公开(公告)号：US20180128615A1

公开(公告)日：2018-05-10

申请号：US15866140

申请日：2018-01-09

申请人： INVENSENSE, INC.

发明人： Joseph SEEGER ,  Ozan ANAC

IPC分类号： G01C19/5755 ,  G01C19/5733

CPC分类号： G01C19/5755 ,  G01C19/5733

摘要： A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction

公开(公告)号：US09958271B2

公开(公告)日：2018-05-01

申请号：US14495786

申请日：2014-09-24

申请人： InvenSense, Inc.

发明人： Ozan Anac ,  Joseph Seeger

IPC分类号： G01C19/5762 ,  G01C19/56 ,  G01C19/5733 ,  G01C19/5747 ,  G01P15/08 ,  B81B3/00

CPC分类号： G01C19/5762 ,  B81B3/0051 ,  B81B2201/0242 ,  B81B2203/0163 ,  G01C19/5733 ,  G01C19/5747 ,  G01P15/0802

摘要： Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.

公开(公告)号：US09891053B2

公开(公告)日：2018-02-13

申请号：US14800612

申请日：2015-07-15

申请人： InvenSense, Inc.

发明人： Joseph Seeger ,  Ozan Anac

IPC分类号： G01C19/00 ,  G01C19/5755 ,  G01C19/5733

CPC分类号： G01C19/5755 ,  G01C19/5733

摘要： A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction.

公开(公告)号：US20170138734A1

公开(公告)日：2017-05-18

申请号：US14942506

申请日：2015-11-16

申请人： FREESCALE SEMICONDUCTOR, INC.

发明人： Peng SHAO

IPC分类号： G01C19/5712 ,  B81B3/00

CPC分类号： G01C19/5712 ,  B81B3/0056 ,  B81B3/0078 ,  B81B2201/0242 ,  B81B2201/025 ,  B81B2203/04 ,  B81B2203/055 ,  B81B2207/03 ,  G01C19/5733

摘要： A MEMS device includes a mass system capable of undergoing oscillatory drive motion along a drive axis and oscillatory sense motion along a sense axis perpendicular to the drive axis. A quadrature correction unit includes a fixed electrode and a movable electrode coupled to the movable mass system, each being lengthwise oriented along the drive axis. The movable electrode is spaced apart from the fixed electrode by a gap having an initial width. At least one of the fixed and movable electrodes includes an extrusion region extending toward the other of the fixed and movable electrodes. The movable electrode undergoes oscillatory motion with the mass system such that the extrusion region is periodically spaced apart from the other of the fixed and movable electrodes by a gap exhibiting a second width that is less than the first width thereby enabling capacitance enhancement between the electrodes.

公开(公告)号：US20160363445A1

公开(公告)日：2016-12-15

申请号：US14495786

申请日：2014-09-24

申请人： InvenSense, Inc.

发明人： Ozan ANAC ,  Joseph SEEGER

IPC分类号： G01C19/5762

CPC分类号： G01C19/5762 ,  B81B3/0051 ,  B81B2201/0242 ,  B81B2203/0163 ,  G01C19/5733 ,  G01C19/5747 ,  G01P15/0802

摘要： Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized

摘要翻译： 公开了用于修改弹簧质量结构的实施例，其最小化对MEMS传感器的不期望的非线性运动的影响。 修改包括在弹簧质量构造的旋转结构之间提供刚性元件的任何或任何组合，调整旋转结构之间的弹簧系统并将电消除系统耦合到旋转结构。 在这样做时，诸如不需要的二次谐波运动的不期望的非线性运动被最小化

公开(公告)号：US09482534B2

公开(公告)日：2016-11-01

申请号：US14828303

申请日：2015-08-17

申请人： Maxim Integrated Products, Inc.

发明人： Massimiliano Forliti ,  Christian Rosandini

IPC分类号： G01C19/00 ,  G01C19/5726 ,  G01C19/5719 ,  G01C19/5776 ,  G01C19/5733

CPC分类号： G01C19/5726 ,  G01C19/5719 ,  G01C19/5733 ,  G01C19/5776

摘要： The invention relates to integrated circuits, and more particularly, to systems, devices and methods of integrating a gyro sensing circuit with a gyroscope to detect a shock or a disturbance, and accurately differentiate rotation-based sense signals from noises introduced by the shock or disturbance. The gyro sensing circuit may be implemented in a differential or non-differential demodulation scheme, and comprises at least one demodulation unit and a peak detector. The at least one demodulation unit demodulates a gyro output signal provided by the gyroscope with a reference signal. In a demodulated gyro output signal, a shock signal or a gyro disturbance signal is substantially isolated out from interested gyro sense signals that are used to sense a rate of rotation. A peak detector samples the modulated gyro output signal, determines whether the signal exceeds a threshold level VTH and outputs a shock flag indicating a corresponding determination result.

公开(公告)号：US09395183B2

公开(公告)日：2016-07-19

申请号：US14472143

申请日：2014-08-28

申请人： InvenSense, Inc.

发明人： Joseph Seeger ,  Ozan Anac

IPC分类号： G01C19/00 ,  G01C19/5733 ,  G01C19/574 ,  G01C19/5712 ,  G01C19/5755

CPC分类号： G01C19/5733 ,  G01C19/5712 ,  G01C19/574 ,  G01C19/5755

摘要： A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction.

