公开(公告)号：US5783355A

公开(公告)日：1998-07-21

申请号：US490512

申请日：1995-06-14

Applicant: Ayako Ida ,  Haruyoshi Osaki ,  Takeshi Hioki ,  Yasunori Doi ,  Yasunori Uetani ,  Ryotaro Hanawa

Inventor： Ayako Ida ,  Haruyoshi Osaki ,  Takeshi Hioki ,  Yasunori Doi ,  Yasunori Uetani ,  Ryotaro Hanawa

IPC: C07C39/15 ,  G03F7/004 ,  G03F7/022 ,  G03F7/023 ,  H01L21/027 ,  H01L21/30

CPC classification number: G03F7/022 ,  C07C39/15 ,  G03F7/0226 ,  G03F7/0236

Abstract: A positive resist composition comprising 1,2-quinonediazide compound and, as an alkali-soluble resin, an alkali-soluble resin (A) which comprises a resin (I) obtainable through a condensation reaction of a mixture of m-cresol, 2,3,5-trimethylphenol and optionally p-cresol with an aldehyde and a low molecular weight novolak (II) having a weight average molecular weight of 200 to 2000 as converted to polystyrene, an alkali-soluble resin (B) which comprises a resin (I) and a compound of the general formula (III): ##STR1## wherein R.sub.1, R.sub.2 and R.sub.3 are respectively a C.sub.1 -C.sub.5 alkyl group or a C.sub.1 -C.sub.5 alkoxy group, 1, m and n are respectively a number of 0 to 3, R' is a hydrogen atom or a C.sub.1 -C.sub.3 alkyl group, or an alkali-soluble resin (C) which comprises a resin (IV) obtainable through a condensation reaction of a mixture of m-methoxyphenol and 2,3,5-trimethylphenol in a molar ratio of 80:20 to 30:70 with an aldehyde, which has good sensitivity, improved resolution and heat resistance.

公开(公告)号：US20140151543A1

公开(公告)日：2014-06-05

申请号：US13884755

申请日：2011-11-08

Applicant: Hisashi Nagano ,  Yasutaka Suzuki ,  Hideo Kashima ,  Yuichiro Hashimoto ,  Masuyuki Sugiyama ,  Masakazu Sugaya ,  Yasunori Doi ,  Koichi Terada

Inventor： Hisashi Nagano ,  Yasutaka Suzuki ,  Hideo Kashima ,  Yuichiro Hashimoto ,  Masuyuki Sugiyama ,  Masakazu Sugaya ,  Yasunori Doi ,  Koichi Terada

IPC: H01J49/00 ,  H01J49/04

CPC classification number: H01J49/0422 ,  G01N1/2211 ,  G01N1/2214 ,  G01N33/0057 ,  G01N2001/028 ,  H01J49/00 ,  H01J49/0036 ,  H01J49/04 ,  H01J49/0459 ,  H01J49/0468 ,  Y02A50/25

Abstract: Provided is a technique of analyzing particles in real time while collecting and condensing the particles continuously. Gas and/or particles as a detection target substance that are attached to an authentication target 2 are removed by air flow from a blowing region 5. The removed sample is sucked and is condensed and sampled at a sampling region 10, and ions of the sample are generated at an ion source 21 and are then subjected to mass analysis at a mass analysis region 23. Determination of the obtained mass spectrum is made as to the presence or not of a mass spectrum derived from the detection target substance, and a monitor 27 displays a result thereof. Thereby, the detection target substance attached to the authentication target 2 can be detected continuously in real time, promptly and with a less error rate.

Abstract translation: 提供了一种在连续收集和冷凝颗粒时实时分析颗粒的技术。 作为检测对象物质的作为检测对象物质的气体和/或颗粒被从吹扫区域5的空气流除去。将取出的样品抽吸并在采样区域10被冷凝并取样，并且样品的离子 在离子源21处产生，然后在质量分析区域23进行质量分析。对获得的质谱进行测定，确定是否存在从检测目标物质得到的质谱，以及监测器27 显示其结果。 因此，可以实时，及时且误码率较小的连续检测附着于认证对象2的检测对象物质。

公开(公告)号：US07999240B2

公开(公告)日：2011-08-16

申请号：US12168232

申请日：2008-07-07

Applicant: Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

Inventor： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC: H01J37/20

CPC classification number: G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A system for analyzing a semiconductor device, including: a first ion beam apparatus including: a sample stage to mount a sample substrate; a vacuum chamber in which the sample stage is placed; an ion beam irradiating optical system to irradiate the sample substrate; a specimen holder that accommodates a plurality of specimens separated from the sample substrate by the irradiation of the ion beam; and a probe to extract the separated specimen from the sample substrate, and to transfer the separated specimen to the specimen holder; a second ion beam apparatus that carries out a finishing process to the specimen; and an analyzer to analyze the finished specimen, wherein the first ion beam apparatus separates the specimen and the probe in a vacuum condition.

