Abstract:
A virtual image type double focusing mass spectrometer having a diverging electrostatic field and a converging magnetic field, wherein parameters related to the fringing effects in the boundaries of said fields and to the distribution of the electrostatic field reduces image aberrations of the second order.
Abstract:
An ion microprobe analyser in which a specimen to be analysed is irradiated with primary ions of non-reactive gas and the mass-tocharge ratio and intensity of secondary ions emitted from the specimen are measured for the qualitative and quantitative analysis of elements constituting the specimen. In the analyser, means for directing a reactive gas toward a desired spot on the surface of the specimen to be analysed is provided so as to eliminate serious limitations and undesirable side effects due to the use of the reactive gas atmosphere thereby improving the sensitivity and quantitativity of analysis.
Abstract:
Plural ion beams emanating from one or more ion sources are conducted in multiplexed fashion through the magnetic analyzer of a mass spectrometer toward one or more collectors. In one embodiment, the beams traverse spaced paths and are received by separate collectors. In another embodiment, the beams are time division multiplexed along a common path and received by a single collector. The magnetic analyzer may be scanned during operation to simultaneously provide spectra for each of the beams and the mass spectral range of the beams compared.
Abstract:
A beam correcting device which may be utilized with mass spectrometers for altering the configuration of the beam of ions passing through the mass spectrometer. The beam altering device may include at least four electrodes disposed at substantially equal positions around the beam of ions and positioned at substantially a point along the beam at which the beam is of a minimum thickness. An electrical control circuit is coupled to the electrodes for applying at least four electrical signals, each of a predetermined value, to the electrodes to establish an electrostatic field about the beam of ions. By varying the potentials applied to the various electrodes, a beam having an arcuate cross-sectional configuration may be altered to produce a beam having a generally rectangular cross-sectional configuration thereby compensating for the effect on the beam caused by undesirable fringing fields.