公开(公告)号：US08712009B2

公开(公告)日：2014-04-29

申请号：US12864406

申请日：2009-01-20

申请人： Johannes Albertus Zandhuis

发明人： Johannes Albertus Zandhuis

IPC分类号： G01B15/06

CPC分类号： G01N29/223 ,  G01B15/025

摘要： A method of determining integrity of a can seam including disposing the can seam between an X-ray source and an X-ray detector, exposing an overlap region of the can seam to radiation from the source, and determining an indication of integrity of the overlap region from a measure of variation in radiation intensity readings taken by the detector over a series of circumferential intervals of the can seam.

摘要翻译： 一种确定罐缝的完整性的方法，包括在X射线源和X射线检测器之间设置罐缝，将罐缝的重叠区域暴露于来自源的辐射，以及确定重叠的完整性的指示 区域来自于在罐缝的一系列圆周间隔上由检测器采集的辐射强度读数的变化的度量。

公开(公告)号：US20140027633A1

公开(公告)日：2014-01-30

申请号：US14009182

申请日：2012-04-11

申请人： Susumu Kuwabara

发明人： Susumu Kuwabara

IPC分类号： G01B15/02

CPC分类号： G01B15/02 ,  G01B15/025 ,  G01N23/2252 ,  G01N2223/6116 ,  H01L21/7624 ,  H01L22/12

摘要： A method for measuring a film thickness of an SOI layer of an SOI wafer including at least an insulator layer and the SOI layer which is formed on the insulator layer and is formed of a silicon single crystal, wherein a surface of the SOT layer is irradiated with an electron beam, characteristic X-rays are detected from a side of the SOI layer surface irradiated with the electron beam, the characteristic X-rays being generated by exciting a specific element in the insulator layer with the electron beam that has passed through the SOI layer and has been attenuated in the SOI layer, and the film thickness of the SOI layer is calculated on the basis of an intensity of the detected characteristic X-rays.

摘要翻译： 一种用于测量SOI晶片的SOI层的膜厚的方法，所述SOI晶片至少包括绝缘体层和形成在绝缘体层上并由硅单晶形成的SOI层，其中SOT层的表面被照射 利用电子束，从被电子束照射的SOI层表面的一侧检测特征X射线，通过用已经通过电子束的电子束激发绝缘体层中的特定元素来产生特征X射线 SOI层，并且在SOI层中已被衰减，并且基于检测到的特征X射线的强度来计算SOI层的膜厚度。

公开(公告)号：US08454234B2

公开(公告)日：2013-06-04

申请号：US12936278

申请日：2009-04-01

申请人： Lorenzo Ciani

发明人： Lorenzo Ciani

IPC分类号： H01J35/10

CPC分类号： G01B15/025 ,  H05G1/025

摘要： Thickness measurer for metal elements (11), comprising a source device (20), able to emit a bundle (F) of ionizing radiations, at a predetermined or predeterminable intensity, a receiver device (24), disposed on an opposite side with respect to the metal element (11) and suitable to detect the residual intensity of the bundle (F) of ionizing radiations. The measurer comprises a cooling device, associated with the source device (20). The cooling device comprises a heat pump element (30), to remove heat from the source device (20) so as to keep the source device (20) at a predetermined and controlled temperature. The thickness measurer also comprises detection means (46, 124) for the direct or indirect detection of the intensity, or the variation in intensity, of the bundle (F) emitted by the source device (20). The detection means (46, 124) is associated with the heat pump element (30), in order to keep the emission of the bundle (F) of ionizing radiations stable.

摘要翻译： 金属元件（11）的厚度测量器，包括能够以预定或可预定强度发射电离辐射束（F）的源装置（20），接收器装置（24），其设置在相对于 并且适于检测电离辐射束（F）的剩余强度。 测量器包括与源装置（20）相关联的冷却装置。 冷却装置包括热源元件（30），以从源装置（20）去除热量，以便将源装置（20）保持在预定和受控的温度。 厚度测量器还包括用于直接或间接检测由源装置（20）发射的束（F）的强度或强度变化的检测装置（46,124）。 检测装置（46,124）与热泵元件（30）相关联，以便保持电离辐射束（F）的发射稳定。

公开(公告)号：US08064072B2

公开(公告)日：2011-11-22

申请号：US12517396

申请日：2007-12-06

申请人： Peter Schmitt ,  Guenther Kostka

发明人： Peter Schmitt ,  Guenther Kostka

IPC分类号： G01B11/28

CPC分类号： G01B11/0691 ,  G01B11/245 ,  G01B15/025

摘要： The material strength of extensive objects can be determined efficiently by using two distance measures, wherein a first distance measurer determines the distance to a first main surface of the object and a second distance measurer determines the distance to a second main surface object opposing the first main surface. If potential measurement errors due to the extensive geometry are avoided by determining a reference distance between the first distance measurer and the second distance measurer by a reference object, the thickness of the object between the first main surface and the second main surface can be determined with high accuracy and velocity.

