Abstract:
Provided are an electrostatic chuck system and a method of manufacturing an organic light-emitting display apparatus by using the electrostatic chuck system. The electrostatic chuck system comprises: a stage in which a first electrode and a second electrode are arranged, the first electrode having a first polarity and the second electrode having a second polarity that is different from the first polarity; a display substrate on the stage, the display substrate including a pixel electrode on a surface thereof; and an optical mask over the surface of the display substrate, the optical mask including a reflection layer and a transfer layer to be transferred to the display substrate, wherein the display substrate has one of the first and second polarities, and the optical mask has the other of the first and second_polarities as the display substrate.
Abstract:
Provided is a method of manufacturing an organic light-emitting display apparatus. The method includes: forming a passivation layer on a substrate, on which pixel electrodes are formed, to cover the pixel electrodes; forming a first exposure portion in the passivation layer to expose a first pixel electrode among the pixel electrodes; forming a first intermediate layer on the exposed first pixel electrode; filling the first exposure portion with the same material as the passivation layer; forming a second exposure portion in the passivation layer to expose a second pixel electrode among the pixel electrodes; forming a second intermediate layer on the exposed second pixel electrode; filling the second exposure portion with the same material as the passivation layer; forming a third exposure portion in the passivation layer to expose a third pixel electrode among the pixel electrodes; and forming a third intermediate layer on the exposed third pixel electrode.