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    Six-degree-of-freedom error correction method and apparatus
    24.
    发明公开
    Six-degree-of-freedom error correction method and apparatus 审中-公开

    公开(公告)号：US20240102860A1

    公开(公告)日：2024-03-28

    申请号：US18460721

    申请日：2023-09-05

    Applicant: CHROMA ATE INC.

    Inventor： Cheng Chih HSIEH ,  Tien Chi WU ,  Ming-Long LEE ,  Yu-Hsuan LIN ,  Tsung-I LIN ,  Chien-Hao MA

    IPC: G01J3/16

    CPC classification number: G01J3/16

    Abstract: An apparatus includes a six-axis correction stage, an auto-collimation measurement device, a light splitter, a telecentric image measurement device, and a controller. The six-axis correction stage carries a device under test; the auto-collimation measurement device is arranged above the six-axis correction stage along a measurement optical axis; the light splitter is arranged on the measurement optical axis and is interposed between the six-axis correction stage and the auto-collimation measurement device. A method controls the six-axis correction stage to correct rotation errors in at least two degrees of freedom of the device under test according to a measurement result of the auto-collimation measurement device, and controls the six-axis correction stage to correct translation and yaw errors in at least three degrees of freedom of the device under test according to a measurement result of the telecentric image measurement device by means of the controller.

    Grism
    25.
    发明授权
    Grism 失效
    格里姆

    公开(公告)号：US06927914B2

    公开(公告)日：2005-08-09

    申请号：US10457408

    申请日：2003-06-10

    Applicant: Noboru Ebizuka ,  Kashiko Kodate ,  Keiko Oka ,  Masanori Ie ,  Toshikazu Ebisuzaki

    Inventor： Noboru Ebizuka ,  Kashiko Kodate ,  Keiko Oka ,  Masanori Ie ,  Toshikazu Ebisuzaki

    IPC: G02B5/04 ,  G01J3/16 ,  G01J3/18 ,  G01J3/28 ,  G02B5/06 ,  G02B5/18 ,  G02B5/32 ,  G02B26/08 ,  G02B27/44

    CPC classification number: G01J3/12 ,  G01J3/16 ,  G01J3/18 ,  G01J3/2823 ,  G02B5/06 ,  G02B5/1814 ,  G02B5/1828 ,  G02B26/0883 ,  G02B27/4244

    Abstract: In order to achieve highly dispersive spectrometry in wide wavelength with the use of a single grism, but not a plurality of grisms, the grism is composed of a prism the vertex angle of which can be varied and a volume phase holographic (VPH) grating. More specifically, the grism comprises a prism the vertex angle of which can be varied; and a VPH grating being a diffraction grating and disposed substantially orthogonal with respect to a side including the vertex angle of the prism; the VPH grating being rotated around an axis being substantially orthogonal to the side of the prism, whereby a slope angle defined by the VPH grating and a predetermined plane is varied.

    Abstract translation: 为了通过使用单个棱镜而不是多个棱镜来实现宽波长的高色散光谱，棱镜由顶角可以变化的棱镜和体积相位全息（VPH）光栅组成。 更具体地，棱镜包括其顶角可以变化的棱镜; 以及VPH光栅，其是衍射光栅，并且相对于包括所述棱镜的顶角的一侧大致正交地布置; VPH光栅围绕基本上正交于棱镜的一侧的轴线旋转，由此由VPH光栅和预定平面限定的斜角变化。

    Grism
    26.
    发明申请
    Grism 失效
    格里姆

    公开(公告)号：US20040070853A1

    公开(公告)日：2004-04-15

    申请号：US10457408

    申请日：2003-06-10

    Inventor： Noboru Ebizuka ,  Kashiko Kodate ,  Keiko Oka ,  Masanori Ie ,  Toshikazu Ebisuzaki

    IPC: G02B005/04

    CPC classification number: G01J3/12 ,  G01J3/16 ,  G01J3/18 ,  G01J3/2823 ,  G02B5/06 ,  G02B5/1814 ,  G02B5/1828 ,  G02B26/0883 ,  G02B27/4244

    Abstract: In order to achieve highly dispersive spectrometry in wide wavelength with the use of a single grism, but not a plurality of grisms, the grism is composed of a prism the vertex angle of which can be varied and a volume phase holographic (VPH) grating. More specifically, the grism comprises a prism the vertex angle of which can be varied; and a VPH grating being a diffraction grating and disposed substantially orthogonal with respect to a side including the vertex angle of the prism; the VPH grating being rotated around an axis being substantially orthogonal to the side of the prism, whereby a slope angle defined by the VPH grating and a predetermined plane is varied.

