摘要:
A method of forming a buried gate electrode prevents voids from being formed in a silicide layer of the gate electrode. The method begins by forming a trench in a semiconductor substrate, forming a conformal gate oxide layer on the semiconductor in which the trench has been formed, forming a first gate electrode layer on the gate oxide layer, forming a silicon layer on the first gate electrode layer to fill the trench. Then, a portion of the first gate electrode layer is removed to form a recess which exposed a portion of a lateral surface of the silicon layer. A metal layer is then formed on the semiconductor substrate including on the silicon layer. Next, the semiconductor substrate is annealed while the lateral surface of the silicon layer is exposed to form a metal silicide layer on the silicon layer.
摘要:
In one embodiment, a semiconductor device includes a semiconductor substrate and a doped conductive layer formed over the semiconductor substrate. A diffusion barrier layer is formed over the doped conductive layer. The diffusion barrier layer may be formed from an amorphous semiconductor material. An ohmic contact layer is formed over the diffusion barrier layer. A metal barrier layer is formed over the ohmic contact layer. A metal layer is formed over the metal barrier layer.
摘要:
A semiconductor memory device, e.g., a charge trapping type non-volatile memory device, may include a charge trapping structure formed in a first area of a substrate and a gate structure formed in a second area of the substrate. The charge trapping structure may include a tunnel oxide layer pattern, a charge trapping layer pattern and a dielectric layer pattern of aluminum-containing tertiary metal oxide. The gate structure may include a gate oxide layer pattern, a polysilicon layer pattern and an ohmic layer pattern of aluminum-containing tertiary metal silicide. A first electrode and a second electrode may be formed on the charge trapping structure. A lower electrode and an upper electrode may be provided on the gate structure. The dielectric layer pattern may have a higher dielectric constant, and the ohmic layer pattern may have improved thermal stability, thereby enhancing programming and erasing operations of the charge trapping type non-volatile memory device.
摘要:
A method for controlling a refrigerator having a direction control valve drives a refrigerating fan for a predetermined time when a refrigerant passage is converted to make a refrigerant from a condenser firstly pass a refrigerating evaporator, and enhances a cooling efficiency by applying a residual cool air of the refrigerating evaporator to a refrigerating compartment, after the refrigerating compartment reaches a steady state in a refrigerator having a refrigerating evaporator embodied as an intercooler evaporator. The method includes the steps of: (a) determining whether a refrigerating compartment temperature sensed by a refrigerating compartment temperature sensor reaches a refrigerating compartment set temperature to determine a steady state of a refrigerating compartment; (b) if it is determined that the steady state of the refrigerating compartment in the step (a), switching a direction control valve, and allowing a refrigerant to firstly pass a refrigerating evaporator; (c) if the direction control valve is switched in the step (b), driving a refrigerating fan for a predetermined time simultaneously driving a freezing fan; and (d) if the refrigerating fan is driven for the predetermined time in the step (c), stopping the refrigerating fan.
摘要:
A refrigerator has a compartment for fermenting foods such as kimchi. The food is disposed within a container that is slidable into the compartment. The container includes an electrical connector projecting from a container wall and which becomes plugged into a recessed electrical connector disposed in a wall of the compartment in response to insertion of the container into the compartment. The container carries a heater and a temperature sensor which are electrically connectable, via the electrical connectors, to a controller disposed in the refrigerator housing.
摘要:
A method of manufacturing a semiconductor device includes: forming a trench for forming buried type wires by etching a substrate; forming first and second oxidation layers on a bottom of the trench and a wall of the trench, respectively; removing a part of the first oxidation layer and the entire second oxidation layer; and forming the buried type wires on the wall of the trench by performing a silicide process on the wall of the trench from which the second oxidation layer is removed. As a result, the buried type wires are insulated from each other.
摘要:
A method of forming a buried gate electrode prevents voids from being formed in a silicide layer of the gate electrode. The method begins by forming a trench in a semiconductor substrate, forming a conformal gate oxide layer on the semiconductor in which the trench has been formed, forming a first gate electrode layer on the gate oxide layer, forming a silicon layer on the first gate electrode layer to fill the trench. Then, a portion of the first gate electrode layer is removed to form a recess which exposed a portion of a lateral surface of the silicon layer. A metal layer is then formed on the semiconductor substrate including on the silicon layer. Next, the semiconductor substrate is annealed while the lateral surface of the silicon layer is exposed to form a metal silicide layer on the silicon layer.
摘要:
Example embodiments relate to a method of forming a hardened porous dielectric layer. The method may include forming a dielectric layer containing porogens on a substrate, transforming the dielectric layer into a porous dielectric layer using a first UV curing process to remove the porogens from the dielectric layer, and transforming the porous dielectric layer into a crosslinked porous dielectric layer using a second UV curing process to generate crosslinks in the porous dielectric layer.
摘要:
The present invention relates to a method and a kit for diagnosis of semen quality (motility and concentration) through observation of color change visible with the naked eye in a solution combining methylene blue and sperm. The invention comprises a method for semen diagnosis using color coding (with a standard color table) charting the various colors the semen may change into, and a diagnostic it for testing semen using said method. When combined with methylene blue, healthier and more active sperm fades the original blue color more rapidly due to respiration activity by the sperm, which allows for semen quality evaluation. The above principle are adapted to kit from inside a tube which encases a methylene blue solution into which sample semen is introduced for easy evaluation.
摘要:
In an ohmic layer and methods of forming the ohmic layer, a gate structure including the ohmic layer and a metal wiring having the ohmic layer, the ohmic layer is formed using tungsten silicide that includes tungsten and silicon with an atomic ratio within a range of about 1:5 to about 1:15. The tungsten silicide may be obtained in a chamber using a reaction gas including a tungsten source gas and a silicon source gas by a partial pressure ratio within a range of about 1.0:25.0 to about 1.0:160.0. The reaction gas may have a partial pressure within a range of about 2.05 percent to about 30.0 percent of a total internal pressure of the chamber. When the ohmic layer is employed for a conductive structure, such as a gate structure or a metal wiring, the conductive structure may have a reduced resistance.