公开(公告)号：US06473288B2

公开(公告)日：2002-10-29

申请号：US09862297

申请日：2001-05-23

申请人： Takeshi Shima ,  Tadao Matsunaga ,  Mitsuaki Horiike ,  Toshiyuki Yamamoto

发明人： Takeshi Shima ,  Tadao Matsunaga ,  Mitsuaki Horiike ,  Toshiyuki Yamamoto

IPC分类号： H02N1300

CPC分类号： C09J7/22 ,  C09J7/35 ,  C09J2201/128 ,  C09J2461/00 ,  C09J2463/00 ,  C09J2479/08 ,  C09J2483/006 ,  H01L21/6831 ,  Y10T279/23 ,  Y10T428/2804 ,  Y10T428/2848 ,  Y10T428/2887

摘要： The present invention provide an adhesive sheet for electrostatic chucking device having high heat resistance and to an electrostatic chucking device which causes little curvature of the ceramic board after application of heat and is excellent in heat resistance and adsorptity. The adhesive sheet of the present invention comprises a silicone resin elastic layer 11 and thermosetting adhesive layers 12 and 13 which are each laminated on the silicone resin elastic layer, wherein said thermosetting adhesive layers are composed of epoxy resin or phenol resin. The electrostatic chucking device of the present invention is produced by laminating an electrode and a ceramic layer having an adsorptive surface on a metal base in this order via the adhesive sheet of the present invention.

摘要翻译： 本发明提供了一种具有高耐热性的静电吸附装置用粘合片和一种在施加热量后陶瓷板几乎没有弯曲并且耐热性和吸附性优异的静电吸附装置。 本发明的粘合片包含层叠在有机硅树脂弹性层上的有机硅树脂弹性层11和热固性粘合层12,13，其中所述热固性粘合剂层由环氧树脂或酚醛树脂构成。 本发明的静电吸附装置是通过本发明的粘合片将电极和具有吸附表面的陶瓷层依次层叠在金属基底上而制成的。