公开(公告)号：US11428827B2

公开(公告)日：2022-08-30

申请号：US17320241

申请日：2021-05-14

Applicant: FUJIFILM CORPORATION

Inventor： Shinichi Ushikura ,  Munetaka Kato ,  Keiichi Akamatsu ,  Haruyasu Nakatsugawa

IPC: H01L31/115 ,  G01T1/29 ,  G01T1/161

Abstract: Provided are a radiation detector, a radiographic imaging apparatus, and a manufacturing method that include a TFT substrate in which a plurality of pixels that accumulate electric charges generated depending on light converted from radiation are formed in a pixel region of a first surface of a flexible base material and a terminal region of the first surface is provided with a terminal for electrically connecting a flexible cable; a conversion layer that is provided outside the terminal region on the first surface of the base material to convert the radiation into light; a first reinforcing substrate that is provided on a surface of the conversion layer opposite to a surface on a TFT substrate side and has a higher stiffness than the base material; and a second reinforcing substrate that is provided on a second surface of the base material opposite to the first surface to cover a surface larger than the first reinforcing substrate, and that are capable of suppressing that a defect occurs in the substrate and have an excellent peeling property in a reworking process.