公开(公告)号：US06797956B2

公开(公告)日：2004-09-28

申请号：US10339276

申请日：2003-01-09

Applicant: Gerd Benner

Inventor： Gerd Benner

IPC: H01J3726

CPC classification number: H01J37/265 ,  H01J37/26 ,  H01J2237/2614

Abstract: In a transmission electron microscope with phase contrast imaging, the illumination of the object to be imaged takes place with an annular illuminating aperture. An annular phase-shifting element with a central aperture is arranged in a plane Fourier transformed with respect to the object plane. The annular phase-shifting element confers a phase shift of &pgr;/2 on a null beam, while the radiation of higher diffraction orders diffracted at the object in the direction of the optical axis passes through the central aperture of the annular phase-shifting element and consequently is not affected, or only slightly affected, by the phase-shifting element. The annular illuminating aperture is preferably produced sequentially in time by a deflecting system, which produces a beam tilt in a plane conjugate to the object plane.

Abstract translation: 在具有相位对比成像的透射电子显微镜中，待成像对象的照明是用环形照明孔进行的。 具有中心孔的环形相移元件布置在相对于物平面进行傅里叶变换的平面中。 环形移相元件在零光束上赋予π/ 2的相移，而在物体处沿光轴方向衍射的较高衍射级的辐射通过环形移相元件的中心孔，并且 因此不受相移元件的影响或仅受轻微的影响。 环形照明孔优选地通过偏转系统在时间上顺序地产生，该偏转系统在与物平面共轭的平面中产生光束倾斜。

公开(公告)号：US6040576A

公开(公告)日：2000-03-21

申请号：US145397

申请日：1998-09-01

Applicant: Gerd Benner

Inventor： Gerd Benner

IPC: G01Q30/02 ,  H01J37/05 ,  H01J49/46 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J2237/28

Abstract: An energy filter, particularly for electron microscopes, in which the setting of different energy bandwidths takes place electron-optically. For this purpose, one or more deflecting systems and one or more transfer lenses are provided at the filter exit. A diaphragm arrangement is arranged in the dispersion plane and has an opening with a stepped edge region. Slit diaphragms with different slit lengths can be simulated by deflection of the electron beam. The deflection of the electron beam effected by the dispersion system(s) perpendicularly to the dispersive direction of the filter is compensated again by a succeeding transfer lens or a further deflecting system, so that an image displacement is also compensated. In a second embodiment, a respective slit edge is arranged in two mutually conjugate spectrum planes. A deflecting system preceding each slit edge, different spectrum portions are filtered out by the two slit edges, according to the excitation of the deflecting systems. The energy bandwidth can be varied continuously in this embodiment.

Abstract translation: 特别是用于电子显微镜的能量过滤器，其中不同能量带宽的设定以电子光学方式进行。 为此，在过滤器出口处设置一个或多个偏转系统和一个或多个传递透镜。 隔膜装置布置在分散平面中并且具有带有台阶边缘区域的开口。 可以通过电子束的偏转来模拟具有不同狭缝长度的狭缝膜片。 由分散系统垂直于滤色器的色散方向影响的电子束的偏转由后续的转印透镜或另外的偏转系统再次补偿，使得图像位移也被补偿。 在第二实施例中，相应的狭缝边缘被布置在两个相互共轭的光谱平面中。 根据偏转系统的激发，在每个狭缝边缘之前的偏转系统，不同的光谱部分被两个狭缝边缘滤出。 在本实施例中，能量带宽可以连续变化。

公开(公告)号：US5013913A

公开(公告)日：1991-05-07

申请号：US384273

申请日：1989-07-24

Applicant: Gerd Benner

Inventor： Gerd Benner

IPC: H01J37/04 ,  H01J37/09 ,  H01J37/147 ,  H01J37/22 ,  H01J37/26

CPC classification number: H01J37/26

Abstract: The invention is directed to a method of illuminating an object in a transmission electron microscope. For illuminating the object, two condenser lenses are used such that they image an image of the electron source with different demagnifications. This crossover is imaged in the focal plane of a single-field condenser objective lens by means of a third condenser lens 14 for TEM-operation whereby the illumination aperture can be adjusted with respect to its magnitude. The electron beam is shaped ahead of the single-field condenser objective lens by two diaphragms arranged in different planes and by means of at least one deflection system such that the magnitude of the illumination field on the object is only slightly larger than the region magnified by the electron microscope. The magnitude of the illumination field and the illuminating aperture can be adjusted independently of each other.

Abstract translation: 本发明涉及透射电子显微镜照明物体的方法。 为了照亮物体，使用两个聚光透镜，使得它们以不同的刻痕对电子源的图像进行成像。 这种交叉通过用于TEM操作的第三聚光透镜14在单场聚光镜物镜的焦平面中成像，由此可以相对于其大小来调整照明孔径。 电子束通过布置在不同平面中的两个隔膜和借助于至少一个偏转系统在单场聚光镜物镜之前形成，使得物体上的照明场的大小仅稍微大于由物体放大的区域的大小 电子显微镜。 可以彼此独立地调节照明场和照明孔的大小。