Abstract:
A charge-dissipation structure is formed within the dielectric of an electrostatically driven device, such as a micro-electro-mechanical systems (“MEMS”) device, by ion implantation. Electrical and other properties of the charge-dissipation structure may be controlled by selection of the species, energy, and dose of implanted ions. With appropriate properties, such a charge-dissipation structure can reduce the effect on device operation of mobile charges in or on the dielectric.
Abstract:
In one embodiment, an electrode is disposed on a surface of a first portion of the dielectric, with the first portion and the electrode forming an electrode region of the device. A charge-dissipation structure is then formed by implanting ions into the electrode region and a second portion of the dielectric located outside of the electrode region. In another embodiment, a charge-dissipation structure is formed by implanting ions into the dielectric of a movable part of an electromechanical system. Advantageously, ion implantation can be performed without masking, lithography, or elevated temperatures; the electrical properties of the resulting charge dissipation structure can be controlled relatively easily; and portions of the charge dissipation structure are protected from oxidation and/or corrosion by the dielectric material.
Abstract:
In accordance with the invention, a high density recording medium is fabricated by novel methods. The medium comprises an array of nanomagnets disposed within a matrix or on the surface of substrate material. The nanomagnets are advantageously substantially perpendicular to a planar surface. The nanomagnets are preferably nanowires of high coercivity magnetic material inside a porous matrix or an array of vertically aligned nanotubes, or on the surface of flat substrate. Such media can provide ultra-high density recording with bit size less than 50 nm and even less than 20 nm. A variety of techniques are described for making such media.
Abstract:
A method for fabricating a reactive solder or braze includes forming a metallic matrix with an interior region and surface regions by actively providing a higher concentration of reactive atoms to the interior region than to the surface regions.
Abstract:
In accordance with the invention, an electron beam source for exposing selected portions of a surface to electrons comprises a plurality of nanoscale electron emitters and, associated with each electron emitter, a directional control element to direct the emitter toward a selected portion of the surface. In a preferred embodiment, the emitters are nanotubes or nanowires mounted on electrostatically controlled MEMS directional control elements. An alternative embodiment uses electrode directional control elements.
Abstract:
A mirror, or an array of mirrors, for use in a micro-electro-mechanical system (MEMS) optical device. The mirror includes a mirror substrate having a loss-reducing layer located over a first or second side thereof, and a light reflective optical layer located over the loss-reducing layer. The inventive mirror reduces undesirable Fabry-Perot interferrometric optical loss through minimizing the extent of multiple reflections within the MEMS mirror substrate.
Abstract:
The present invention provides a micro-electro-mechanical system (MEMS) optical device. The micro-electro-mechanical system (MEMS) optical device includes a mirror having a substrate with an implanted light reflective optical layer thereover, and a mounting substrate on which the mirror is movably mounted. The inclusion of the dopant within the light reflective optical layer increases the tensile stress of the device and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration.
Abstract:
In accordance with the invention, a MEMs mirror device comprises a mirror layer including a frame structure and at least one mirror movably coupled to the frame and an actuator layer including at least one conductive path and at least one electrode for moving the mirror. The mirror layer and the actuator layer are provided with metallization pads and are bonded together in lateral alignment and with predetermined vertical gap spacing by solder bonds between the pads. The device has utility in optical cross connection, variable attenuation and power gain equalization.
Abstract:
The invention provides an article comprising a solder that bonds well to oxides and other surfaces to which solder bonding is problematic. The solder composition contains one or more rare earth elements, which react with the oxide or other surface to promote bonding, and further contains sufficient Au and/or Ag to act as carriers for the rare earths. Because rare earths have some solid solubility in Au and Ag, the problem of intermetallic formation is lessened or eliminated, and improved bonding to oxide surfaces is attained.
Abstract:
An article comprising an alloy exhibiting high magnetostriction in relatively low applied magnetic fields is provided, the alloy capable of being formed in a relatively easy manner and having desirable physical properties. The Co—Fe alloy of the invention exhibits a magnetostriction of at least 100×10−6 in a magnetic field less than 400 Oe, advantageously in a magnetic field less than 100 Oe. The alloy is formed by plastically deforming the alloy, e.g., by cold rolling, to a reduction in cross-sectional area of at least 50%, and then heat treating the alloy to induce recrystallization. This combination of plastic deformation and recrystallization was found to provide desirable grain growth and microstructure. The resultant alloy is useful in a variety of device components, including transducers, frequency filters, signal delay lines, and optical fiber grating devices.