公开(公告)号：US20170157647A1

公开(公告)日：2017-06-08

申请号：US15324140

申请日：2015-07-09

申请人： SEIKO EPSON CORPORATION

发明人： Chikara KOJIMA

IPC分类号： B06B1/06 ,  H01L41/29 ,  H01L41/31 ,  A61B8/00

摘要： An ultrasound sensor includes: a diaphragm; a plurality of first electrodes; a plurality of second electrodes; and a plurality of piezoelectric layers which is provided between the first electrode and the second electrode, in which, in a Z-direction, a portion in which the first electrode, the piezoelectric layer and the second electrode are overlapped is referred to as an active portion, and a range to the extent that the diaphragm is oscillatable by driving the active portion is referred to as a movable portion, when a unit including one movable portion and the active portion which is provided within the one movable portion is referred to as one ultrasound element in plan view, two or more types of ultrasound elements in which a dimension of the active portion with respect to a dimension of the movable portion is different from each other in plan view are provided.

公开(公告)号：US20160172577A1

公开(公告)日：2016-06-16

申请号：US14693833

申请日：2015-04-22

申请人： NATIONAL TSING HUA UNIVERSITY

发明人： Chien-Chong Hong ,  Kuan-Wen Chen

IPC分类号： H01L41/257 ,  H01L41/31

CPC分类号： H01L41/331 ,  H01L41/047 ,  H01L41/0973 ,  H01L41/317

摘要： A method for fabricating a piezoelectric transducer is provided. The method includes providing a substrate on which a plurality of patterned electrodes are formed; providing a piezoelectric suspension, having a plurality of piezoelectric particles, on the substrate and the plurality of patterned electrodes; applying a voltage between the plurality of patterned electrodes to produce an electric field; and depositing the plurality of piezoelectric particles of the piezoelectric suspension on at least one of the plurality of patterned electrodes by the electric field to form a patterned piezoelectric membrane, and polarizing the piezoelectric membrane by the electric field.

摘要翻译： 提供一种制造压电换能器的方法。 该方法包括提供其上形成有多个图案化电极的基板; 在基板和多个图案化电极上提供具有多个压电颗粒的压电悬浮体; 在所述多个图案化电极之间施加电压以产生电场; 以及通过电场将所述压电悬浮体的所述多个压电颗粒沉积在所述多个图案化电极中的至少一个上，以形成图案化的压电膜，并通过所述电场使所述压电膜偏振。

公开(公告)号：US09351067B2

公开(公告)日：2016-05-24

申请号：US14406344

申请日：2013-05-31

申请人： KYOCERA Corporation

发明人： Satoru Kamitani ,  Shigenobu Nakamura

IPC分类号： H04R1/28 ,  H04R7/04 ,  H04R17/00 ,  H01L41/31 ,  H04R17/10

CPC分类号： H04R1/2876 ,  H01L41/31 ,  H04R1/28 ,  H04R1/288 ,  H04R7/04 ,  H04R7/045 ,  H04R17/00 ,  H04R17/10 ,  H04R2440/05

摘要： An acoustic generator disclosed herein includes: an exciter which vibrates by an electric signal being input; and a film-shaped vibrating body to which the exciter is bonded via a bonding material and which vibrates together with the exciter by the vibration of the exciter, wherein the bonding material has a protruded part which protrudes from an outer edge of the exciter when the vibrating body is viewed in plane, at least a part of the protruded part has an undulating shape so as to be different from a shape of the outer edge of the exciter, and a part without the bonding material is provided between the exciter and the vibration body.

摘要翻译： 本文公开的声发生器包括：由输入的电信号振动的激励器; 以及膜状振动体，其中激励器经由接合材料接合并且通过激励器的振动与激励器一起振动，其中，接合材料具有从激励器的外边缘突出的突出部分 在平面中观察振动体，突出部的至少一部分具有波动形状，以与激励器的外缘的形状不同，并且在激励器和振动之间设置没有接合材料的部分 身体。

公开(公告)号：US20150357375A1

公开(公告)日：2015-12-10

申请号：US14829404

申请日：2015-08-18

申请人： INVENSENSE, INC.

