that shift in synchronism with relative motion between the beam and the surface to block Fourier components from the pattern. The spatial filter may be replaced by reflective strips that selectively reflects scattered radiation to the detector, where the reflective strips also shifts in synchronism with the relative motion.

Abstract translation: 使用圆柱形镜或透镜将输入的准直光束聚焦到要检查的表面上的线上，其中线基本上在聚焦束的入射平面中。 光束的图像被投影到平行于线的电荷耦合器件的阵列上，用于检测表面的异常和/或特征，其中阵列位于聚焦光束的入射平面之外。 为了在其上检查具有图案的表面，来自表面的光首先在其被成像到电荷耦合器件之前通过空间滤光器。 空间滤波器包括散射区域的条带，其与波束和表面之间的相对运动同步地移动，以阻止来自图案的傅立叶分量。 空间滤波器可以被选择性地将散射的辐射反射到检测器的反射条替代，其中反射条也与相对运动同步地移动。

公开(公告)号：US4832487A

公开(公告)日：1989-05-23

申请号：US100190

申请日：1987-09-23

Applicant: Kenta Mikuriya ,  Masuo Hanawaka ,  Akira Ohya ,  Hideo Hirukawa ,  Shoji Uehara ,  Kenichi Yamakawa

Inventor： Kenta Mikuriya ,  Masuo Hanawaka ,  Akira Ohya ,  Hideo Hirukawa ,  Shoji Uehara ,  Kenichi Yamakawa

IPC: G01M11/00 ,  G01N21/88 ,  G01N21/93 ,  G01N21/95 ,  G11B7/0037 ,  G11B7/26 ,  G11B27/36 ,  G11B33/10

CPC classification number: G11B33/10 ,  G01M11/00 ,  G01N21/88 ,  G01N21/9506 ,  G11B27/36 ,  G11B7/00375 ,  G01N2021/8874 ,  G01N2021/8896 ,  G01N2201/1045

Abstract: A test system for optical disks, comprising a spindle motor for bearing and rotating an optical disk at a constant speed; a measuring head, comprising focus servor and tracking servo mechanisms for causing the focal point of a laser beam irradiating the optical disk to follow the guide groove of the disk, for generating an output signal proportional to the intensity of the reflected beam coming from the optical disk; a feed mechanism for moving the measuring head in a radial direction of the optical disk; a control circuit for controlling the operations of the spindle motor, the focus servo and tracking servo mechanism of the measuring head, and the feed mechanism; a measurer for performing desired measurements in response to the output signal from the measuring head; and a computer for commanding the control circuit and the measurer and for processing the measured data of the measurer, whereby all the measurements are accomplished with the guide groove of the disk being under the focus and tracking servos.

Abstract translation: 一种用于光盘的测试系统，包括用于以恒定速度轴承和旋转光盘的主轴电机; 测量头，包括聚焦伺服器和跟踪伺服机构，用于使照射光盘的激光束的焦点跟随盘的引导槽，以产生与来自光学器件的反射光束的强度成比例的输出信号 磁盘 用于沿着光盘的径向方向移动测量头的进给机构; 用于控制主轴电动机的操作的控制电路，测量头的聚焦伺服和跟踪伺服机构以及进给机构; 用于响应于来自测量头的输出信号执行所需测量的测量器; 以及用于命令控制电路和测量器并且用于处理测量器的测量数据的计算机，由此所有测量都是通过盘的引导槽处于聚焦和跟踪伺服下进行的。