公开(公告)号：US20230146877A1

公开(公告)日：2023-05-11

申请号：US18093717

申请日：2023-01-05

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian UEBEL ,  Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GÖTZ

IPC: G02F1/35 ,  G02F1/365

CPC classification number: G02F1/353 ,  G02F1/3501 ,  G02F1/365 ,  G02F1/3503 ,  G02F1/3528

Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.

公开(公告)号：US20220011644A1

公开(公告)日：2022-01-13

申请号：US17485836

申请日：2021-09-27

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian UEBEL ,  Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz

IPC: G02F1/35 ,  G02F1/365

Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.

公开(公告)号：US20210215872A1

公开(公告)日：2021-07-15

申请号：US17128360

申请日：2020-12-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Hendrik SABERT ,  Patrick Sebastian UEBEL ,  Willem Richard PONGERS

IPC: G02B6/02

Abstract: A hollow-core photonic crystal fiber (HC-PCF) assembly for converting input radiation to broadband radiation, the hollow core fiber assembly including: a micro-structured fiber with a hollow core extending along a length of the fiber from an input end configured to receive input radiation to an output end configured to output broadband radiation, wherein the hollow core of the fiber is configured to include a medium; and a density control system configured to control a density profile of the medium along at least a part of the length of the fiber to establish a desired zero dispersion wavelength profile along at least a part of the length of the fiber.

公开(公告)号：US20210063894A1

公开(公告)日：2021-03-04

申请号：US17004140

申请日：2020-08-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Sebastian Thomas BAUERSCHMIDT ,  Peter Maximilian GÖTZ ,  Patrick Sebastian UEBEL ,  Ronald Franciscus Herman HUGERS ,  Jan Adrianus BOER ,  Edwin Johannes Cornelis BOS ,  Andreas Johannes Antonius BROUNS ,  Vitaliy PROSYENTSOV ,  Paul William SCHOLTES - VAN EIJK ,  Paulus Antonius Andreas TEUNISSEN ,  Mahesh Upendra AJGAONKAR

IPC: G03F7/20 ,  G02B1/00 ,  G02B6/02 ,  G01M11/00 ,  G01B11/27 ,  G01J1/42

Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.

公开(公告)号：US20210026255A1

公开(公告)日：2021-01-28

申请号：US16932184

申请日：2020-07-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Patrick Sebastian UEBEL ,  Sebastian Thomas Bauerschmidt ,  Yongfeng Ni

IPC: G03F7/20

Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.