发明人： Julius Ming-Lin Tsai ,  Michael Daneman

IPC分类号： H01L27/20 ,  G01N29/24 ,  H01L41/31 ,  B81C1/00 ,  H01L41/113

CPC分类号： H01L27/20 ,  B81C1/00246 ,  G01N29/2437 ,  G01N2291/023 ,  G06K9/0004 ,  H01L41/1132 ,  H01L41/31

摘要： Microelectromechanical (MEMS) devices and associated methods are disclosed. Piezoelectric MEMS transducers (PMUTs) suitable for integration with complementary metal oxide semiconductor (CMOS) integrated circuit (IC), as well as PMUT arrays having high fill factor for fingerprint sensing, are described.

摘要翻译： 公开了微机电（MEMS）装置和相关方法。 描述了适合与互补金属氧化物半导体（CMOS）集成电路（IC）集成的压电MEMS换能器（PMUT）以及具有高填充因子的PMUT阵列用于指纹感测。

公开(公告)号：US09209781B2

公开(公告)日：2015-12-08

申请号：US14261639

申请日：2014-04-25

申请人： FUJITSU LIMITED

发明人： Hajime Kubota ,  Masayuki Itoh ,  Masakazu Kishi

IPC分类号： H01L41/047 ,  H01L41/053 ,  H01L41/083 ,  H01L41/23 ,  H01L41/25 ,  H01L41/27 ,  H01L41/293 ,  H01L41/31 ,  H03B5/32 ,  H03H9/05 ,  H03H9/10 ,  H03H9/19 ,  H03H3/02

CPC分类号： H03H9/19 ,  H01L41/047 ,  H01L41/053 ,  H01L41/083 ,  H01L41/23 ,  H01L41/25 ,  H01L41/27 ,  H01L41/293 ,  H01L41/31 ,  H03B5/32 ,  H03H3/02 ,  H03H9/0538 ,  H03H9/0561 ,  H03H9/10 ,  H03H9/1092

摘要： A oscillator device includes: a first substrate that has a first surface, a second surface, and a through hole extending between the first surface and the second surface; a crystal oscillator that is disposed on the first surface of the first substrate, the crystal oscillator including an electrode; a second substrate that is disposed on the crystal oscillator; a through electrode that is disposed in the through hole, that has a diameter smaller than a diameter of the through hole, that is electrically coupled to the electrode, and that extends between the first surface and the second surface; and a filling member with which an area between an inner wall of the through hole and the through electrode is filled.

摘要翻译： 振荡器装置包括：具有第一表面，第二表面和在第一表面和第二表面之间延伸的通孔的第一基底; 晶体振荡器，其设置在所述第一基板的所述第一表面上，所述晶体振荡器包括电极; 设置在所述晶体振荡器上的第二基板; 设置在通孔中的直通电极，其直径小于通孔的直径，其电耦合到电极，并且在第一表面和第二表面之间延伸; 以及填充构件，通孔与通孔的内壁之间的区域被填充。

公开(公告)号：US09162873B2

公开(公告)日：2015-10-20

申请号：US14074877

申请日：2013-11-08

申请人： Jochen Zoellin ,  Ricardo Ehrenpfordt ,  Christoph Schelling ,  Juergen Graf ,  Frederik Ante ,  Michael Curcic

发明人： Jochen Zoellin ,  Ricardo Ehrenpfordt ,  Christoph Schelling ,  Juergen Graf ,  Frederik Ante ,  Michael Curcic

