公开(公告)号：US20150276567A1

公开(公告)日：2015-10-01

申请号：US14432711

申请日：2013-10-07

Applicant: FEI COMPANY

Inventor： Michael Schmidt ,  Hyun Hwa Kim ,  Sang Hoon Lee ,  Stacey Stone ,  Jeffrey Blackwood

IPC: G01N1/32 ,  H01J37/305 ,  H01J37/20

CPC classification number: G01N1/32 ,  G01N1/286 ,  H01J37/20 ,  H01J37/3053 ,  H01J2237/31745

Abstract: A method and system for exposing a portion of a structure in a sample for observation in a charged particle beam system, including extracting a sample from a bulk sample; determining an orientation of the sample that reduces curtaining; mounting the sample to a holder in the charged particle beam system so that the holder orients the sample in an orientation that reduces curtaining when the sample is milled to expose the structure; exposing the structure by milling the sample in a direction that reduces curtaining; and imaging the structure.

Abstract translation: 一种方法和系统，用于暴露用于在带电粒子束系统中观察的样品中的结构的一部分，包括从大量样品中提取样品; 确定减少绘制的样品的取向; 将样品安装到带电粒子束系统中的保持器上，使得保持器以样品取向使得当样品被研磨以暴露结构时减少绘制的取向; 通过在减少绘制的方向上研磨样品来暴露结构; 并对结构进行成像。

公开(公告)号：US20150243477A1

公开(公告)日：2015-08-27

申请号：US14432730

申请日：2013-10-07

Applicant: FEI COMPANY

Inventor： Stacey Stone ,  Sang Hoon Lee ,  Jeffrey Blackwood ,  Michael Schmidt

IPC: H01J37/30 ,  H01J37/305 ,  H01J37/31

CPC classification number: H01J37/3005 ,  G01N1/32 ,  G01N23/2255 ,  G01N2223/104 ,  G01N2223/611 ,  H01J37/3007 ,  H01J37/3053 ,  H01J37/3056 ,  H01J37/31 ,  H01J2237/063 ,  H01J2237/08 ,  H01J2237/2813 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: To reduce artifacts in a surface exposed by a focused ion beam for viewing, a trench is milled next to the region of interest, and the trench is filled to create a bulkhead. The ion beam is directed through the bulkhead to expose a portion of the region of interest for viewing. The trench is filled, for example, by charged particle beam-induced deposition. The trench is typically milled and filled from the top down, and then the ion beam is angled with respect to the sample surface to expose the region of interest.

Abstract translation: 为了减少由聚焦离子束暴露的表面中的人造物进行观察，在感兴趣区域旁边研磨沟槽，并且填充沟槽以形成隔板。 离子束被引导通过隔板以暴露感兴趣区域的一部分以供观察。 例如，通过带电粒子束诱导沉积来填充沟槽。 沟槽通常从顶部向下铣削和填充，然后离子束相对于样品表面成角度以暴露感兴趣的区域。

公开(公告)号：US20150214124A1

公开(公告)日：2015-07-30

申请号：US14169100

申请日：2014-01-30

Applicant: FEI Company

Inventor： Alexander Buxbaum ,  Michael Schmidt

IPC: H01L21/66 ,  H01L21/67

CPC classification number: H01L22/14 ,  B26D3/282 ,  B28D5/04 ,  G01N1/286 ,  G01N2001/2873 ,  G03F1/72 ,  G03F1/84 ,  G03F7/70608 ,  G03F7/7065 ,  H01L21/304 ,  Y10T156/1967

Abstract: A method and apparatus for use in surface delayering for fault isolation and defect localization of a sample work piece is provided. More particularly, a method and apparatus for mechanically peeling of one or more layers from the sample in a rapid, controlled, and accurate manner is provided. A programmable actuator includes a delayering probe tip with a cutting edge that is shaped to quickly and accurately peel away a layer of material from a sample. The cutting face of the delayering probe tip is configured so that each peeling step peels away an area of material having a linear dimension substantially equal to the linear dimension of the delayering probe tip cutting face. The surface delayering may take place inside a vacuum chamber so that the target area of the sample can be observed in-situ with FIB/SEM imaging.

Abstract translation: 提供了一种用于表面延迟的用于样品工件的故障隔离和缺陷定位的方法和装置。 更具体地，提供了一种用于以快速，受控和准确的方式从样品机械剥离一层或多层的方法和装置。 可编程致动器包括具有切割边缘的延迟探针尖端，其被成形为快速且准确地从样品剥离一层材料。 延迟探针尖端的切割面构造成使得每个剥离步骤剥离具有基本上等于延迟探针尖端切割面的线性尺寸的直线尺寸的材料区域。 表面延迟可能发生在真空室内，使得可以使用FIB / SEM成像原位观察样品的目标区域。