公开(公告)号：US20220107458A1

公开(公告)日：2022-04-07

申请号：US17554342

申请日：2021-12-17

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Gregory Alan Fish ,  Martin A. Spannagel ,  Antonio Labaro

IPC: G02B6/122 ,  H01L21/762 ,  H01L21/02 ,  H01L21/306 ,  G02B6/132 ,  G02B6/136

Abstract: Methods and systems are presented for heterogeneous integration of photonics and electronics with atomic layer deposition (ALD) bonding. One method includes operations for forming a compound semiconductor and for depositing (e.g., via atomic layer deposition) a continuous film of a protection material (e.g., Al2O3) on a first surface of the compound semiconductor. Further, the method includes an operation for forming a silicon on insulator (SOI) wafer, with the SOI wafer comprising one or more waveguides. The method further includes bonding the compound semiconductor at the first surface to the SOI wafer to form a bonded structure and processing the bonded structure. The protection material protects the compound semiconductor from acid etchants during further processing of the bonded structure.

公开(公告)号：US20210227723A1

公开(公告)日：2021-07-22

申请号：US17221373

申请日：2021-04-02

Applicant: Juniper Networks, Inc.

Inventor： Roberto Marcoccia ,  Brian Robert Koch ,  Theodore J. Schmidt ,  Christopher Paul Wyland ,  Robert S. Guzzon ,  Gregory Alan Fish

IPC: H05K7/20 ,  F28D15/02 ,  F28D15/06

Abstract: Photonic and electronic integrated circuits can be cooled using variable conductance heat pipes containing a non-condensable gas in addition to a phase-changing working fluid. To package the heat pipe with a subassembly including the integrated circuits in a standard housing providing a heat sink contact area, the heat pipe is oriented, in some embodiments, with its axis between evaporator and condenser ends substantially perpendicular to the direction along which the integrated circuit subassembly is separated from the heat sink contact area, and a portion of the exterior surface of the heat pipe is thermally insulated, with a suitable thermal insulation structure, from the heat sink contact area.

公开(公告)号：US20200252126A1

公开(公告)日：2020-08-06

申请号：US16854012

申请日：2020-04-21

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Brian Robert Koch ,  Gregory Alan Fish ,  Hyundai Park

IPC: H04B10/077 ,  H01L31/0352 ,  H01L31/0232 ,  H01L31/105 ,  G02B6/12 ,  H01L31/0224 ,  H01L31/0304

Abstract: Photonically integrated normal incidence photodetectors (NIPDs) and associated in-plane waveguide structures optically coupled to the NIPDs can be configured to allow for both in-plane and normal-incidence detection. In photonic circuits with light-generation capabilities, such as integrated optical transceivers, the ability of the NIPDs to detect in-plane light is used, in accordance with some embodiments, to provide self-test functionality.

公开(公告)号：US10666353B1

公开(公告)日：2020-05-26

申请号：US16197041

申请日：2018-11-20

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Brian Robert Koch ,  Gregory Alan Fish ,  Hyundai Park

IPC: H04B10/077 ,  H01L31/0224 ,  H01L31/0304 ,  H01L31/105 ,  H01L31/0352 ,  G02B6/12 ,  H01L31/0232 ,  H04B10/40

Abstract: Photonically integrated normal incidence photodetectors (NIPDs) and associated in-plane waveguide structures optically coupled to the NIPDs can be configured to allow for both in-plane and normal-incidence detection. In photonic circuits with light-generation capabilities, such as integrated optical transceivers, the ability of the NIPDs to detect in-plane light is used, in accordance with some embodiments, to provide self-test functionality.

公开(公告)号：US20200162156A1

公开(公告)日：2020-05-21

申请号：US16197041

申请日：2018-11-20

Applicant: Juniper Networks, Inc

Inventor： John Parker ,  Brian Robert Koch ,  Gregory Alan Fish ,  Hyundai Park

IPC: H04B10/077 ,  H01L31/0232 ,  H01L31/0224 ,  H01L31/0304 ,  H01L31/105 ,  H01L31/0352 ,  G02B6/12

Abstract: Photonically integrated normal incidence photodetectors (NIPDs) and associated in-plane waveguide structures optically coupled to the NIPDs can be configured to allow for both in-plane and normal-incidence detection. In photonic circuits with light-generation capabilities, such as integrated optical transceivers, the ability of the NIPDs to detect in-plane light is used, in accordance with some embodiments, to provide self-test functionality.