IPC分类号： B81B7/00 ,  B81B3/00 ,  H01L41/053 ,  H01L41/31 ,  H04R19/04 ,  H04R7/04 ,  B81C1/00

CPC分类号： B81B7/007 ,  B81B3/00 ,  B81B3/0021 ,  B81B3/0027 ,  B81B3/0032 ,  B81B7/0032 ,  B81B7/0058 ,  B81B7/0061 ,  B81B2201/0257 ,  B81B2207/092 ,  B81B2207/096 ,  B81C1/00158 ,  H01L41/053 ,  H01L41/0533 ,  H01L41/31 ,  H01L2224/04105 ,  H01L2224/20 ,  H04R7/04 ,  H04R7/045 ,  H04R19/04

摘要： A packaging concept for MEMS components having at least one diaphragm structure formed in the front side of the component is provided, according to which the MEMS component is mounted on a support which at least laterally delimits a cavity adjoining the diaphragm structure. In addition, at least one electrical feedthrough is formed in the support which allows electrical contacting of the MEMS component through the support. To achieve the largest possible rear volume for the diaphragm structure of the MEMS component for a given chip surface area, and also to simplify the processing of the support, according to the invention the electrical feedthroughs are integrated into the wall of the cavity adjoining the diaphragm structure, in that at least one section of such a feedthrough is implemented in the form of an electrically conductive coating of a side wall section of the cavity.

摘要翻译： 提供了一种用于MEMS部件的封装概念，其具有形成在部件的前侧中的至少一个光阑结构，根据该MEMS部件，MEMS部件安装在至少横向限定邻接隔膜结构的腔的支撑件上。 此外，在支撑件中形成至少一个电馈通，其允许MEMS组件通过支撑件的电接触。 为了实现用于给定芯片表面积的用于MEMS部件的膜结构的尽可能最大的后部体积，并且还简化了支撑件的处理，根据本发明，电馈通件集成到邻近隔膜的空腔的壁中 结构，其中这种馈通的至少一个部分以空腔的侧壁部分的导电涂层的形式实现。

公开(公告)号：US20150165479A1

公开(公告)日：2015-06-18

申请号：US14569256

申请日：2014-12-12

申请人： QUALCOMM Incorporated

发明人： Jon Bradley Lasiter ,  Ravindra Vaman Shenoy ,  Evgeni Petrovich Gousev ,  Hrishikesh Panchawagh ,  David William Burns ,  Nai-Kuei Kuo ,  Jonathan Charles Griffiths ,  Suryaprakash Ganti

IPC分类号： B06B1/06 ,  H01L41/31 ,  G10K9/125

CPC分类号： B06B1/0666 ,  G06F3/0412 ,  G06F3/043 ,  G06F3/0436 ,  G06K9/0002 ,  G06K9/00335 ,  G10K9/125 ,  H01L41/0973 ,  H01L41/22 ,  H01L41/31 ,  Y10T29/42

摘要： A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a multilayer stack disposed on a substrate. The multilayer stack may include an anchor structure disposed over the substrate, a piezoelectric layer stack disposed over the anchor structure, and a mechanical layer disposed proximate to the piezoelectric layer stack. The piezoelectric layer stack may be disposed over a cavity. The mechanical layer may seal the cavity and, together with the piezoelectric layer stack, is supported by the anchor structure and forms a membrane over the cavity, the membrane being configured to undergo one or both of flexural motion and vibration when the PMUT receives or transmits ultrasonic signals.

摘要翻译： 压电微机械超声换能器（PMUT）包括设置在基板上的多层堆叠。 多层堆叠可以包括设置在衬底上的锚结构，设置在锚结构上的压电层堆叠，以及靠近压电层堆叠设置的机械层。 压电层堆叠可以设置在空腔上。 机械层可以密封空腔，并且与压电层堆叠一起由锚结构支撑并且在空腔上形成膜，该膜被配置为当PMUT接收或传输时经历挠曲运动和振动中的一个或两个 超声信号。

