Method for detecting defect in pattern
    22.
    发明授权
    Method for detecting defect in pattern 有权
    检测图案缺陷的方法

    公开(公告)号:US09542740B2

    公开(公告)日:2017-01-10

    申请号:US14331899

    申请日:2014-07-15

    CPC classification number: G06T7/001 G06T2207/10061 G06T2207/30148

    Abstract: Provided is a method of detecting a defect of a pattern using vectorization to increase accuracy and efficiency in OPC modeling and OPC verification. The method includes acquiring a target layout image associated with a target pattern, acquiring a pattern image associated with a pattern formed on a substrate, extracting an edge image from the pattern image, producing a first vector form based on the target layout image, producing a second vector form based on the edge image, and comparing the first vector form with the second vector form.

    Abstract translation: 提供了一种使用向量化来检测图案的缺陷以提高OPC建模和OPC验证中的精度和效率的方法。 该方法包括获取与目标图案相关联的目标布局图像,获取与形成在基板上的图案相关联的图案图像,从图案图像中提取边缘图像,基于目标布局图像产生第一矢量形状, 基于边缘图像的第二矢量形式,并且将第一矢量形式与第二矢量形式进行比较。

    Apparatus and method for transmitting wireless power by using resonant coupling and system for the same
    23.
    发明授权
    Apparatus and method for transmitting wireless power by using resonant coupling and system for the same 有权
    通过使用谐振耦合和系统来发射无线电力的装置和方法

    公开(公告)号:US09496731B2

    公开(公告)日:2016-11-15

    申请号:US13747079

    申请日:2013-01-22

    Abstract: Disclosed are an apparatus and a method for charging power using a resonant coupling. The apparatus includes a transmission power converter for converting Direct Current (DC) power to Alternating Current (AC) power, a controller for adjusting a Q factor of a transmission resonator by using a frequency of the converted AC power and a resonant frequency of the transmission resonator and controlling adaptive impedance matching, and a transmission resonator for wirelessly transmitting the converted AC power to a receiver through the adjusted Q factor and the controlled adaptive impedance matching, the transmission resonator having a coil installed in the transmitter.

    Abstract translation: 公开了一种使用谐振耦合器对功率进行充电的装置和方法。 该装置包括用于将直流(DC)功率转换为交流(AC)功率的发送功率转换器,用于通过使用转换的AC功率的频率和发送的谐振频率来调整发送谐振器的Q因子的控制器 谐振器和控制自适应阻抗匹配;以及发射谐振器,用于通过经调整的Q因子和受控的自适应阻抗匹配将转换的AC电力无线传输到接收机,所述发射谐振器具有安装在发射机中的线圈。

    PORTABLE TERMINAL HAVING WIRELESS CHARGING MODULE
    25.
    发明申请
    PORTABLE TERMINAL HAVING WIRELESS CHARGING MODULE 有权
    便携式终端有无线充电模块

    公开(公告)号:US20140159657A1

    公开(公告)日:2014-06-12

    申请号:US14234912

    申请日:2012-09-19

    Abstract: A portable terminal is provided, including a cover member which is detachably provided at a rear surface of a main body of a terminal, a resonant antenna for a reception unit provided inside of the cover member, a reception circuit unit provided inside of the main body, and a connection unit for connecting the resonant antenna for a reception unit with the reception circuit unit. The portable terminal efficiently receives the signal power provided from a charger by arranging the resonant antenna inside of the cover member, and minimizes the thickness of the portable terminal by providing the reception circuit unit inside of the main body of the terminal.

    Abstract translation: 提供一种便携式终端,包括可拆卸地设置在终端主体的后表面的盖构件,设置在盖构件内部的用于接收单元的谐振天线,设置在主体内部的接收电路单元 以及用于将接收单元的谐振天线与接收电路单元连接的连接单元。 便携式终端通过将谐振天线布置在盖构件内部而有效地接收从充电器提供的信号功率,并且通过在终端的主体内设置接收电路单元来最小化便携式终端的厚度。

    Atomic layer deposition apparatus
    26.
    发明授权
    Atomic layer deposition apparatus 有权
    原子层沉积装置

    公开(公告)号:US08546270B2

    公开(公告)日:2013-10-01

    申请号:US13780560

    申请日:2013-02-28

    CPC classification number: H01L21/30 C23C16/45546 C23C16/45551 C23C16/45578

    Abstract: An atomic layer deposition apparatus and an atomic layer deposition method increase productivity. The atomic layer deposition apparatus includes a reaction chamber, a heater for supporting a plurality of semiconductor substrates with a given interval within the reaction chamber and to heat the plurality of semiconductor substrates and a plurality of injectors respectively positioned within the reaction chamber and corresponding to the plurality of semiconductor substrates supported by the heater. The plurality of injectors are individually swept above the plurality of semiconductor substrates to spray reaction gas.

    Abstract translation: 原子层沉积装置和原子层沉积方法提高了生产率。 原子层沉积装置包括反应室,用于在反应室内以给定间隔支撑多个半导体衬底并加热多个半导体衬底的加热器和分别位于反应室内并对应于多个半导体衬底的多个注射器 由加热器支撑的多个半导体基板。 多个喷射器分别扫过多个半导体基板上方喷射反应气体。

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