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公开(公告)号:US10797165B2
公开(公告)日:2020-10-06
申请号:US16116577
申请日:2018-08-29
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jongryeol Yoo , Jeongho Yoo , Sujin Jung , Youngdae Cho
IPC: H01L29/66 , H01L29/10 , H01L21/8234 , H01L21/8238 , H01L29/78 , H01L21/02 , H01L27/092
Abstract: A semiconductor device includes a well region in a substrate, a semiconductor pattern on the well region, the semiconductor pattern including an impurity, and a gate electrode on the semiconductor pattern. A concentration of the impurity in the semiconductor pattern increases in a direction from an upper portion of the semiconductor pattern, adjacent to the gate electrode, to a lower portion of the semiconductor pattern, adjacent to the well region.