公开(公告)号：US20150022592A1

公开(公告)日：2015-01-22

申请号：US14322032

申请日：2014-07-02

申请人： Tsutoh Aoyama ,  Masaru Shinkai ,  Masahiro Ishimori ,  Keiji Ueda ,  Kanshi Abe ,  Manabu Nishimura ,  Toshiaki Masuda

发明人： Tsutoh Aoyama ,  Masaru Shinkai ,  Masahiro Ishimori ,  Keiji Ueda ,  Kanshi Abe ,  Manabu Nishimura ,  Toshiaki Masuda

IPC分类号： H01L41/09 ,  H01L41/31 ,  B41J2/045

CPC分类号： H01L41/31 ,  B41J2/14201 ,  B41J2/14233 ,  B41J2202/03 ,  H01L41/0973 ,  H01L41/316 ,  H01L41/318 ,  Y10T29/42

摘要： An electromechanical transducer includes a first electrode mounted on one of a substrate and a base film, an electromechanical transducer film mounted on the first electrode and made of a piezoelectric substance having a perovskite crystal structure, and a second electrode mounted on the electromechanical transducer film. The electromechanical transducer film includes a {100} plane preferentially oriented to be orthogonal to a thickness direction of the electromechanical transducer film and has a full width at half maximum corresponding to a {200} plane in an X-ray diffraction measurement curve in 2θ-ω scan that is measured by emitting an X-ray beam onto a surface of the electromechanical transducer film at an incident angle θ. The full width at half maximum is not greater than 10 degrees.

摘要翻译： 机电换能器包括安装在基板和基膜之一上的第一电极，安装在第一电极上并由具有钙钛矿晶体结构的压电材料制成的机电换能器薄膜和安装在机电换能器薄膜上的第二电极。 机电换能器膜包括优先定向为与机电换能器膜的厚度方向正交的{100}面，并且在2θ的X射线衍射测量曲线中具有对应于{200}面的半值全宽度; -ω扫描，其通过以入射角度θ将X射线束发射到机电换能器膜的表面上来测量。 半最大宽度不大于10度。

公开(公告)号：US11495729B2

公开(公告)日：2022-11-08

申请号：US16181603

申请日：2018-11-06

申请人： Purdue Research Foundation

发明人： Wenzhuo Wu ,  Ruoxing Wang

IPC分类号： H01L41/08 ,  H01L41/18 ,  H01L41/047 ,  H01L41/29 ,  H01L41/113 ,  H01L41/31

摘要： Highly deformable heterostructures utilizing liquid metals and nanostructures that are suitable for various applications, including but not limited to stretchable electronic devices that can be worn, for example, by a human being. Such a deformable heterostructure includes a stretchable substrate, a conductive liquid metal on the substrate, and nanostructures forming a solid-liquid heterojunction with the conductive liquid metal.

公开(公告)号：US11478822B2

公开(公告)日：2022-10-25

申请号：US16274456

申请日：2019-02-13

申请人： J-METRICS TECHNOLOGY Co., Ltd. ,  Peking University Shenzhen Graduate School

发明人： Yu-Feng Jin ,  Sheng-Lin Ma ,  Qian-Cheng Zhao ,  Yi-Hsiang Chiu ,  Huan Liu ,  Hung-Ping Lee ,  Dan Gong

IPC分类号： B06B1/06 ,  H01L41/047 ,  H01L41/31

摘要： A wafer level ultrasonic chip module includes a substrate, a composite layer and a base material. The substrate has a through slot passing through an upper surface and a lower surface of the substrate. The composite layer includes an ultrasonic body and a protective layer. A lower surface of the ultrasonic body is exposed from the through slot. The protective layer covers the ultrasonic body and a partial upper surface of the substrate. The composite layer has a groove passing through an upper surface and a lower surface of the protective layer, and communicating with the through slot. The ultrasonic body corresponds to the through slot. The base material covers the through slot, such that a space is formed among the through slot, the lower surface of the ultrasonic body and an upper surface of the base material.