Abstract translation: 一种用于分析半导体器件的系统，包括：第一离子束装置，包括：样品台，用于安装样品基板; 其中放置样品台的真空室; 离子束照射光学系统照射样品基板; 样本保持器，其容纳通过离子束的照射与样品基板分离的多个样本; 以及从所述样品基材中提取分离出的试样并将分离的试样转移到所述试样保持器的探针。 对样品进行精加工的第二离子束装置; 以及用于分析成品样品的分析器，其中所述第一离子束装置在真空条件下分离所述样品和所述探针。

公开(公告)号：US20070145299A1

公开(公告)日：2007-06-28

申请号：US11701410

申请日：2007-02-02

Applicant: Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

Inventor： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC: H01J37/08

CPC classification number: G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A specimen fabrication apparatus including: a sample stage to mount or hold a sample substrate, an ion beam irradiating optical system to irradiate the sample substrate with an ion beam, a specimen holder to mount a specimen obtained from the sample substrate, a transferring means including a probe, and a deposition-gas supplying source to supply a deposition-gas for forming a deposition-film between the specimen and the probe.

Abstract translation: 一种试样制造装置，其特征在于，具备：载置试样基板的样品台，离子束照射所述试样基板的离子束照射光学系统，将从所述试样基板得到的试样安装的试样保持体， 探针和沉积气体供给源，以在样品和探针之间提供用于形成沉积膜的沉积气体。

公开(公告)号：US20060192099A1

公开(公告)日：2006-08-31

申请号：US11390201

申请日：2006-03-28

Applicant: Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

Inventor： Satoshi Tomimatsu ,  Kaoru Umemura ,  Yuichi Madokoro ,  Yoshimi Kawanami ,  Yasunori Doi

IPC: H01J49/00

CPC classification number: G01N1/32 ,  G01N1/28 ,  G01N2001/028 ,  G01N2001/045 ,  G01N2001/282 ,  H01J37/20 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/31732 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A specimen fabrication apparatus including: a specimen chamber, a sample stage in the specimen chamber, to mount a specimen substrate, a transfer unit to extract a micro-specimen from the specimen substrate, and to transfer the micro-specimen, within the specimen chamber; a specimen holder in the specimen chamber, to receive the micro-specimen from the transfer unit, and to have the micro-specimen affixed thereto, and an irradiating optical system to irradiate an ion beam to the specimen substrate or to the micro-specimen affixed to the specimen holder, wherein the transfer unit effects transfer of the micro-specimen from the specimen substrate to the specimen holder, and the irradiating optical system irradiates the ion beam onto the micro-specimen affixed to the specimen holder, while the specimen chamber remains substantially sealed.

公开(公告)号：US5407780A

公开(公告)日：1995-04-18

申请号：US240817

申请日：1994-05-11

Applicant: Takeshi Hioki ,  Seiko Kurio ,  Yasunori Uetani ,  Yasunori Doi ,  Hiroshi Moriuma

Inventor： Takeshi Hioki ,  Seiko Kurio ,  Yasunori Uetani ,  Yasunori Doi ,  Hiroshi Moriuma

IPC: G03F7/022 ,  G03F7/023 ,  H01L21/027 ,  G03F7/30

CPC classification number: G03F7/0236

Abstract: A positive resist composition containing a 1,2-quinone diazide compound and an alkali-soluble resin which constitutes a resin (I) obtainable through a condensation reaction of a phenol mixture containing m-cresol and 2-tert.-butyl-5-methylphenol with an aldehyde., which has well balanced sensitivity, resolution and heat resistance properties.

Abstract translation: 含有1,2-醌二叠氮化合物和碱溶性树脂的正性抗蚀剂组合物，其构成通过含有间甲酚和2-叔丁基-5-甲基苯酚的酚混合物的缩合反应得到的树脂（I） 具有良好平衡的灵敏度，分辨率和耐热性能的醛。