    Abstract translation: 为了通过使用单个棱镜而不是多个棱镜来实现宽波长的高色散光谱，棱镜由顶角可以变化的棱镜和体积相位全息（VPH）光栅组成。 更具体地，棱镜包括其顶角可以变化的棱镜; 以及VPH光栅，其是衍射光栅，并且相对于包括所述棱镜的顶角的一侧大致正交地布置; VPH光栅围绕基本上正交于棱镜的一侧的轴线旋转，由此由VPH光栅和预定平面限定的斜角变化。

    Apparatus for carrying out spectral analysis of an optical light source using image detection and separation of spectral orders
    27.
    发明授权
    Apparatus for carrying out spectral analysis of an optical light source using image detection and separation of spectral orders 失效
    用于使用图像检测和频谱分离的光源进行光学光谱的光谱分析的装置

    公开(公告)号：US5859702A

    公开(公告)日：1999-01-12

    申请号：US737339

    申请日：1997-01-21

    Applicant: Peter Lindblom

    Inventor： Peter Lindblom

    IPC: G01J3/02 ,  G01J3/12 ,  G01J3/16 ,  G01J3/18 ,  G01J3/24

    CPC classification number: G01J3/16 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/18 ,  G01J2003/1204 ,  G01J2003/1828 ,  G01J3/24

    Abstract: An apparatus for carrying out spectral analysis of optical radiation emitted from a light source (11) comprises a spectral detector (1) having an entrance aperture (10) for the radiation from thelight source (11), a first imaging optical component (11), a first imaging optical component (12), a diffraction grating (14) for wavelength dispersion of the radiation, order sorting means (131, 132) for separation of the spectral orders of the diffraction grating (14), a second imaging optical component (15), and a detecting unit (16) for registration of the light source spectrum divided into order spectra through the order sorting means (131, 132). The order sorting means (131, 132) comprise at least two refractive optical components manufactured from different material. The two refractive optical components (131 and 132) together with the diffraction grating (14) and the imaging optical components (12 and 15) produce a substantially uniform distribution of the order spectra on the detector unit (16). Favourably the order sorting means (131, 132), the diffraction grating (14) and the imaging optical components (12, 15) also co-act to produce a substantially stigmatic image of the entrance aperture (10) in at least one point on the detector unit (16).

    Abstract translation: PCT No.PCT / SE95 / 00543 Sec。 371日期1997年1月21日 102（e）日期1997年1月21日PCT提交1995年5月15日PCT公布。 公开号WO95 / 31703 日期：1995年11月23日一种用于进行从光源（11）发射的光辐射的光谱分析的装置包括具有用于来自光源（11）的辐射的入射孔（10）的光谱检测器（1），第一成像 光学部件（11），第一成像光学部件（12），用于辐射的波长色散的衍射光栅（14），用于分离衍射光栅（14）的光谱级的分级装置（131,132） 第二成像光学部件（15），以及用于通过所述订单分选装置（131,132）对分配成顺序光谱的光源光谱进行配准的检测单元（16）。 订单分拣装置（131,132）包括由不同材料制成的至少两个折射光学部件。 两个折射光学部件（131和132）与衍射光栅（14）和成像光学部件（12和15）一起产生在检测器单元（16）上的顺序光谱的基本上均匀的分布。 有利的是，顺序分选装置（131,132），衍射光栅（14）和成像光学部件（12,15）也共同作用，以在至少一个点上产生入射孔径（10）的基本上眩目的图像， 检测器单元（16）。

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