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公开(公告)号:US20190123086A1
公开(公告)日:2019-04-25
申请号:US16228170
申请日:2018-12-20
Applicant: VIAVI Solutions Inc.
Inventor: Georg J. OCKENFUSS
IPC: H01L27/146 , G02B5/20 , H01L31/0216 , G02B5/28 , G02B5/26 , G01J3/36 , G01J3/28 , G01J3/26
Abstract: A device may include a filter array disposed on a substrate. The filter array may include a first mirror disposed on the substrate. The filter array may include a plurality of spacers disposed on the first mirror. A first spacer, of the plurality of spacers, may be associated with a first thickness. A second spacer, of the plurality of spacers, may be associated with a second thickness that is different from the first thickness. A first channel corresponding to the first spacer and a second channel corresponding to the second spacer may be associated with a separation width of less than approximately 10 micrometers (μm). The filter array may include a second mirror disposed on the plurality of spacers.
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公开(公告)号:US20180335554A1
公开(公告)日:2018-11-22
申请号:US15601773
申请日:2017-05-22
Applicant: Viavi Solutions Inc,
Inventor: Georg J. OCKENFUSS
Abstract: An optical filter may include a first group of layers. The first group of layers may include alternating layers of a first dielectric material, of a group of dielectric materials, and a second dielectric material of the group of dielectric materials. The optical filter may include a second group of layers. The second group of layers may include alternating layers of a third dielectric material, of the group of dielectric materials, and a fourth dielectric material of the group of dielectric materials. The optical filter may include a third group of layers. The third group of layers may include alternating layers of a fifth dielectric material, of the group of dielectric materials, a sixth dielectric material, of the group of dielectric materials, and a metal material. The third group of layers may be disposed between the first group of layers and the second group of layers.
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公开(公告)号:US20180282855A1
公开(公告)日:2018-10-04
申请号:US15997079
申请日:2018-06-04
Applicant: VIAVI Solutions Inc.
Inventor: Georg J. OCKENFUSS
Abstract: Reactive sputter deposition method and system are disclosed, in which a catalyst gas, such as water vapor, is used to increase the overall deposition rate substantially without compromising formation of a dielectric compound layer and its optical transmission. Addition to the sputtering or reactive gas of the catalyst gas can result in an increase of a deposition rate of the dielectric oxide film substantially without increasing an optical absorption of the film.
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公开(公告)号:US20180247965A1
公开(公告)日:2018-08-30
申请号:US15964395
申请日:2018-04-27
Applicant: VIAVI Solutions Inc.
Inventor: Georg J. OCKENFUSS
IPC: H01L27/146 , H01L27/148 , G01J3/26 , G02B5/28 , G01J3/28 , G01J3/36
CPC classification number: H01L27/14621 , G01J3/26 , G01J3/2803 , G01J3/36 , G01J2003/2806 , G01J2003/2826 , G02B5/285 , H01L27/14625 , H01L27/14629 , H01L27/14645 , H01L27/14649 , H01L27/14685 , H01L27/14868 , H01L27/14875
Abstract: An optical sensor device may include a set of optical sensors. The optical sensor device may include a substrate. The optical sensor device may include a multispectral filter array disposed on the substrate. The multispectral filter array may include a first dielectric mirror disposed on the substrate. The multispectral filter array may include a spacer disposed on the first dielectric mirror. The spacer may include a set of layers. The multispectral filter array may include a second dielectric mirror disposed on the spacer. The second dielectric mirror may be aligned with two or more sensor elements of a set of sensor elements.
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公开(公告)号:US20170186794A1
公开(公告)日:2017-06-29
申请号:US15388543
申请日:2016-12-22
Applicant: Viavi Solutions Inc.
Inventor: Georg J. OCKENFUSS
IPC: H01L27/146 , H01L27/148
CPC classification number: H01L27/14621 , G01J3/26 , G01J3/2803 , G01J3/36 , G01J2003/2806 , G01J2003/2826 , G02B5/285 , H01L27/14625 , H01L27/14629 , H01L27/14645 , H01L27/14649 , H01L27/14685 , H01L27/14868 , H01L27/14875
Abstract: An optical sensor device may include a set of optical sensors. The optical sensor device may include a substrate. The optical sensor device may include a multispectral filter array disposed on the substrate. The multispectral filter array may include a first dielectric mirror disposed on the substrate. The multispectral filter array may include a spacer disposed on the first dielectric mirror. The spacer may include a set of layers. The multispectral filter array may include a second dielectric mirror disposed on the spacer. The second dielectric mirror may be aligned with two or more sensor elements of a set of sensor elements.