公开(公告)号：US10168475B2

公开(公告)日：2019-01-01

申请号：US15408725

申请日：2017-01-18

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Gregory Alan Fish ,  Martin A. Spannagel ,  Antonio Labaro

IPC: G02B6/122 ,  G02B6/136 ,  H01L21/762 ,  H01L21/02 ,  H01L21/306 ,  G02B6/132

Abstract: Methods and systems are presented for heterogeneous integration of photonics and electronics with atomic layer deposition (ALD) bonding. One method includes operations for forming a compound semiconductor and for depositing (e.g., via atomic layer deposition) a continuous film of a protection material (e.g., Al2O3) on a first surface of the compound semiconductor. Further, the method includes an operation for forming a silicon on insulator (SOI) wafer, with the SOI wafer comprising one or more waveguides. The method further includes bonding the compound semiconductor at the first surface to the SOI wafer to form a bonded structure and processing the bonded structure. The protection material protects the compound semiconductor from acid etchants during further processing of the bonded structure.

公开(公告)号：US10128634B2

公开(公告)日：2018-11-13

申请号：US15689352

申请日：2017-08-29

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Jared Bauters ,  Jonathan Edgar Roth ,  Erik Norberg ,  Gregory Alan Fish

IPC: H01S5/068 ,  G02B6/293 ,  H01S5/0687 ,  H01S5/06

Abstract: Described are various configurations of integrated wavelength lockers including asymmetric Mach-Zehnder interferometers (AMZIs) and associated detectors. Various embodiments provide improved wavelength-locking accuracy by using an active tuning element in the AMZI to achieve an operational position with high locking sensitivity, a coherent receiver to reduce the frequency-dependence of the locking sensitivity, and/or a temperature sensor and/or strain gauge to computationally correct for the effect of temperature or strain changes.

公开(公告)号：US09964703B2

公开(公告)日：2018-05-08

申请号：US15689319

申请日：2017-08-29

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Jared Bauters ,  Jonathan Edgar Roth ,  Erik Norberg ,  Gregory Alan Fish

IPC: G02B6/12 ,  H01S5/026 ,  H04B10/25 ,  H01S3/067

CPC classification number: G02B6/12019 ,  G01J9/0246 ,  G02B6/12004 ,  H01S3/06754 ,  H01S5/0078 ,  H01S5/0085 ,  H01S5/021 ,  H01S5/0265 ,  H01S5/0268 ,  H01S5/0687 ,  H04B10/25 ,  H04B10/572

Abstract: Described are various configurations of integrated wavelength lockers including asymmetric Mach-Zehnder interferometers (AMZIs) and associated detectors. Various embodiments provide improved wavelength-locking accuracy by using an active tuning element in the AMZI to achieve an operational position with high locking sensitivity, a coherent receiver to reduce the frequency-dependence of the locking sensitivity, and/or a temperature sensor and/or strain gauge to computationally correct for the effect of temperature or strain changes.

公开(公告)号：US20180102628A1

公开(公告)日：2018-04-12

申请号：US15689352

申请日：2017-08-29

Applicant: Juniper Networks, Inc.

Inventor： John Parker ,  Jared Bauters ,  Jonathan Edgar Roth ,  Erik Norberg ,  Gregory Alan Fish

IPC: H01S5/0687 ,  H01S5/06 ,  G02B6/293

CPC classification number: H01S5/06804 ,  G01J3/02 ,  G01J9/0246 ,  G02B6/29353 ,  G02B6/29395 ,  G02B6/29398 ,  H01S5/0607 ,  H01S5/0612 ,  H01S5/0617 ,  H01S5/0687

Abstract: Described are various configurations of integrated wavelength lockers including asymmetric Mach-Zehnder interferometers (AMZIs) and associated detectors. Various embodiments provide improved wavelength-locking accuracy by using an active tuning element in the AMZI to achieve an operational position with high locking sensitivity, a coherent receiver to reduce the frequency-dependence of the locking sensitivity, and/or a temperature sensor and/or strain gauge to computationally correct for the effect of temperature or strain changes.

公开(公告)号：US09685763B1

公开(公告)日：2017-06-20

申请号：US15219515

申请日：2016-07-26

Applicant: Juniper Networks, Inc.

Inventor： Erik Norberg ,  Brian R. Koch ,  Gregory Alan Fish

IPC: H04J14/02 ,  H01S5/10 ,  H04B10/25 ,  H04B10/66 ,  H01S5/042 ,  H01S5/02 ,  H01S5/50

CPC classification number: H01S5/1028 ,  H01S5/021 ,  H01S5/026 ,  H01S5/0425 ,  H01S5/1014 ,  H01S5/1032 ,  H01S5/50 ,  H01S5/5027 ,  H04B10/25 ,  H04B10/66 ,  H04J14/02

Abstract: Described herein are methods, systems, and apparatuses to utilize a semiconductor optical amplifier (SOA) comprising a silicon layer including a silicon waveguide, a non-silicon layer disposed on the silicon layer and including a non-silicon waveguide, first and second mode transition region comprising tapers in the silicon waveguide and/or the non-silicon waveguide for exchanging light between the waveguide, and a plurality of regions disposed between the first and second mode transition regions comprising different cross-sectional areas of the silicon waveguide and the non-silicon waveguide such that confinement factors for the non-silicon waveguide in each of the plurality of regions differ.