公开(公告)号：US20220137482A1

公开(公告)日：2022-05-05

申请号：US17575730

申请日：2022-01-14

Applicant: ASML NETHERLANDS B.V.

Inventor： Yongfeng Ni

IPC: G02F1/35 ,  G02F1/365 ,  G02F1/355

Abstract: Radiation source assemblies and methods for generating broadened radiation by spectral broadening. A radiation source assembly includes a pump source configured to emit modulated pump radiation at one or more wavelengths. The assembly further has an optical fiber configured to receive the modulated pump radiation emitted by the pump source, the optical fiber including a hollow core extending along at least part of a length of the fiber. The hollow core is configured to guide the received radiation during propagation through the fiber. The radiation emitted by the pump source includes first radiation at a pump wavelength, and the pump source is configured to modulate the first radiation for stimulating spectral broadening in the optical fiber.

公开(公告)号：US20210026255A1

公开(公告)日：2021-01-28

申请号：US16932184

申请日：2020-07-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Patrick Sebastian UEBEL ,  Sebastian Thomas Bauerschmidt ,  Yongfeng Ni

IPC: G03F7/20

Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.

公开(公告)号：US12130538B2

公开(公告)日：2024-10-29

申请号：US17575730

申请日：2022-01-14

Applicant: ASML NETHERLANDS B.V.

Inventor： Yongfeng Ni

IPC: G02F1/35 ,  G02F1/355 ,  G02F1/365

CPC classification number: G02F1/3501 ,  G02F1/3536 ,  G02F1/3551 ,  G02F1/365 ,  G02F2202/32

Abstract: Radiation source assemblies and methods for generating broadened radiation by spectral broadening. A radiation source assembly includes a pump source configured to emit modulated pump radiation at one or more wavelengths. The assembly further has an optical fiber configured to receive the modulated pump radiation emitted by the pump source, the optical fiber including a hollow core extending along at least part of a length of the fiber. The hollow core is configured to guide the received radiation during propagation through the fiber. The radiation emitted by the pump source includes first radiation at a pump wavelength, and the pump source is configured to modulate the first radiation for stimulating spectral broadening in the optical fiber.

公开(公告)号：US11619887B2

公开(公告)日：2023-04-04

申请号：US16995993

申请日：2020-08-18

Applicant: ASML NETHERLANDS B.V.

Inventor： Yongfeng Ni ,  Ronald Franciscus Herman Hugers ,  Andreas Johannes Antonius Brouns

IPC: G03F9/00 ,  G03F7/20 ,  G02B7/02 ,  G02B27/30

Abstract: An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.

公开(公告)号：US11226535B2

公开(公告)日：2022-01-18

申请号：US17019972

申请日：2020-09-14

Applicant: ASML NETHERLANDS B.V.

Inventor： Yongfeng Ni

IPC: G02F1/35 ,  G02F1/365 ,  G02F1/355

Abstract: Radiation source assemblies and methods for generating broadened radiation by spectral broadening. A radiation source assembly includes a pump source configured to emit modulated pump radiation at one or more wavelengths. The assembly further has an optical fiber configured to receive the modulated pump radiation emitted by the pump source, the optical fiber including a hollow core extending along at least part of a length of the fiber. The hollow core is configured to guide the received radiation during propagation through the fiber. The radiation emitted by the pump source includes first radiation at a pump wavelength, and the pump source is configured to modulate the first radiation for stimulating spectral broadening in the optical fiber.

公开(公告)号：US20190103721A1

公开(公告)日：2019-04-04

申请号：US16143018

申请日：2018-09-26

Applicant: ASML Netherlands B.V.

Inventor： Yongfeng Ni

IPC: H01S3/067 ,  H01S3/10 ,  H01S3/094 ,  G02F1/365

Abstract: A supercontinuum radiation source comprises: a radiation source, an optical amplifier and a non-linear optical medium. The radiation source is operable to produce a pulsed radiation beam. The optical amplifier is configured to receive the pulsed radiation beam and increase an intensity of the pulsed radiation beam. The non-linear optical medium is configured to receive the amplified pulsed radiation beam and to broaden its spectrum so as to generate a supercontinuum radiation beam. The optical amplifier may supply a pump radiation beam to a gain medium, an intensity of the pump radiation beam being periodic and having a pump frequency that is an integer multiple of the frequency of the pulsed radiation beam. The optical amplifier may supply pump energy to a gain medium only when the pulses of the pulsed radiation beam propagate through the gain medium.

公开(公告)号：US12050409B2

公开(公告)日：2024-07-30

申请号：US18116218

申请日：2023-03-01

Applicant: ASML NETHERLANDS B.V.

Inventor： Yongfeng Ni ,  Ronald Franciscus Herman Hugers ,  Andreas Johannes Antonius Brouns

IPC: G03F9/00 ,  G02B3/00 ,  G02B7/02 ,  G02B27/30 ,  G03F7/00 ,  G01N21/95

CPC classification number: G03F9/7026 ,  G02B3/00 ,  G02B7/023 ,  G02B7/026 ,  G02B27/30 ,  G03F7/7015 ,  G03F7/70625 ,  G03F7/7065 ,  G01N21/9501 ,  G01N2201/0633 ,  G02B2003/0093 ,  G03F7/70566

Abstract: An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.

公开(公告)号：US11886096B2

公开(公告)日：2024-01-30

申请号：US17909223

申请日：2021-02-24

Applicant: ASML NETHERLANDS B.V.

Inventor： Vitaliy Prosyentsov ,  Yongfeng Ni

IPC: G02F1/35 ,  G02F1/365 ,  G03F7/00

CPC classification number: G02F1/3503 ,  G02F1/365 ,  G03F7/7015 ,  G02F2201/34 ,  G02F2202/32

Abstract: An assembly including a non-linear element configured for generating broadband radiation from input radiation coupled into the non-linear element. The assembly further includes an optical element positioned downstream of the non-linear element configured to reflect a fraction of the broadband radiation back into the non-linear element. The non-linear element can be a nonlinear fiber, such as a hollow-core photonic crystal fiber (HC-PCF).

公开(公告)号：US11237486B2

公开(公告)日：2022-02-01

申请号：US16932184

申请日：2020-07-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Patrick Sebastian Uebel ,  Sebastian Thomas Bauerschmidt ,  Yongfeng Ni

IPC: G03F7/20 ,  G02B6/02 ,  G02F1/365 ,  G02F1/35 ,  G03F9/00

Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.

公开(公告)号：US10811836B2

公开(公告)日：2020-10-20

申请号：US16441864

申请日：2019-06-14

Applicant: ASML Netherlands B.V.

Inventor： Yongfeng Ni

IPC: H01S3/067 ,  G03F7/20 ,  G03F9/00 ,  H01S3/131 ,  G02F1/365 ,  H01S3/094 ,  H01S3/00 ,  G02F1/35

Abstract: A supercontinuum radiation source comprises: a radiation source, an optical amplifier and a non-linear optical medium. The radiation source is operable to produce a pulsed radiation beam. The optical amplifier is configured to receive the pulsed radiation beam and increase an intensity of the pulsed radiation beam. The non-linear optical medium is configured to receive the amplified pulsed radiation beam and to broaden its spectrum so as to generate a supercontinuum radiation beam. The optical amplifier may supply a pump radiation beam to a gain medium, an intensity of the pump radiation beam being periodic and having a pump frequency that is an integer multiple of the frequency of the pulsed radiation beam. The optical amplifier may supply pump energy to a gain medium only when the pulses of the pulsed radiation beam propagate through the gain medium.