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公开(公告)号:US20160231483A1
公开(公告)日:2016-08-11
申请号:US15099180
申请日:2016-04-14
Applicant: Viavi Solutions, Inc.
Inventor: Karen Denise HENDRIX , Richard A. BRADLEY , Marius GRIGONIS , Georg J. OCKENFUSS
CPC classification number: G02B5/281 , G01J5/0862 , G02B1/11 , G02B5/207 , G02B5/285 , G06K9/00335 , H04N5/33 , H04N13/254
Abstract: An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
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公开(公告)号:US20250155635A1
公开(公告)日:2025-05-15
申请号:US18628229
申请日:2024-04-05
Applicant: VIAVI Solutions Inc.
Inventor: William D. HOUCK , Georg J. OCKENFUSS
IPC: G02B6/036
Abstract: A waveguide includes a plurality of sets of layers arranged in a stack. Each set of layers includes a first layer that comprises at least tantalum and oxygen, and a second layer that comprises at least silicon and oxygen. The waveguide is configured to propagate light associated with a particular wavelength in a first direction that is orthogonal to a second direction in which the plurality of sets of layers are arranged in the stack. A quantity of the plurality of sets of layers is greater than or equal to 15. Respective thicknesses of the first layer and the second layer, in the second direction, are less than or equal to a fifteenth of the particular wavelength.
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公开(公告)号:US20230268362A1
公开(公告)日:2023-08-24
申请号:US18310769
申请日:2023-05-02
Applicant: VIAVI Solutions Inc.
Inventor: Georg J. OCKENFUSS
IPC: H01L27/146 , H01L31/0216 , G01J3/51 , G01J3/02 , G01J3/26 , G01J3/28 , G01J3/36 , G02B5/28 , H01L33/60 , H01L33/46 , H10K50/856 , H10K59/38
CPC classification number: H01L27/14621 , H01L31/02162 , G01J3/51 , G01J3/513 , G01J3/0208 , G01J3/26 , G01J3/2803 , G01J3/36 , G02B5/286 , G02B5/288 , H01L33/60 , H01L33/46 , H10K50/856 , H10K59/38 , H01L27/1462 , H01L27/14627 , H01L27/14629 , H01L27/1464 , H01L27/14643 , H01L27/14685 , G01J2003/2826 , G01J2003/2806
Abstract: A device may include a multispectral filter array disposed on the substrate. The multispectral filter array may include a first metal mirror disposed on the substrate. The multispectral filter may include a spacer disposed on the first metal mirror. The spacer may include a set of layers. The spacer may include a second metal mirror disposed on the spacer. The second metal mirror may be aligned with two or more sensor elements of a set of sensor elements.
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公开(公告)号:US20230168418A1
公开(公告)日:2023-06-01
申请号:US17457123
申请日:2021-12-01
Applicant: VIAVI Solutions Inc.
Inventor: Georg J. OCKENFUSS , Jinhui YANG , Marius GRIGONIS , Karen Denise HENDRIX , Andy SHKABKO
Abstract: In some implementations, an optical interference filter includes a substrate; and a set of layers that are disposed on the substrate, wherein the set of layers includes: a first subset of layers; and a second subset of layers; wherein: each of the first subset of layers comprises an aluminum nitride (AlN) material, a stress of each of the first subset of layers is between −1000 and 800 megapascals, the first subset of layers has a first refractive index with a first value, each of the second subset of layers comprises at least one other material, the second subset of layers has a second refractive index with a second value that is different than the first value, and the optical interference filter has an effective refractive index greater than or equal to 95% of a highest value of the first value and the second value.
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公开(公告)号:US20230012033A1
公开(公告)日:2023-01-12
申请号:US17809331
申请日:2022-06-28
Applicant: VIAVI Solutions Inc.
Inventor: Christophe BOURREAU , Markus BILGER , Georg J. OCKENFUSS
Abstract: An optical device includes an optical sensor, a dye-based optical filter, and a multi-bandpass optical interference filter. The multi-bandpass optical interference filter is configured to pass a first spectral range of visible light, a second spectral range of visible light, and a third spectral range of visible light. The second spectral range does not overlap with the first spectral range, and the third spectral range does not overlap with the first spectral range and the second spectral range. The multi-bandpass optical interference filter is further configured to prevent passage of a fourth spectral range of near-infrared light. An angle shift associated with each spectral range, of the first spectral range, the second spectral range, and the third spectral range, is less than or equal to 2.0% of a center wavelength of the spectral range for angles of incidence between 0 and 30 degrees.
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