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公开(公告)号:US3436282A
公开(公告)日:1969-04-01
申请号:US3436282D
申请日:1966-10-17
发明人: SHODA KOICHIRO
IPC分类号: H01L21/00 , H01L21/8222 , H01L21/8228 , H01L23/29 , H01L29/8605 , H01L31/00 , H01L31/0352 , H01L19/00 , H01L7/44
CPC分类号: H01L31/03529 , H01L21/00 , H01L21/8222 , H01L21/82285 , H01L23/291 , H01L29/8605 , H01L31/00 , H01L2924/0002 , Y02E10/50 , Y10S148/038 , Y10S148/085 , Y10S148/106 , Y10S148/145 , Y10S438/965 , H01L2924/00