公开(公告)号：US6118518A

公开(公告)日：2000-09-12

申请号：US256535

申请日：1999-02-24

Applicant: Philip C. D. Hobbs

Inventor： Philip C. D. Hobbs

IPC: G01B9/02 ,  G01B11/00 ,  G01S17/08 ,  G01S17/87 ,  G01S17/89

CPC classification number: G01S17/08 ,  G01B11/00 ,  G01B9/02003 ,  G01B9/02004 ,  G01S17/89 ,  G01B2290/45 ,  G01B2290/65 ,  G01B2290/70 ,  G01S17/87

Abstract: An assembly comprising a 3-D scanner and suitable for capturing at least one of objects, or textures, or documents. The assembly preferably can be developed as a pocket page scanner having dimensions approximately the size of a chalkboard eraser. The assembly preferably utilizes an alignment-insensitive diode laser interferometer. In operation, the assembly enables a user to scan any page-sized area in e.g., a half of second, store a hundred or so of them, then play them back into a PC infrared port for OCR, printing, archival storage, or further processing.

Abstract translation: 一种包括3-D扫描器并且适于捕获至少一个对象或纹理或文档的组件。 该组件优选地可以被开发成具有大约为黑板橡皮擦尺寸的尺寸的口袋式扫描器。 组件优选地使用对准不敏感的二极管激光干涉仪。 在操作中，组件使得用户可以扫描例如二分之一秒的任何页面大小的区域，存储其中的一百个，然后将其回放到用于OCR，打印，归档存储或更进一步的PC红外端口 处理。

公开(公告)号：US5432670A

公开(公告)日：1995-07-11

申请号：US166509

申请日：1993-12-13

Applicant: John S. Batchelder ,  Vaughn P. Gross ,  Robert A. Gruver ,  Philip C. D. Hobbs ,  Kenneth D. Murray

Inventor： John S. Batchelder ,  Vaughn P. Gross ,  Robert A. Gruver ,  Philip C. D. Hobbs ,  Kenneth D. Murray

IPC: B01J19/00 ,  B01J19/12 ,  H01L21/00 ,  H01L21/304 ,  H05F3/06

CPC classification number: H01L21/67028 ,  H05F3/06 ,  Y10S430/138 ,  Y10S438/909

Abstract: Ionization of air without the use of corona discharge tips, thereby to avoid the generation of particulates from corrosion of the corona tips, is accomplished by use of a laser beam focussed to a small focal volume of intense electric field adjacent a semiconductor chip. The electric field is sufficiently intense to ionize air. In the manufacture of a semiconductor circuit chip, during those steps which are conducted in an air environment, opportunity exists to remove from a surface of a chip, or wafer, charge acquired during the manufacturing process. The ionized air is passed along the chip surface. Ions in the air discharge local regions of the chip surface which have become charged by steps of a manufacturing process. By way of further embodiment of the invention, the ionization may be produced by injection of molecules of water into the air, which molecules are subsequently ionized by a laser beam and directed toward the chip via a light shield with the aid of a magnetic field.

Abstract translation: 通过使用聚焦于与半导体芯片相邻的强电场的小焦点体积的激光束来实现空气的离子化，而不使用电晕放电尖端，从而避免由于电晕尖端的腐蚀而产生微粒。 电场足够强以使空气电离。 在半导体电路芯片的制造中，在空气环境中进行的那些步骤中，存在从制造过程中获取的芯片或晶片的表面去除电荷的机会。 电离空气沿芯片表面通过。 芯片表面的空气放电局部区域中的离子通过制造过程的步骤而被充电。 通过本发明的进一步的实施方式，电离可以通过将水分子注入到空气中来产生，该分子随后通过激光束被电离，并借助于磁场通过光屏指向芯片。

公开(公告)号：US5192870A

公开(公告)日：1993-03-09

申请号：US820709

申请日：1992-01-14

Applicant: John S. Batchelder ,  Donald M. DeCain ,  Philip C. D. Hobbs

Inventor： John S. Batchelder ,  Donald M. DeCain ,  Philip C. D. Hobbs

IPC: G01N15/10 ,  G01N15/02 ,  G01N15/14 ,  G01N21/21 ,  G01N21/47 ,  G01N21/94

CPC classification number: G01N15/0205 ,  G01N21/94 ,  G01N15/1434 ,  G01N2015/0238 ,  G01N2015/145

Abstract: A particle detector that determines the presence of particles in an enclosed volume includes a laser that directs a coherent optical beam to a beam splitter that produces first and second divergent beams. An optical system images the point of origin of the two divergent beams within the beam splitter into the enclosed volume, whereby the first and second beams are caused to intersect and interfere at an inspection region within the volume. A detector is positioned adjacent the volume and is responsive to light scattered from one of the beams, as a result of a particle passing through the inspection region, to produce an electrical signal indicative of the intensity of the scattered light. A signal processor analyzes the electrical signals and to determine the presence of the particle. An embodiment of the invention includes an acousto-optic modulator to enable one of the beams to be frequency shifted from the other beam so as to enable the presence of a carrier signal on which a particle's Doppler frequency is modulated. Another embodiment relies upon the Doppler modulation of a reflected optical beam to create an interference pattern at a detector.

公开(公告)号：US5116583A

公开(公告)日：1992-05-26

申请号：US696308

申请日：1991-04-29

Applicant: John S. Batchelder ,  Vaughn P. Gross ,  Philip C. D. Hobbs ,  Robert J. Miller ,  Kenneth D. Murray

Inventor： John S. Batchelder ,  Vaughn P. Gross ,  Philip C. D. Hobbs ,  Robert J. Miller ,  Kenneth D. Murray

IPC: H01T23/00

CPC classification number: H01T23/00

Abstract: A clean non-hydrogen-containing dry gas flows through the corona points of a clean room corona air ionizer in order to suppress the generation of particles.

Abstract translation: 清洁的不含氢的干燥气体流过洁净室电晕空气离子发生器的电晕点，以抑制颗粒的产生。