摘要翻译： 公开了一种陀螺仪。 陀螺仪包括基板; 和引导质量体系。 引导质量系统包括检验质量和引导臂。 证明物质和引导臂设置在平行于基底的平面中。 证明物质联接到引导臂。 引导臂也通过弹簧与基板相连。 引导臂允许证明物质在平面中的第一方向的运动。 引导臂和证明质量围绕第一感测轴线旋转。 第一感测轴在平面内并且平行于第一方向。 陀螺仪包括用于在第一方向上振动证明物质的致动器。 陀螺仪还包括用于响应于围绕在平面中并与第一方向正交的第一输入轴的角速度来感测与平面相反的质量法向运动的换能器。

公开(公告)号：US20160138920A1

公开(公告)日：2016-05-19

申请号：US14940651

申请日：2015-11-13

申请人： Samsung Electro-Mechanics Co., Ltd.

发明人： Jong Woon KIM ,  Won HAN ,  Jong Hyeong SONG

IPC分类号： G01C19/00

CPC分类号： G01C19/5733 ,  B81B3/0051 ,  B81B3/0062 ,  G01P15/097 ,  G01P2015/0822 ,  G01P2015/084

摘要： There is provided an angular velocity sensor including first and second mass bodies provided within a first frame, a first flexible connector system connecting the first and second mass bodies and the first frame and that includes at least one sensor to detect displacements of the first and second mass bodies, a second flexible connector system connecting the first frame to a second frame provided separate from the first frame and that includes a driver to drive movement of the first frame relative to the second frame, so angular velocities can be measured based on the first and second mass bodies being enabled to rotate in a first axis direction and translated in a second axis direction, and based on the first frame being flexibly connected to the second frame so that a rotation displacement of the first frame is made in a third axis direction.

摘要翻译： 提供了包括设置在第一框架内的第一和第二质量体的角速度传感器，连接第一和第二质量体与第一框架的第一柔性连接器系统，并且包括至少一个传感器以检测第一和第二质量体的位移 质量体，第二柔性连接器系统，其将第一框架连接到与第一框架分开设置的第二框架，并且包括用于驱动第一框架相对于第二框架的运动的驱动器，因此角速度可以基于第一框架 并且第二质量体能够沿第一轴线方向旋转并沿第二轴线方向平移，并且基于第一框架柔性地连接到第二框架，使得第一框架的旋转位移在第三轴线方向上 。

公开(公告)号：US20160138666A1

公开(公告)日：2016-05-19

申请号：US14924135

申请日：2015-10-27

申请人： Robert Bosch GmbH

发明人： Christian HOEPPNER ,  Benjamin Schmidt ,  Mirko Hattass ,  Odd-Axel Pruetz ,  Robert Maul ,  Friedjof Heuck ,  Rolf Scheben ,  Torsten Ohms ,  Reinhard Neul

IPC分类号： F16F1/02 ,  G01C19/56

CPC分类号： G01C19/56 ,  B81B2203/0163 ,  B81B2203/019 ,  B81C1/0019 ,  G01C19/5733

摘要： A micromechanical spring for an inertial sensor, including segments of a monocrystalline base material, the segments having surfaces which are situated at a right angle to one another with respect to a plane of oscillation of the spring and normal to the plane of oscillation of the spring, the segments being manufactured in a crystal-direction-dependent etching process and each having two different orientations normal to the plane of oscillation, in which the spring includes a defined number of segments situated in a defined manner.

摘要翻译： 一种用于惯性传感器的微机械弹簧，包括单晶基材的段，所述段具有相对于弹簧的振荡平面彼此成直角的表面，并垂直于弹簧的摆动平面 ，所述片段以晶体方向依赖的蚀刻工艺制造，并且每个具有垂直于振荡平面的两个不同的取向，其中弹簧包括以限定的方式定位的限定数量的片段。

公开(公告)号：US20160101975A1

公开(公告)日：2016-04-14

申请号：US14972237

申请日：2015-12-17

申请人： Murata Manufacturing Co., Ltd.

发明人： Hidekazu Ono ,  Tsuyoshi OKAMI ,  Nobuaki TSUJI ,  Yuki UEYA

IPC分类号： B81B3/00 ,  G01C19/5712

CPC分类号： B81B3/0045 ,  B81B3/0056 ,  B81B2201/0221 ,  B81B2203/0127 ,  B81B2203/0163 ,  B81B2203/019 ,  B81B2203/0307 ,  B81B2203/04 ,  B81B2203/053 ,  G01C19/56 ,  G01C19/5712 ,  G01C19/5733

摘要： A resonance frequency adjustment module is disclosed forming a MEMS sensor for detecting an angular velocity. The resonance frequency adjustment module includes a movable electrode; a fixed electrode facing the movable electrode to form a capacitor; and an elastic body supporting the movable electrode so as to be displaceable in one direction. The movable electrode and the fixed electrode have surfaces facing each other to form a capacitor, and the surface can be inclined to a displacement direction. A region sandwiched between the movable electrode and the fixed electrode has a volume fixed region where the volume is not decreased by movement of the movable electrode.

摘要翻译： 公开了一种形成用于检测角速度的MEMS传感器的共振频率调节模块。 共振频率调节模块包括可动电极; 面向可动电极的固定电极以形成电容器; 以及弹性体，其支撑所述可动电极，以便能够在一个方向上移位。 可动电极和固定电极具有彼此面对以形成电容器的表面，并且该表面可以沿位移方向倾斜。 夹在可动电极和固定电极之间的区域具有通过可移动电极的移动而不减小体积的体积固定区域。