摘要翻译： 可以通过使用两个距离测量来有效地确定广泛物体的材料强度，其中第一距离测量器确定到物体的第一主表面的距离，第二距离测量器确定到与第一主体相对的第二主表面物体的距离 表面。 如果通过用参考对象确定第一距离测量器和第二距离测量器之间的参考距离来避免由于广泛的几何形状导致的潜在测量误差，则可以用第一主表面和第二主表面之间的物体的厚度来确定 精度高，速度快。

公开(公告)号：US20110150316A1

公开(公告)日：2011-06-23

申请号：US12864406

申请日：2009-01-20

申请人： Johannes Albertus Zandhuis

发明人： Johannes Albertus Zandhuis

IPC分类号： G06K9/00

CPC分类号： G01N29/223 ,  G01B15/025

摘要： A method of determining integrity of a can seam including disposing the can seam between an X-ray source and an X-ray detector, exposing an overlap region of the can seam to radiation from the source, and determining an indication of integrity of the overlap region from a measure of variation in radiation intensity readings taken by the detector over a series of circumferential intervals of the can seam.

摘要翻译： 一种确定罐缝的完整性的方法，包括在X射线源和X射线检测器之间设置罐缝，将罐缝的重叠区域暴露于来自源的辐射，以及确定重叠的完整性的指示 区域来自于在罐缝的一系列圆周间隔上由检测器采集的辐射强度读数的变化的度量。

公开(公告)号：US20110026672A1

公开(公告)日：2011-02-03

申请号：US12936278

申请日：2009-04-01

申请人： Lorenzo Ciani

发明人： Lorenzo Ciani

IPC分类号： G01B15/02

CPC分类号： G01B15/025 ,  H05G1/025

摘要： Thickness measurer for metal elements (11), comprising a source device (20), able to emit a bundle (F) of ionizing radiations, at a predetermined or predeterminable intensity, a receiver device (24), disposed on an opposite side with respect to the metal element (11) and suitable to detect the residual intensity of the bundle (F) of ionizing radiations. The measurer comprises a cooling device, associated with the source device (20). The cooling device comprises a heat pump element (30), to remove heat from the source device (20) so as to keep the source device (20) at a predetermined and controlled temperature. The thickness measurer also comprises detection means (46, 124) for the direct or indirect detection of the intensity, or the variation in intensity, of the bundle (F) emitted by the source device (20). The detection means (46, 124) is associated with the heat pump element (30), in order to keep the emission of the bundle (F) of ionizing radiations stable.

摘要翻译： 金属元件（11）的厚度测量器，包括能够以预定或可预定强度发射电离辐射束（F）的源装置（20），接收器装置（24），其设置在相对于 并且适于检测电离辐射束（F）的剩余强度。 测量器包括与源装置（20）相关联的冷却装置。 冷却装置包括热源元件（30），以从源装置（20）去除热量，以便将源装置（20）保持在预定和受控的温度。 厚度测量器还包括用于直接或间接检测由源装置（20）发射的束（F）的强度或强度变化的检测装置（46,124）。 检测装置（46,124）与热泵元件（30）相关联，以便保持电离辐射束（F）的发射稳定。

公开(公告)号：US20090310745A1

公开(公告)日：2009-12-17

申请号：US12375327

申请日：2007-07-18

申请人： Julien Banchet ,  David Tisseur

发明人： Julien Banchet ,  David Tisseur

IPC分类号： G01N23/06 ,  H05G1/58

CPC分类号： G01B15/025 ,  A61B6/484 ,  G01N2223/615 ,  G21C17/06 ,  G21K2207/005 ,  G21Y2002/202 ,  G21Y2002/304 ,  G21Y2004/40

摘要： The aim of the method is to characterize an element (21) comprising a plurality of superposed layers separated from one another by interfaces. It comprises at least the following steps: The element (21) is illuminated with radiation (15) emitted by a source (13); radiation (23) transmitted through the element (21) is collected on a detector (17), this transmitted radiation forming an experimental image of the element (21) on the detector (17), the detector (17) being placed at such a distance from the element (21) that interference fringes appear on the experimental image at the interfaces between the layers; and an approximate value of at least one physical characteristic of at least one given layer is determined by calculation from the experimental image, the determination step being implemented by minimizing the difference between the experimental image and a simulated image of at least part of the experimental image of the element (21).

摘要翻译： 该方法的目的是表征包括通过界面彼此分离的多个重叠层的元件（21）。 其至少包括以下步骤：元件（21）被源（13）发射的辐射（15）照射; 通过元件（21）传输的辐射（23）被收集在检测器（17）上，该透射辐射在检测器（17）上形成元件（21）的实验图像，检测器（17）被放置在 距离元件（21）的距离是干涉条纹出现在实验图像之间的层间界面处; 并且通过从实验图像的计算来确定至少一个给定层的至少一个物理特性的近似值，所述确定步骤通过使实验图像与至少部分实验图像的模拟图像之间的差最小化来实现 的元件（21）。

公开(公告)号：US20070092060A1

公开(公告)日：2007-04-26

申请号：US11538652

申请日：2006-10-04

申请人： Lee Grodzins

发明人： Lee Grodzins

IPC分类号： G01B15/02 ,  G01N23/223

CPC分类号： G01N23/223 ,  G01B15/025 ,  G01N2223/076

摘要： A method and computer program software product for establishing an areal density of an elemental constituent of one layer of a stack of layers of material overlying a substrate. Incident penetrating radiation excites characteristic x-ray fluorescent radiation in multiple lines associated with each of one or more elements. Areal densities of successive layers are determined by self-consistent solution of equations relating the ratios of intensities of the characteristic fluorescence lines of successive elements.

摘要翻译： 一种方法和计算机程序软件产品，用于建立覆盖在衬底上的一层堆叠材料的一层的元素组成的面密度。 入射穿透辐射激发与一个或多个元素中的每一个相关联的多条线中的特征X射线荧光辐射。 连续层的面密度由与连续元素的特征荧光线的强度比相关的方程式的自相一致解决定。

公开(公告)号：US20060058974A1

公开(公告)日：2006-03-16

申请号：US11108498

申请日：2005-04-18

申请人： Brian Lasiuk ,  Thomas Batzinger ,  Manoharan Venugopal ,  Elizabeth Dixon ,  Michael Hopple ,  Nityanand Gopalika ,  Sivaramanivas Ramaswamy ,  Debasish Mishra ,  Rajashekar Venkatachalam ,  Vamshi Reddy Kommareddy

发明人： Brian Lasiuk ,  Thomas Batzinger ,  Manoharan Venugopal ,  Elizabeth Dixon ,  Michael Hopple ,  Nityanand Gopalika ,  Sivaramanivas Ramaswamy ,  Debasish Mishra ,  Rajashekar Venkatachalam ,  Vamshi Reddy Kommareddy

IPC分类号： G01C25/00 ,  G06F19/00

CPC分类号： G01B15/025

摘要： A digital radiography imaging system for acquiring digital images of an object, and a method for transforming digital images into an absolute thickness map characterizing the object under inspection. The system includes a radiation source for directing radiation through a desired region of the object, and a radiation detector having a plurality of sensing elements for detecting radiation passing through the object. Numerical data generated from each sensing element is calibrated, for example by correcting for variations in radiation paths between the source and detector, by correcting for variations in the spatial frequency response (MTF) of the detector, by correcting for variations in the geometric profile of the object under inspection, and by correcting for material contained in and/or around the object. The calibrated data is processed in order to generate and display an absolute thickness map of the object. The calibration procedures are adapted for extracting a thickness map from both isotope sources and X-ray tube sources.

公开(公告)号：US06953933B1

公开(公告)日：2005-10-11

申请号：US10649971

申请日：2003-08-28

申请人： Katsuhiko Ogiso

发明人： Katsuhiko Ogiso

IPC分类号： G01B15/02

CPC分类号： G01B15/025

摘要： A wall thickness of each layer or a size of a space between layers of a multilayer structured container can be easily measured with high accuracy. According to a method for measuring an inner size of a container by irradiating a multilayer structured container 2 as a target for measurement with X-rays radiated from an X-ray generating source 12 and by detecting the X-rays transmitting the container by a detector 14, the X-ray generating source 12, a slit 15, and the detector 14 perform a linear scan to the container 2 in a direction orthogonal to beams 17 in addition to disposing the slit (a double slit) 15 which narrows the X-rays transmitting the container down to the narrow beams 17 in front of the detector 14 and disposing a focal spot 12a of the X-ray generating source 12, a center of the slit 15, and a center of the detector 14 on a same straight line. The X-ray beams 17 are irradiated substantially parallel to a tangential direction of a container peripheral wall, and the X-rays transmitting the container peripheral wall are detected by the detector; thereby a thickness of each layer or the space between layers of the container peripheral wall is measured based on an obtained intensity distribution curve of damping on transmission.

摘要翻译： 可以容易地以高精度测量各层的壁厚或多层结构化容器的层之间的间隔尺寸。 根据通过从X射线发生源12辐射的X射线照射作为测量对象的多层结构化容器2并通过检测由X射线发射容器的X射线来测量容器的内部尺寸的方法 如图14所示，X射线发生源12，狭缝15和检测器14除了设置狭缝X射线的狭缝（双缝）15之外，还沿着与光束17正交的方向对容器2进行线性扫描， 将容器向下传送到检测器14前面的窄梁17，并将X射线发生源12的焦斑12a，狭缝15的中心和检测器14的中心设置在同一直线上 线。 基本上平行于容器周壁的切线方向照射X射线束17，通过检测器检测透过容器周壁的X射线; 从而基于获得的透射阻尼强度分布曲线来测量每个层的厚度或容器周壁的层之间的空间。